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1. 发明授权

US09146156B2 Light source tracking in optical metrology system 有权
标题翻译：光学测量系统中的光源跟踪
公开(公告)号：US09146156B2
公开(公告)日：2015-09-29
申请号：US13285712
申请日：2011-10-31
申请人： Guorong V. Zhuang , Shankar Krishnan , Johannes D. de Veer , Klaus Flock , David Y. Wang , Lawrence D. Rotter
发明人： Guorong V. Zhuang , Shankar Krishnan , Johannes D. de Veer , Klaus Flock , David Y. Wang , Lawrence D. Rotter
IPC分类号： G01B11/26 , G01J3/02 , G01N21/47 , G01J3/06 , G01J3/10
CPC分类号： G01J3/0264 , G01B2210/56 , G01J3/0208 , G01J3/0278 , G01J3/06 , G01J3/10 , G01N21/4785
摘要： The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.
摘要翻译：本发明可以包括将诊断样本加载到样本台上，将来自设置在多轴平台上的照明源的光聚焦到诊断样本上，利用检测器收集从诊断样品的表面反射的一部分光，其中照明源和检测器通过光学系统光学直接耦合，获取指示来自诊断样本的照明源位置漂移的一组诊断参数，通过比较所获取的诊断参数集合来确定照明源位置漂移的大小到在先前测量的对准条件下从诊断样本获得的初始参数集合，确定照明源位置漂移的方向; 以及提供照明源位置调整参数，其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

2. 发明申请

US20130033704A1 LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM 有权
标题翻译：光学系统系统中的光源跟踪
公开(公告)号：US20130033704A1
公开(公告)日：2013-02-07
申请号：US13285712
申请日：2011-10-31
申请人： Guorong V. Zhuang , Shankar Krishnan , Johannes D. de Veer , Klaus Flock , David Y. Wang , Lawrence D. Rotter
发明人： Guorong V. Zhuang , Shankar Krishnan , Johannes D. de Veer , Klaus Flock , David Y. Wang , Lawrence D. Rotter
IPC分类号： G01C1/00
CPC分类号： G01J3/0264 , G01B2210/56 , G01J3/0208 , G01J3/0278 , G01J3/06 , G01J3/10 , G01N21/4785
摘要： The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.
摘要翻译：本发明可以包括将诊断样本加载到样本台上，将来自设置在多轴平台上的照明源的光聚焦到诊断样本上，利用检测器收集从诊断样品的表面反射的一部分光，其中照明源和检测器通过光学系统光学直接耦合，获取指示来自诊断样本的照明源位置漂移的一组诊断参数，通过比较所获取的诊断参数集合来确定照明源位置漂移的大小到在先前测量的对准条件下从诊断样本获得的初始参数集合，确定照明源位置漂移的方向; 以及提供照明源位置调整参数，其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

3. 发明授权

US07929667B1 High brightness X-ray metrology 有权
标题翻译：高亮度X射线测量
公开(公告)号：US07929667B1
公开(公告)日：2011-04-19
申请号：US12569833
申请日：2009-09-29
申请人： Guorong V. Zhuang , John Fielden
发明人： Guorong V. Zhuang , John Fielden
IPC分类号： H01J35/00 , H01J35/08 , G01N23/20
CPC分类号： H05G2/003 , H05G2/005
摘要： An x-ray metrology tool having only one x-ray source. The x-ray source includes a liquid metal source for heating and melting at least one metal and producing a liquid metal jet, a liquid metal collector for acquiring the liquid metal jet, a liquid metal circulation system for returning liquid metal from the liquid metal collector to the liquid metal source, and an electron beam source for directing an electron beam at the liquid metal jet anode, thereby producing an incident x-ray beam that is directable towards a sample. A detector receives emissions from the sample in response to the incident x-ray beam, and produces signals indicative of properties of the sample. A controller controls the x-ray source, acquires the signals from the detector, and determines the properties of the sample based at least in part on the signals.
摘要翻译：只有一个x射线源的X射线测量工具。 x射线源包括用于加热和熔化至少一种金属并产生液态金属射流的液态金属源，用于获取液态金属射流的液体金属收集器，用于从液态金属收集器返回液态金属的液态金属循环系统以及用于在液态金属喷射阳极处引导电子束的电子束源，从而产生可朝向样品指向的入射X射线束。检测器响应于入射的X射线束接收来自样品的发射，并产生指示样品性质的信号。控制器控制x射线源，从检测器获取信号，并至少部分地基于信号来确定样本的属性。

4. 发明授权

US09404872B1 Selectably configurable multiple mode spectroscopic ellipsometry 有权
标题翻译：可选择配置的多模光谱椭偏仪
公开(公告)号：US09404872B1
公开(公告)日：2016-08-02
申请号：US13538552
申请日：2012-06-29
申请人： Haiming Wang , Guorong V. Zhuang , Shankar Krishnan , Klaus Flock , Johannes D. de Veer
发明人： Haiming Wang , Guorong V. Zhuang , Shankar Krishnan , Klaus Flock , Johannes D. de Veer
IPC分类号： G01J4/00 , G01N21/55 , G01N21/88 , G01N21/21
CPC分类号： G01N21/8806 , G01N21/211 , G01N21/274 , G01N21/93 , G01N21/9501 , G01N21/95607 , G01N2021/213
摘要： The present invention may include an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light reflected from the surface of the sample, a selectably configurable optical system comprising: a rotatable polarizing element disposed in the illumination arm of the optical system, an analyzing element disposed in the collection arm of the optical system, and a rotatable-translatable compensator element disposed in the collection arm of the optical system, and a control system communicatively configured to selectably configure the optical system in the a rotating compensator (RCSE) mode, a rotating polarizer (RPSE) mode, or a rotating polarizer and compensator (RPRC) mode.
摘要翻译：本发明可以包括被配置为照亮样品的表面的照明源，被配置为检测从样品的表面反射的光的至少一部分的检测器，可选择地配置的光学系统，包括：可旋转偏振元件，其设置在光学系统的照明臂，设置在光学系统的收集臂中的分析元件和设置在光学系统的收集臂中的可旋转平移补偿元件，以及通信地配置为可选择地将光学系统配置在旋转补偿器（RCSE）模式，旋转偏振器（RPSE）模式或旋转偏振器和补偿器（RPRC）模式。

