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1. 发明申请

US20090033907A1 DEVICES AND METHODS FOR DECREASING RESIDUAL CHUCKING FORCES 审中-公开
标题翻译：减少残肢的装置和方法
公开(公告)号：US20090033907A1
公开(公告)日：2009-02-05
申请号：US12168726
申请日：2008-07-07
申请人： Douglas C. Watson , Christopher S. Margeson , Alton H. Phillips , Hiromitsu Yoshimoto , Noriya Kato
发明人： Douglas C. Watson , Christopher S. Margeson , Alton H. Phillips , Hiromitsu Yoshimoto , Noriya Kato
IPC分类号： G03B27/62
CPC分类号： G03B27/62 , G03F7/707
摘要： Devices and methods are disclosed for holding a reticle or analogous object, particularly a planar object. An exemplary reticle-holding device includes a reticle chuck having a reticle-holding surface on which a reticle is placed to hold the reticle. The device includes at least one ultrasonic transducer (as an exemplary vibration-inducing device) sonically coupled to the reticle to excite, whenever the ultrasonic transducer is being energized, a vibrational mode in the reticle or reticle chuck, or both. The vibration mode is sufficient to reduce an adhesion force holding the reticle to the reticle-holding surface. Sonic coupling can be by direct contact with the transducer or across a gap.
摘要翻译：公开了用于保持掩模版或类似物体，特别是平面物体的装置和方法。示例性的掩模版保持装置包括具有掩模版保持表面的掩模版卡盘，在其上放置掩模版以保持掩模版。每当超声波换能器通电时，该装置包括至少一个超声波换能器（作为示例性的振动诱导装置），其超声波耦合到光罩以激发，在标线片或光罩卡盘或两者中均振动模式。振动模式足以减少将掩模版保持在掩模版保持表面上的粘附力。声波耦合可以通过与换能器或间隙直接接触。

2. 发明授权

US08416386B2 Conforming seats for clamps used in mounting an optical element, and optical systems comprising same 有权
标题翻译：适合用于安装光学元件的夹具的座椅，以及包括其的光学系统
公开(公告)号：US08416386B2
公开(公告)日：2013-04-09
申请号：US12047244
申请日：2008-03-12
申请人： Christopher S. Margeson , Douglas C. Watson
发明人： Christopher S. Margeson , Douglas C. Watson
IPC分类号： G03B27/42 , G03B27/52 , G03B27/54 , G02B7/02
CPC分类号： G02B7/026 , G02B7/182 , G03F7/70825 , G03F7/7095
摘要： Clamps are disclosed for holding an optical element relative to a support. An exemplary clamp includes first and second arms and a member connecting the arms such that a portion of a mounting feature of the optical element is between the first and second arms. The first arm applies a clamping force toward a respective portion of the mounting feature, and the second arm includes a seat. The seat has at least upper and intermediate portions. The upper portion engages the respective location on the mounting feature. The intermediate portion is situated between the upper portion and the second arm and has a lateral thickness less than the lateral thickness of the upper portion. The intermediate portion exhibits elastic and plastic deformability sufficient for any moment applied by the clamp to the mounting feature to be limited to less than a designated peak moment, while maintaining substantially full engagement of the upper portion with the respective location.
摘要翻译：公开了用于相对于支撑件保持光学元件的夹具。示例性夹具包括第一臂和第二臂以及连接臂的构件，使得光学元件的安装特征的一部分在第一和第二臂之间。第一臂向安装构件的相应部分施加夹紧力，并且第二臂包括座。座椅至少具有上部和中间部分。上部接合安装特征上的相应位置。中间部分位于上部和第二臂之间，其横向厚度小于上部的横向厚度。中间部分表现出弹性和塑性可变形性，足以使夹具对安装特征施加的任何时刻被限制在小于指定的峰值时刻，同时保持上部与相应位置的基本上完全接合。

3. 发明授权

US07692768B2 Iron core motor driven automatic reticle blind 有权
标题翻译：铁芯电机驱动自动掩模版盲
公开(公告)号：US07692768B2
公开(公告)日：2010-04-06
申请号：US11427439
申请日：2006-06-29
申请人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
发明人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
IPC分类号： G03B27/54 , G03B27/42 , G03B27/62
CPC分类号： G03B27/52 , G03F7/70066
摘要： Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.
摘要翻译：公开了用于屏蔽照明系统内的掩模版的方法和装置。根据本发明的一个方面，用于屏蔽诸如掩模版的物体的盲装置包括具有至少一个线圈的线圈组件，供应空气的空气供应器和第一盲区部件。第一盲部包括至少一个磁体并且不与线圈物理接触。第一盲部通过空气与线圈支撑一定距离，并且线圈组件与磁体协作以使第一盲部移动。当第一盲区部分处于第一位置时，第一盲区部分屏蔽物体。

