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1. 发明申请

US20090033907A1 DEVICES AND METHODS FOR DECREASING RESIDUAL CHUCKING FORCES 审中-公开
标题翻译：减少残肢的装置和方法
公开(公告)号：US20090033907A1
公开(公告)日：2009-02-05
申请号：US12168726
申请日：2008-07-07
申请人： Douglas C. Watson , Christopher S. Margeson , Alton H. Phillips , Hiromitsu Yoshimoto , Noriya Kato
发明人： Douglas C. Watson , Christopher S. Margeson , Alton H. Phillips , Hiromitsu Yoshimoto , Noriya Kato
IPC分类号： G03B27/62
CPC分类号： G03B27/62 , G03F7/707
摘要： Devices and methods are disclosed for holding a reticle or analogous object, particularly a planar object. An exemplary reticle-holding device includes a reticle chuck having a reticle-holding surface on which a reticle is placed to hold the reticle. The device includes at least one ultrasonic transducer (as an exemplary vibration-inducing device) sonically coupled to the reticle to excite, whenever the ultrasonic transducer is being energized, a vibrational mode in the reticle or reticle chuck, or both. The vibration mode is sufficient to reduce an adhesion force holding the reticle to the reticle-holding surface. Sonic coupling can be by direct contact with the transducer or across a gap.
摘要翻译：公开了用于保持掩模版或类似物体，特别是平面物体的装置和方法。示例性的掩模版保持装置包括具有掩模版保持表面的掩模版卡盘，在其上放置掩模版以保持掩模版。每当超声波换能器通电时，该装置包括至少一个超声波换能器（作为示例性的振动诱导装置），其超声波耦合到光罩以激发，在标线片或光罩卡盘或两者中均振动模式。振动模式足以减少将掩模版保持在掩模版保持表面上的粘附力。声波耦合可以通过与换能器或间隙直接接触。

2. 发明申请

US20070273856A1 Apparatus and methods for inhibiting immersion liquid from flowing below a substrate 审中-公开
标题翻译：用于抑制浸没液体流过基底的装置和方法
公开(公告)号：US20070273856A1
公开(公告)日：2007-11-29
申请号：US11802731
申请日：2007-05-24
申请人： Christopher S. Margeson
发明人： Christopher S. Margeson
IPC分类号： G03B27/42
CPC分类号： G03F7/70716 , G03F7/70341
摘要： A substrate stage is provided with an immersion liquid collection member that surrounds at least an alignment feature of the substrate stage used to align the substrate on the stage by engaging alignment structure of the substrate. The collection member is located at least partly below the periphery of the substrate held by the substrate holding member of the substrate stage. The collection member has an uppermost liquid-receiving surface that preferably is spaced below a lowermost surface of the substrate when the substrate is held by the substrate holding member. The collection member collects liquid that flows along the alignment feature so as to prevent that immersion liquid from flowing along the under-surface of the substrate.
摘要翻译：衬底台设置有浸没液体收集构件，该浸没液体收集构件通过接合衬底的对准结构来围绕用于将衬底对准衬底的衬底台的至少对准特征。收集构件至少部分地位于由基板台的基板保持构件保持的基板的周边的下方。收集构件具有最上层的液体接受表面，当衬底被衬底保持构件保持时，其最好在衬底的最下表面下方间隔开。收集构件收集沿着对准特征流动的液体，以防止浸没液体沿着基底的下表面流动。

3. 发明授权

US08941814B2 Multiple-blade holding devices 有权
标题翻译：多片保持装置
公开(公告)号：US08941814B2
公开(公告)日：2015-01-27
申请号：US13527206
申请日：2012-06-19
申请人： Fardad Hashemi , Christopher S. Margeson , Lorri L. Watson
发明人： Douglas C. Watson , Fardad Hashemi , Christopher S. Margeson
IPC分类号： F16F7/08
CPC分类号： F16F7/082
摘要： An exemplary device includes first and second portions that are movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region. When the overlap region is compressed, displacement of the first and second portions relative to each other is prevented so as to provide relatively high stiffness in first and second orthogonal directions (e.g., z- and y-directions) and relatively low stiffness in a third orthogonal direction (e.g., x-direction). The device can be used in coordination with an actuator, wherein operation of the actuator and compression of the overlap region are automated.
摘要翻译：示例性装置包括分别由重叠区域彼此交错的多个叶片的第一和第二组可移动地连接在一起的第一和第二部分。当重叠区域被压缩时，防止第一和第二部分相对于彼此的位移，以便在第一和第二正交方向（例如，z和y方向）上提供相对高的刚度，并且在第三正交方向（例如，x方向）。该装置可以与致动器协调使用，其中致动器的操作和重叠区域的压缩是自动化的。

