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1. 发明授权

US08854720B2 Tri wavelength diffraction modulator and a method for modulation 有权
$Tri wavelength diffraction modulator and a method for modulation$
标题翻译：三波长衍射调制器和调制方法
公开(公告)号：US08854720B2
公开(公告)日：2014-10-07
申请号：US13540356
申请日：2012-07-02
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： G02B26/00 , G02B27/42 , G02B5/18 , G09G5/00 , G02B26/08 , G02F1/21
CPC分类号： G02B26/0808 , G02F1/21
摘要： The present invention relates to a tri wavelength diffraction modulator (TWDM) and a method of tri wavelength diffraction modulation. The tri wavelength diffraction modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection anchored onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection anchored onto the stationary substrate. The diffraction modulator and the method for diffraction modulation are suitable to projection system.
摘要翻译：本发明涉及三波长衍射调制器（TWDM）和三波长衍射调制方法。三波长衍射调制器包括：固定基板，其具有形成在固定基板的顶部上的底部电极板; 第一电极板，包括平行地悬挂在固定基板上的第一悬挂梁和锚固在固定基板上的第一连接件; 以及第二电极板，包括平行地悬挂在第一电极板上方的第二悬挂梁和锚固在固定基板上的第二连接件。衍射调制器和衍射调制方法适用于投影系统。

2. 发明授权

US08467128B2 Polarizing cube and method of fabricating the same 有权
标题翻译：极化立方体及其制造方法
公开(公告)号：US08467128B2
公开(公告)日：2013-06-18
申请号：US12622382
申请日：2009-11-19
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： G02B5/30
CPC分类号： G02B5/3058 , G02B27/283
摘要： A polarizing cube includes a pair of identical and symmetric triangular prisms which sandwich a thin optical composite plate containing a planner array of reflective straight wires spaced apart in parallel as a built-in wire grid polarizer. All of its subcomponents and the polarizing cube itself are physically and optically symmetrical to one of its diagonal planes so as to provide improved integration and robustness for projection display application. The cubic configuration of the disclosed polarizer can be readily produced through common means and sequences typically used in semiconductor wafer fabrication processes, including photolithographic patterning, gap dielectric filling and planarization, and wafer thinning, bonding and cutting among others.
摘要翻译：偏振立方体包括一对相同和对称的三角形棱镜，其夹持包含平行间隔开的反射直线的计划器阵列作为内置线栅偏振器的薄光学复合板。其所有子部件和偏振立方体本身都与其对角平面之一物理和光学对称，从而为投影显示应用提供改进的集成度和鲁棒性。所公开的偏振器的立方体结构可以通过通常用于半导体晶片制造工艺中的常用手段和序列容易地产生，包括光刻图案，间隙介电填充和平面化，以及晶片间隔，结合和切割等。

3. 发明授权

US08460962B2 Capacitive MEMS switch and method of fabricating the same 有权
标题翻译：电容式MEMS开关及其制造方法
公开(公告)号：US08460962B2
公开(公告)日：2013-06-11
申请号：US12813832
申请日：2010-06-11
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： B81C1/00 , B81B3/00
CPC分类号： H01H59/0009 , B81B2201/014 , B81C1/00246 , B81C2203/0714 , H01H1/0036
摘要： The present invention discloses a capacitive MEMS switch on top of a semiconductor substrate containing a CMOS driving circuitry. The capacitive MEMS switch disclosed includes: 1) a semiconductor substrate containing a driving circuitry inside, and first and second conductors as well as a bottom electrode on top; 2) a suspended composite beam above and anchored onto the semiconductor substrate, containing a top electrode aligned to the bottom electrode with a first vertical distance, a top conductor, capped by a dielectric layer, having a first and second contact tips aligned with the first and second bottom conductors with a second vertical distance differentially smaller than the first vertical distance. The electrostatic attraction generated between the top electrode and the bottom electrode pulls the first and second contact tips in physical contact with and electrically connects the first and second bottom conductors through the top conductor.
摘要翻译：本发明公开了一种在包含CMOS驱动电路的半导体衬底之上的电容MEMS开关。所公开的电容MEMS开关包括：1）在其内部包含驱动电路的半导体衬底，以及顶部的第一和第二导体以及底部电极; 2）在半导体衬底之上并锚固在半导体衬底上的悬挂复合梁，其包含具有第一垂直距离的与底部电极对准的顶部电极，由电介质层封盖的顶部导体，具有与第一垂直距离对准的第一和第二接触尖端以及具有小于第一垂直距离的第二垂直距离的第二底部导体。在顶部电极和底部电极之间产生的静电吸引力拉动第一和第二接触尖端物理接触并通过顶部导体电连接第一和第二底部导体。