4. 发明申请

US20080002173A1 Iron Core Motor Driven Automatic Reticle Blind 有权
标题翻译：铁芯电机驱动自动掩模开窗
公开(公告)号：US20080002173A1
公开(公告)日：2008-01-03
申请号：US11427439
申请日：2006-06-29
申请人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
发明人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
IPC分类号： G03B27/54
CPC分类号： G03B27/52 , G03F7/70066
摘要： Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.
摘要翻译：公开了用于屏蔽照明系统内的掩模版的方法和装置。根据本发明的一个方面，用于屏蔽诸如掩模版的物体的盲装置包括具有至少一个线圈的线圈组件，供应空气的空气供应器和第一盲区部件。第一盲部包括至少一个磁体并且不与线圈物理接触。第一盲部通过空气与线圈支撑一定距离，并且线圈组件与磁体协作以使第一盲部移动。当第一盲区部分处于第一位置时，第一盲区部分屏蔽物体。

5. 发明申请

US20120320362A1 MULTIPLE-BLADE HOLDING DEVICES 有权
标题翻译：多片式保持装置
公开(公告)号：US20120320362A1
公开(公告)日：2012-12-20
申请号：US13527206
申请日：2012-06-19
申请人： Douglas C. Watson , Fardad Hashemi , Christopher S. Margeson , Lorri L. Watson
发明人： Douglas C. Watson , Fardad Hashemi , Christopher S. Margeson , Lorri L. Watson
IPC分类号： G03B27/58 , B23Q1/28
CPC分类号： F16F7/082
摘要： An exemplary device includes first and second portions that are movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region. When the overlap region is compressed, displacement of the first and second portions relative to each other is prevented so as to provide relatively high stiffness in first and second orthogonal directions (e.g., z- and y-directions) and relatively low stiffness in a third orthogonal direction (e.g., x-direction). The device can be used in coordination with an actuator, wherein operation of the actuator and compression of the overlap region are automated.
摘要翻译：示例性装置包括分别由重叠区域彼此交错的多个叶片的第一和第二组可移动地连接在一起的第一和第二部分。当重叠区域被压缩时，防止第一和第二部分相对于彼此的位移，以便在第一和第二正交方向（例如，z和y方向）上提供相对高的刚度，并且在第三正交方向（例如，x方向）。该装置可以与致动器协调使用，其中致动器的操作和重叠区域的压缩是自动化的。

6. 发明申请

US20080225255A1 CONFORMING SEATS FOR CLAMPS USED IN MOUNTING AN OPTICAL ELEMENT, AND OPTICAL SYSTEMS COMPRISING SAME 有权
标题翻译：适用于安装光学元件的灯头以及包含其中的光学系统的座椅
公开(公告)号：US20080225255A1
公开(公告)日：2008-09-18
申请号：US12047244
申请日：2008-03-12
申请人： Christopher S. Margeson , Douglas C. Watson
发明人： Christopher S. Margeson , Douglas C. Watson
IPC分类号： G03B27/54 , G02B7/00
CPC分类号： G02B7/026 , G02B7/182 , G03F7/70825 , G03F7/7095
摘要： Clamps are disclosed for holding an optical element relative to a support. An exemplary clamp includes first and second arms and a member connecting the arms such that a portion of a mounting feature of the optical element is between the first and second arms. The first arm applies a clamping force toward a respective portion of the mounting feature, and the second arm includes a seat. The seat has at least upper and intermediate portions. The upper portion engages the respective location on the mounting feature. The intermediate portion is situated between the upper portion and the second arm and has a lateral thickness less than the lateral thickness of the upper portion. The intermediate portion exhibits elastic and plastic deformability sufficient for any moment applied by the clamp to the mounting feature to be limited to less than a designated peak moment, while maintaining substantially full engagement of the upper portion with the respective location.
摘要翻译：公开了用于相对于支撑件保持光学元件的夹具。示例性夹具包括第一臂和第二臂以及连接臂的构件，使得光学元件的安装特征的一部分在第一和第二臂之间。第一臂向安装构件的相应部分施加夹紧力，并且第二臂包括座。座椅至少具有上部和中间部分。上部接合安装特征上的相应位置。中间部分位于上部和第二臂之间，其横向厚度小于上部的横向厚度。中间部分表现出弹性和塑性可变形性，足以使夹具对安装特征施加的任何时刻被限制在小于指定的峰值时刻，同时保持上部与相应位置的基本上完全接合。

7. 发明授权

US08941814B2 Multiple-blade holding devices 有权
标题翻译：多片保持装置
公开(公告)号：US08941814B2
公开(公告)日：2015-01-27
申请号：US13527206
申请日：2012-06-19
申请人： Fardad Hashemi , Christopher S. Margeson , Lorri L. Watson
发明人： Douglas C. Watson , Fardad Hashemi , Christopher S. Margeson
IPC分类号： F16F7/08
CPC分类号： F16F7/082
摘要： An exemplary device includes first and second portions that are movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region. When the overlap region is compressed, displacement of the first and second portions relative to each other is prevented so as to provide relatively high stiffness in first and second orthogonal directions (e.g., z- and y-directions) and relatively low stiffness in a third orthogonal direction (e.g., x-direction). The device can be used in coordination with an actuator, wherein operation of the actuator and compression of the overlap region are automated.
摘要翻译：示例性装置包括分别由重叠区域彼此交错的多个叶片的第一和第二组可移动地连接在一起的第一和第二部分。当重叠区域被压缩时，防止第一和第二部分相对于彼此的位移，以便在第一和第二正交方向（例如，z和y方向）上提供相对高的刚度，并且在第三正交方向（例如，x方向）。该装置可以与致动器协调使用，其中致动器的操作和重叠区域的压缩是自动化的。