4. 发明申请

US20110242511A1 Apparatus and methods for inhibiting immersion liquid from flowing below a sustrate 审中-公开
标题翻译：用于抑制浸没液体流过下面的装置和方法
公开(公告)号：US20110242511A1
公开(公告)日：2011-10-06
申请号：US13067569
申请日：2011-06-09
申请人： Christopher S. Margeson
发明人： Christopher S. Margeson
IPC分类号： G03B27/52
CPC分类号： G03F7/70716 , G03F7/70341
摘要： A substrate stage is provided with an immersion liquid collection member that surrounds at least an alignment feature of the substrate stage used to align the substrate on the stage by engaging alignment structure of the substrate. The collection member is located at least partly below the periphery of the substrate held by the substrate holding member of the substrate stage. The collection member has an uppermost liquid-receiving surface that preferably is spaced below a lowermost surface of the substrate when the substrate is held by the substrate holding member. The collection member collects liquid that flows along the alignment feature so as to prevent that immersion liquid from flowing along the under-surface of the substrate.
摘要翻译：衬底台设置有浸没液体收集构件，该浸没液体收集构件通过接合衬底的对准结构来围绕用于将衬底对准衬底的衬底台的至少一个对准特征。收集构件至少部分地位于由基板台的基板保持构件保持的基板的周边的下方。收集构件具有最上层的液体接受表面，当衬底被衬底保持构件保持时，其最好在衬底的最下表面下方间隔开。收集构件收集沿着对准特征流动的液体，以防止浸没液体沿着基底的下表面流动。

5. 发明授权

US08416386B2 Conforming seats for clamps used in mounting an optical element, and optical systems comprising same 有权
标题翻译：适合用于安装光学元件的夹具的座椅，以及包括其的光学系统
公开(公告)号：US08416386B2
公开(公告)日：2013-04-09
申请号：US12047244
申请日：2008-03-12
申请人： Christopher S. Margeson , Douglas C. Watson
发明人： Christopher S. Margeson , Douglas C. Watson
IPC分类号： G03B27/42 , G03B27/52 , G03B27/54 , G02B7/02
CPC分类号： G02B7/026 , G02B7/182 , G03F7/70825 , G03F7/7095
摘要： Clamps are disclosed for holding an optical element relative to a support. An exemplary clamp includes first and second arms and a member connecting the arms such that a portion of a mounting feature of the optical element is between the first and second arms. The first arm applies a clamping force toward a respective portion of the mounting feature, and the second arm includes a seat. The seat has at least upper and intermediate portions. The upper portion engages the respective location on the mounting feature. The intermediate portion is situated between the upper portion and the second arm and has a lateral thickness less than the lateral thickness of the upper portion. The intermediate portion exhibits elastic and plastic deformability sufficient for any moment applied by the clamp to the mounting feature to be limited to less than a designated peak moment, while maintaining substantially full engagement of the upper portion with the respective location.
摘要翻译：公开了用于相对于支撑件保持光学元件的夹具。示例性夹具包括第一臂和第二臂以及连接臂的构件，使得光学元件的安装特征的一部分在第一和第二臂之间。第一臂向安装构件的相应部分施加夹紧力，并且第二臂包括座。座椅至少具有上部和中间部分。上部接合安装特征上的相应位置。中间部分位于上部和第二臂之间，其横向厚度小于上部的横向厚度。中间部分表现出弹性和塑性可变形性，足以使夹具对安装特征施加的任何时刻被限制在小于指定的峰值时刻，同时保持上部与相应位置的基本上完全接合。

6. 发明授权

US07692768B2 Iron core motor driven automatic reticle blind 有权
标题翻译：铁芯电机驱动自动掩模版盲
公开(公告)号：US07692768B2
公开(公告)日：2010-04-06
申请号：US11427439
申请日：2006-06-29
申请人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
发明人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
IPC分类号： G03B27/54 , G03B27/42 , G03B27/62
CPC分类号： G03B27/52 , G03F7/70066
摘要： Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.
摘要翻译：公开了用于屏蔽照明系统内的掩模版的方法和装置。根据本发明的一个方面，用于屏蔽诸如掩模版的物体的盲装置包括具有至少一个线圈的线圈组件，供应空气的空气供应器和第一盲区部件。第一盲部包括至少一个磁体并且不与线圈物理接触。第一盲部通过空气与线圈支撑一定距离，并且线圈组件与磁体协作以使第一盲部移动。当第一盲区部分处于第一位置时，第一盲区部分屏蔽物体。

7. 发明申请

US20080002173A1 Iron Core Motor Driven Automatic Reticle Blind 有权
标题翻译：铁芯电机驱动自动掩模开窗
公开(公告)号：US20080002173A1
公开(公告)日：2008-01-03
申请号：US11427439
申请日：2006-06-29
申请人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
发明人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
IPC分类号： G03B27/54
CPC分类号： G03B27/52 , G03F7/70066
摘要： Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.
摘要翻译：公开了用于屏蔽照明系统内的掩模版的方法和装置。根据本发明的一个方面，用于屏蔽诸如掩模版的物体的盲装置包括具有至少一个线圈的线圈组件，供应空气的空气供应器和第一盲区部件。第一盲部包括至少一个磁体并且不与线圈物理接触。第一盲部通过空气与线圈支撑一定距离，并且线圈组件与磁体协作以使第一盲部移动。当第一盲区部分处于第一位置时，第一盲区部分屏蔽物体。

