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    • 3. 发明授权
    • Photodetector using a graphene thin film and nanoparticles, and method for producing the same
    • 使用石墨烯薄膜和纳米颗粒的光电检测器及其制造方法
    • US08598568B2
    • 2013-12-03
    • US13392176
    • 2010-08-24
    • Tae-Whan KimJae-Hun JungDong-Ick SonJung-Min LeeHee-Yeon YangWon-Il Park
    • Tae-Whan KimJae-Hun JungDong-Ick SonJung-Min LeeHee-Yeon YangWon-Il Park
    • H01L31/0256
    • H01L31/035209H01L31/112H01L51/428
    • Provided are a photodetector (PD) using a graphene thin film and nanoparticles and a method of fabricating the same. The PD includes a graphene thin film having a sheet shape formed by means of a graphene deposition process using a vapor-phase carbon (C) source and a nanoparticle layer formed on the graphene thin film and patterned to define an electrode region of the graphene thin film, the nanoparticle layer being formed of nanoparticles without a matrix material. The PD has a planar structure using the graphene thin film as a channel and an electrode and using nanoparticles as a photovoltaic material (capable of forming electron-hole pairs due to photoelectron-motive force caused by ultraviolet (UV) light). Since the PD has a very simple structure, the PD may be fabricated at low cost with high productivity. Also, the PD includes the graphene thin film to reduce power consumption.
    • 提供了使用石墨烯薄膜和纳米颗粒的光电检测器(PD)及其制造方法。 PD包括具有通过使用气相碳(C)源的石墨烯沉积方法和形成在石墨烯薄膜上的纳米颗粒层形成的片状的石墨烯薄膜,并且被图案化以限定石墨烯薄膜的电极区域 膜,纳米颗粒层由不含基质材料的纳米颗粒形成。 PD具有使用石墨烯薄膜作为通道和电极的平面结构,并且使用纳米颗粒作为光伏材料(由于由紫外(UV)光引起的光电子运动能力而能够形成电子 - 空穴对)。 由于PD具有非常简单的结构,所以可以以低成本,高生产率制造PD。 此外,PD包括石墨烯薄膜以降低功耗。