5. 发明授权

US08570514B2 Optical system polarizer calibration 有权
标题翻译：光学系统偏光镜校准
公开(公告)号：US08570514B2
公开(公告)日：2013-10-29
申请号：US13164130
申请日：2011-06-20
申请人： Johannes D. de Veer , Leonid Poslavsky , Guorong V. Zhuang , Shankar Krishnan
发明人： Johannes D. de Veer , Leonid Poslavsky , Guorong V. Zhuang , Shankar Krishnan
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01J3/504 , G01N21/274
摘要： A method to calibrate a polarizer in polarized optical system at any angle of incidence, by decoupling the calibration from a polarization effect of the system, by providing a calibration apparatus that includes a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, loading the calibration apparatus in the polarized optical system with the indicator in a desired position, determining an initial angle between the polarization orientation and a reference of the polarized optical system, acquiring spectra using the polarized optical system at a plurality of known angles between the polarization orientation and the reference of the polarized optical system, using the spectra to plot a curve indicating an angle of the polarizer in the polarized optical system, and when the angle of the polarizer is outside of a desired range, adjusting the angle of the polarizer, and repeating the steps of acquiring the spectra, and plotting a curve indicating the angle of the polarizer.
摘要翻译：一种通过提供校准装置来校准偏振光学系统中任何入射角的偏振器的方法，通过提供校准装置，该校准装置包括具有设置在其表面上的偏振器的衬底，用于指示偏振器的偏振取向的衬底，将校准装置装载在具有指示器的期望位置的偏振光学系统中，确定极化取向和偏振光学系统的基准之间的初始角度，使用偏振光光学系统以偏振方向和偏振光学系统的基准之间的多个已知角度，使用光谱绘制指示偏振器在偏振光学系统中的角度的曲线，以及当偏振器的角度在期望的范围，调节偏振器的角度，并重复以下步骤获取光谱，并绘制一个指示偏振片角度的曲线。

6. 发明授权

US07928390B1 Infrared metrology 有权
标题翻译：红外测量
公开(公告)号：US07928390B1
公开(公告)日：2011-04-19
申请号：US12193361
申请日：2008-08-18
申请人： Guorong V. Zhuang , John Fielden
发明人： Guorong V. Zhuang , John Fielden
IPC分类号： G01J5/02
CPC分类号： G01J3/447 , G01J3/108
摘要： A spectroscopic instrument of the type providing an infrared light beam from an infrared light source along an infrared light path, where the infrared light beam includes a wide range of wavelengths of radiation within a target range of from about two microns to about three hundred microns, where the infrared light source includes a supercontinuum source having a CO2 pumping laser adapted to fire into a solid-core photonic crystal fiber formed at least in part of at least one of AlClxBr(1-x), NaCl, and ZnSe, which solid-core photonic crystal fiber produces the infrared light beam when excited by the pumping laser.
摘要翻译：这种类型的光谱仪器沿着红外光路提供来自红外光源的红外光束，其中红外光束包括在约2微米至约300微米的目标范围内的宽范围的辐射波长，其中所述红外光源包括具有CO 2泵送激光器的超连续光源，所述激光源适于射入至少部分由AlCl x Br（1-x），NaCl和ZnSe中的至少一种形成的固体光子晶体光纤，核心光子晶体光纤在被激光激发时产生红外光束。

7. 发明授权

US07760364B1 Systems and methods for near-field heterodyne spectroscopy 失效
标题翻译：近场外差光谱的系统和方法
公开(公告)号：US07760364B1
公开(公告)日：2010-07-20
申请号：US12256324
申请日：2008-10-22
申请人： Guorong V. Zhuang , John Fielden , Christopher F. Bevis
发明人： Guorong V. Zhuang , John Fielden , Christopher F. Bevis
IPC分类号： G01B9/02
CPC分类号： G01N21/1717 , G01N2021/1725 , G01Q60/22
摘要： In a near-field heterodyne spectroscopy system, a near-field generation device receives the output of a pump beam source and is also made to vibrate or move at a frequency f to generate a modulated near-field beam having a near-field component. The outputs of the pump beam source and a probe beam source (optional) as well as the modulated near-field beam are directed to the same point on a sample. At least one of the outputs of the pump beam source and probe beam source is modulated at a frequency Ω. Thus, the reflected beam that results from the interaction with the region illuminated by the modulated near-field beam is modulated at frequencies Ω+f and Ω−f. Because the excitation is near-field, the electric field in the sample is evanescent and ensures a shallow probing depth as well as smaller lateral dimensions beyond diffraction limit.
摘要翻译：在近场外差光谱系统中，近场产生装置接收泵浦光束源的输出，并且还使其以频率f振动或移动以产生具有近场分量的调制近场光束。泵浦光束源和探测光束源（可选）以及调制的近场光束的输出被引导到样品上的相同点。泵浦光源和探测光束源的输出中的至少一个以频率＆OHgr进行调制。因此，由与被调制的近场光束照射的区域的相互作用产生的反射光束被调制在频率ωgr+ f和＆omegr; -f。因为激发是近场的，所以样品中的电场是消逝的，并且确保了较深的探测深度以及超过衍射极限的较小的横向尺寸。

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