8. 发明申请

US20120320362A1 MULTIPLE-BLADE HOLDING DEVICES 有权
标题翻译：多片式保持装置
公开(公告)号：US20120320362A1
公开(公告)日：2012-12-20
申请号：US13527206
申请日：2012-06-19
申请人： Douglas C. Watson , Fardad Hashemi , Christopher S. Margeson , Lorri L. Watson
发明人： Douglas C. Watson , Fardad Hashemi , Christopher S. Margeson , Lorri L. Watson
IPC分类号： G03B27/58 , B23Q1/28
CPC分类号： F16F7/082
摘要： An exemplary device includes first and second portions that are movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region. When the overlap region is compressed, displacement of the first and second portions relative to each other is prevented so as to provide relatively high stiffness in first and second orthogonal directions (e.g., z- and y-directions) and relatively low stiffness in a third orthogonal direction (e.g., x-direction). The device can be used in coordination with an actuator, wherein operation of the actuator and compression of the overlap region are automated.
摘要翻译：示例性装置包括分别由重叠区域彼此交错的多个叶片的第一和第二组可移动地连接在一起的第一和第二部分。当重叠区域被压缩时，防止第一和第二部分相对于彼此的位移，以便在第一和第二正交方向（例如，z和y方向）上提供相对高的刚度，并且在第三正交方向（例如，x方向）。该装置可以与致动器协调使用，其中致动器的操作和重叠区域的压缩是自动化的。

9. 发明申请

US20080225255A1 CONFORMING SEATS FOR CLAMPS USED IN MOUNTING AN OPTICAL ELEMENT, AND OPTICAL SYSTEMS COMPRISING SAME 有权
标题翻译：适用于安装光学元件的灯头以及包含其中的光学系统的座椅
公开(公告)号：US20080225255A1
公开(公告)日：2008-09-18
申请号：US12047244
申请日：2008-03-12
申请人： Christopher S. Margeson , Douglas C. Watson
发明人： Christopher S. Margeson , Douglas C. Watson
IPC分类号： G03B27/54 , G02B7/00
CPC分类号： G02B7/026 , G02B7/182 , G03F7/70825 , G03F7/7095
摘要： Clamps are disclosed for holding an optical element relative to a support. An exemplary clamp includes first and second arms and a member connecting the arms such that a portion of a mounting feature of the optical element is between the first and second arms. The first arm applies a clamping force toward a respective portion of the mounting feature, and the second arm includes a seat. The seat has at least upper and intermediate portions. The upper portion engages the respective location on the mounting feature. The intermediate portion is situated between the upper portion and the second arm and has a lateral thickness less than the lateral thickness of the upper portion. The intermediate portion exhibits elastic and plastic deformability sufficient for any moment applied by the clamp to the mounting feature to be limited to less than a designated peak moment, while maintaining substantially full engagement of the upper portion with the respective location.
摘要翻译：公开了用于相对于支撑件保持光学元件的夹具。示例性夹具包括第一臂和第二臂以及连接臂的构件，使得光学元件的安装特征的一部分在第一和第二臂之间。第一臂向安装构件的相应部分施加夹紧力，并且第二臂包括座。座椅至少具有上部和中间部分。上部接合安装特征上的相应位置。中间部分位于上部和第二臂之间，其横向厚度小于上部的横向厚度。中间部分表现出弹性和塑性可变形性，足以使夹具对安装特征施加的任何时刻被限制在小于指定的峰值时刻，同时保持上部与相应位置的基本上完全接合。

10. 发明授权

US07296777B2 Acceleration clamp assist 失效
标题翻译：加速夹辅助
公开(公告)号：US07296777B2
公开(公告)日：2007-11-20
申请号：US10807291
申请日：2004-03-24
申请人： Christopher S. Margeson
发明人： Christopher S. Margeson
IPC分类号： F16M13/00
CPC分类号： H01L21/68728 , Y10T24/44222
摘要： Forces are minimized in an object supported relative to a surface by providing a first, preferably static force sufficient to retain the object is position when at rest, preferably through a clamping arrangement having a first actuator, measuring or predicting an acceleration and applying a second, preferably dynamic force corresponding to the acceleration. The first and second forces are preferably arranged to be additive or reinforcing but the arrangement can be made fail-safe at the expense of increased power consumption by arranging the first force in accordance with the maximum anticipated acceleration and counteracting the first force with the second force for lesser or zero accelerations. The second force is preferably provided by a clamp of arbitrary configuration which can be moved into and out of engagement with the object. By minimizing forces applied to the object in such a manner, damage such as creep and propagation of crystal lattice dislocations over time can largely be prevented.
摘要翻译：优选通过具有第一致动器的夹紧装置，测量或预测加速度并施加第二，第二，第二，第二，第二，第二，第二，第二，第二，优选对应于加速度的动态力。第一和第二力优选地被设置为添加或加强，但是通过根据最大预期加速度布置第一力并以第二力抵消第一力，该构造可以以牺牲增加的功率消耗为代价来进行故障安全对于较小或零加速度。第二力优选由任意构造的夹具提供，该夹具可以移动进入和离开与物体的接合。通过以这种方式最小化施加到物体的力，可以大大地防止诸如蠕变和晶格位错随时间的传播的损伤。

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