4. 发明授权

US08228467B2 Reflective color filter liquid crystal display 有权
标题翻译：反光滤色片液晶显示屏
公开(公告)号：US08228467B2
公开(公告)日：2012-07-24
申请号：US12830623
申请日：2010-07-06
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： G02F1/1343
CPC分类号： G02F1/133514 , G02F1/133553 , G02F1/136277 , G02F2001/133521
摘要： A reflective color filter liquid crystal display, in the reverse order of receiving incident light, includes a backplane substrate, a reflective electrode layer, a planar liquid crystal cell, a transparent protective dielectric layer and a transparent plate. The transparent plate is adapted for receiving and transmitting the incident light. The planar liquid crystal cell is sandwiched between the reflective electrode layer and the transparent conductive film. The reflective electrode layer further includes a first band reflective electrode, a second band reflective electrode and a third band reflective electrode in a regularly tiled planar arrangement.
摘要翻译：反射滤色器液晶显示器以与接收入射光相反的顺序包括背板基板，反射电极层，平面液晶单元，透明保护介电层和透明板。透明板适于接收和透射入射光。平面液晶单元夹在反射电极层和透明导电膜之间。反射电极层还包括第一带状反射电极，第二带状反射电极和以规则平铺的平面布置的第三带状反射电极。

5. 发明授权

US08125271B2 Power amplifier and bridge circuit in power amplifier 有权
标题翻译：功率放大器和功率放大器中的桥式电路
公开(公告)号：US08125271B2
公开(公告)日：2012-02-28
申请号：US12821968
申请日：2010-06-23
申请人： Lei Zhang , Herb He Huang
发明人： Lei Zhang , Herb He Huang
IPC分类号： H03F3/217
CPC分类号： H03F3/2173 , H01H59/0009 , H03F21/00 , H03F2200/03 , H03F2200/351
摘要： A power amplifier and a bridge circuit in a power amplifier, thereinto, the power amplifier includes a comparator, a bridge circuit and a low-pass filter. The comparator is adapted to receive a first analog signal, compare the first analog signal with a reference signal and output a square wave signal. The bridge circuit is adapted to amplify the square wave signal and output the amplified square wave signal. The low-pass filter is adapted to convert the amplified square wave signal into a second analog signal. The bridge circuit includes a first MEMS switch and a second MEMS switch. The first MEMS switch and the second MEMS switch turn on alternately when the polarity of the square wave changes, and output a first voltage signal or a second voltage signal respectively. The amplified square wave signal includes the first voltage signal and the second voltage signal output alternately. The present disclosure substitutes the MOS transistors in prior art with surface MEMS switches, so the power consumption, the size of devices and the manufacture costs all can be reduced.
摘要翻译：功率放大器和功率放大器中的桥式电路，功率放大器包括比较器，桥式电路和低通滤波器。比较器适于接收第一模拟信号，将第一模拟信号与参考信号进行比较并输出方波信号。桥电路适用于放大方波信号并输出放大的方波信号。低通滤波器适于将放大的方波信号转换为第二模拟信号。桥接电路包括第一MEMS开关和第二MEMS开关。当方波的极性发生变化时，第一MEMS开关和第二MEMS开关交替接通，分别输出第一电压信号或第二电压信号。放大的方波信号交替地包括第一电压信号和第二电压信号。本公开将现有技术中的MOS晶体管代替表面MEMS开关，因此可以降低功耗，器件尺寸和制造成本。

6. 发明申请

US20110037142A1 SOI WAFER AND METHOD FOR FORMING THE SAME 有权
标题翻译： SOI波形及其形成方法
公开(公告)号：US20110037142A1
公开(公告)日：2011-02-17
申请号：US12815048
申请日：2010-06-14
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： H01L29/06 , H01L21/762
CPC分类号： H01L21/76254 , H01L21/76283
摘要： An SOI wafer and a method for forming the same, where the method for forming an SOI wafer includes: preparing a monocrystalline silicon wafer on which a mask layer is formed; etching the mask layer and the monocrystalline silicon wafer to form several trenches; forming a first insulating layer on the sidewalls and the bottoms of the trenches; etching and removing the first insulating layer on the bottoms of the trenches; etching along the trenches the monocrystalline silicon wafer beneath the trenches to form cavities; processing the inner walls of the cavities to form a second insulating layer; and filling up the trenches and the cavities with an insulating material layer. The process of the invention is easy to be implemented at a low manufacturing cost and an SOI wafer being formed is of high quality while being capable of being compatible with a standard process of manufacturing a bulk silicon CMOS.
摘要翻译： SOI晶片及其形成方法，其中SOI晶片的形成方法包括：制备其上形成有掩模层的单晶硅晶片; 蚀刻掩模层和单晶硅晶片以形成若干沟槽; 在沟槽的侧壁和底部上形成第一绝缘层; 蚀刻并去除沟槽底部的第一绝缘层; 沿着沟槽蚀刻沟槽下面的单晶硅晶片以形成空腔; 处理空腔的内壁以形成第二绝缘层; 并用绝缘材料层填充沟槽和空腔。本发明的方法易于以低制造成本实现，并且形成的SOI晶片具有高质量，同时能够与制造体硅CMOS的标准工艺兼容。

