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    • 7. 发明申请
    • Methods for Forming a Channel Through a Polymer Layer Using One or More Photoresist Layers
    • 通过使用一个或多个光刻胶层的聚合物层形成通道的方法
    • US20150004058A1
    • 2015-01-01
    • US13931086
    • 2013-06-28
    • Google Inc.
    • Huanfen YaoJeffrey George LinhardtBabak Parviz
    • G03F7/16
    • G03F7/16B29D11/00826G02B1/04G02C7/04G02C11/10G03F7/425Y10S435/808Y10S436/805Y10T436/25
    • A method may involve forming one or more photoresist layers over a sensor located on a structure, such that the sensor is covered by the one or more photoresist layers. The sensor is configured to detect an analyte. The method may involve forming a first polymer layer. Further, the method may involve positioning the structure on the first polymer layer. Still further, the method may involve forming a second polymer layer over the first polymer layer and the structure, such that the structure is fully enclosed by the first polymer layer, the second polymer layer, and the one or more photoresist layers. The method may also involve removing the one or more photoresist layers to form a channel through the second polymer layer, wherein the sensor is configured to receive the analyte via the channel.
    • 方法可以包括在位于结构上的传感器上形成一个或多个光致抗蚀剂层,使得传感器被一个或多个光致抗蚀剂层覆盖。 传感器被配置为检测分析物。 该方法可以包括形成第一聚合物层。 此外,该方法可以包括将结构定位在第一聚合物层上。 此外,该方法可以包括在第一聚合物层和结构上形成第二聚合物层,使得该结构被第一聚合物层,第二聚合物层和一个或多个光致抗蚀剂层完全包围。 该方法还可以包括去除一个或多个光致抗蚀剂层以形成通过第二聚合物层的通道,其中传感器经配置以经由通道接收分析物。