8. 发明授权

US08853988B2 Control systems and methods for compensating for effects of a stage motor 有权
标题翻译：用于补偿平台电机的影响的控制系统和方法
公开(公告)号：US08853988B2
公开(公告)日：2014-10-07
申请号：US12406322
申请日：2009-03-18
申请人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
发明人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
IPC分类号： G05B1/06 , G05B19/404 , G03F7/20
CPC分类号： G05B19/404 , G03F7/70725 , G03F7/70758 , G05B2219/41128 , G05B2219/41443
摘要： Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.
摘要翻译：本发明的实施例补偿了精密级装置中的级电动机的一个或多个效果。前馈模块接收与电动机的效果相对应的输入信号，并产生可用于修改电动机控制信号以补偿电动机的影响的前馈控制信号。在一些实施例中，提供控制系统以补偿由电动机产生的反电动势，而在其他实施例中，控制系统可以补偿电动机的感应效应。本发明的实施例可用于精密平台装置，例如平版印刷装置，例如步进器和扫描器。

9. 发明授权

US08767174B2 Temperature-controlled holding devices for planar articles 有权
标题翻译：用于平面物品的温度控制保持装置
公开(公告)号：US08767174B2
公开(公告)日：2014-07-01
申请号：US13026129
申请日：2011-02-11
申请人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
发明人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
IPC分类号： G03B27/42
CPC分类号： H01L21/67109 , G03F7/70716 , G03F7/70875
摘要： An exemplary apparatus includes a controllably movable body, a holding device, and a coolant circulation device. The body comprises a wall including a planar contact surface that receives the reverse surface of the article. The wall co-extends with at least a heat-receiving area of the utility surface whenever the article is being held by the body. The wall also includes a second surface separated from but proximal to the contact surface, and is thermally conductive from the contact surface to the second surface. The holding device holds the article to the contact surface with the reverse surface contacting the contact surface. The coolant circulation device delivers flow of a coolant fluid to the second surface to urge conduction of heat from the contact surface to the second surface. The holding device and coolant-circulation device operate in concert to actively control shape of the article being held by the apparatus.
摘要翻译：示例性装置包括可控制的移动体，保持装置和冷却剂循环装置。该主体包括一个壁，该壁包括接纳制品的相反表面的平面接触表面。每当物品被身体保持时，墙壁至少与实用表面的受热区域共同延伸。该壁还包括从接触表面分离但接近接触表面的第二表面，并且从接触表面到第二表面是导热的。保持装置将物品保持在与接触表面接触的反面的接触表面上。冷却剂循环装置将冷却剂流体的流动传递到第二表面以促使热量从接触表面传导到第二表面。保持装置和冷却剂循环装置协同工作以主动地控制由装置保持的物品的形状。

10. 发明申请

US20140176931A1 INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS 审中-公开
标题翻译：可移动光学元件的间歇温度控制
公开(公告)号：US20140176931A1
公开(公告)日：2014-06-26
申请号：US14237821
申请日：2012-08-12
申请人： Alton H. Phillips , Douglas C. Watson , Travis D. Bow , Hiroyuki Kondo , Atsushi Yamada , Hideo Takino , Hideki Komatsuda
发明人： Alton H. Phillips , Douglas C. Watson , Travis D. Bow , Hiroyuki Kondo , Atsushi Yamada , Hideo Takino , Hideki Komatsuda
IPC分类号： G02B26/08 , G03F7/20
CPC分类号： G02B26/0816 , G03F7/70075 , G03F7/702 , G03F7/70825 , G03F7/70891 , G03F7/7095
摘要： An optical system including an optical element, a positioning mechanism configured to position the optical element into an operational position, and a temperature control mechanism configured to intermittently control the temperature of the optical element between operations. By alternatively positioning the optical element between an operational position and a position in thermal contact with the temperature control mechanism, the two mechanisms for positioning and controlling the temperature of the optical element are de-coupled from one another. As a result, the mechanism for each may be optimized In non-exclusive embodiments, the temperature control mechanism may be used to control the temperature of an individual optical element or a plurality of optical elements, such as for example, a fly's eye mirror used in an illumination unit of an EUV lithography tool.
摘要翻译：一种光学系统，包括光学元件，配置成将光学元件定位在操作位置的定位机构，以及配置为在操作之间间歇地控制光学元件的温度的温度控制机构。通过可选地将光学元件定位在与温度控制机构热接触的操作位置和位置之间，用于定位和控制光学元件的温度的两个机构彼此脱耦合。结果，可以优化每个的机构在非排他性的实施例中，温度控制机构可用于控制单个光学元件或多个光学元件的温度，例如使用的飞眼镜在EUV光刻工具的照明单元中。

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