7. 发明申请

US20100321598A1 INTEGRATED SINGLE PANEL PROJECTION ENGINE 有权
标题翻译：集成单面投影机
公开(公告)号：US20100321598A1
公开(公告)日：2010-12-23
申请号：US12821918
申请日：2010-06-23
申请人： HERB HE HUANG
发明人： HERB HE HUANG
IPC分类号： G02F1/13363
CPC分类号： G02B27/283
摘要： The present invention discloses an integrated single-panel projection engine (500) including a collimated light source (400), a main polarization beam splitter (200), a supporting polarization beam splitter (210), a reflective quarter wave plate (150), a mirror plate (160), an LCOS imager (100) and a projection lens system (300), which provides substantial improvement in optical efficiency of LCOS micro projection display.
摘要翻译：本发明公开了一种包括准直光源（400），主偏振光束分离器（200），支撑偏振分束器（210），反射四分之一波片（150）等的集成单面投影引擎（500）镜板（160），LCOS成像器（100）和投影透镜系统（300），其提供LCOS微投影显示器的光学效率的实质性改进。

8. 发明授权

US08498039B2 Tri wavelength interference modulator and a method for modulation 有权
标题翻译：三波长干扰调制器和调制方法
公开(公告)号：US08498039B2
公开(公告)日：2013-07-30
申请号：US12965009
申请日：2010-12-10
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/001 , G02B26/0816 , G02B26/0841
摘要： The present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation. The tri wavelength interference modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate. The inference modulator and the method for inference modulation are suitable to projection system.
摘要翻译：本发明涉及三波长干扰调制器（TWIM）和三波长干扰调制方法。三波长干涉调制器包括：固定基板，其具有形成在固定基板上的底电极板; 第一电极板，包括平行地悬挂在固定基板上的第一悬挂梁和电连接到固定基板上的第一连接; 以及第二电极板，包括平行地悬挂在第一电极板上方的第二悬挂梁和电连接到固定基板上的第二连接。推理调制器和推理调制方法适用于投影系统。

9. 发明授权

US08389317B2 MEMS device and method of fabricating the same 有权
标题翻译： MEMS器件及其制造方法
公开(公告)号：US08389317B2
公开(公告)日：2013-03-05
申请号：US12788622
申请日：2010-05-27
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： H01L21/00
CPC分类号： B81C1/00246 , B81B2203/0118 , B81B2203/0307 , B81C1/0015 , B81C2203/0735
摘要： A micro electrical-mechanical system (MEMS) device comprises a suspended thin film microstructure which includes an anchoring portion adhered to the top surface of the substrate and a suspended portion above the top surface of the substrate. Having a base plane configured in parallel to the substrate, the suspended portion further includes a first recess portion spaced at a first vertical clearance with the substrate, the first vertical clearance being configured differentially smaller than a base clearance of the suspended portion outside the first recess portion. The method for processing a MEMS device includes: depositing a first carbon film, etch-removing a first sacrificial pre-removal portion and an anchor portion of the first carbon film, depositing a second carbon film conformally topping the first carbon film and the substrate, etch-removing the anchor portion of the second carbon film, depositing and patterning the suspended thin film microstructure onto the first carbon film, the second carbon film and the substrate, removing the first carbon film and the second carbon film to release the suspended thin film microstructure above the substrate by selective gaseous oxidation or nitridation preferably enhanced via plasma.
摘要翻译：微机电系统（MEMS）装置包括悬浮的薄膜微结构，其包括粘附到基板的顶表面的锚定部分和在基板顶表面上方的悬挂部分。具有与基板平行配置的基面平面，所述悬挂部分还包括与所述基板隔开的第一垂直间隙的第一凹陷部分，所述第一垂直间隙被构造成小于所述第一凹部外部的所述悬挂部分的基座间隙一部分。用于处理MEMS器件的方法包括：沉积第一碳膜，蚀刻去除第一碳膜的第一牺牲预除去部分和锚固部分，沉积保形地顶起第一碳膜和基底的第二碳膜，蚀刻去除第二碳膜的锚固部分，将悬浮的薄膜微结构沉积并图案化到第一碳膜，第二碳膜和基板上，去除第一碳膜和第二碳膜以释放悬浮薄膜优选通过等离子体增强通过选择性气体氧化或氮化的衬底上的微结构。

10. 发明授权

US08339563B2 Liquid crystal imager and method of making same 有权
标题翻译：液晶成像仪及其制作方法
公开(公告)号：US08339563B2
公开(公告)日：2012-12-25
申请号：US12885836
申请日：2010-09-20
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： G02F1/1345 , G02F1/1339
CPC分类号： G03F7/0007
摘要： The disclosed LCOS device comprises a transparent composite plate, a planar liquid crystal cell, a base plate which contains an active matrix driving circuitry. In the basic embodiment, the planar liquid crystal cell comprises a conductive seal ring which encloses liquid crystal filling and connects the transparent conductive layer underneath the transparent composite plate with the base plate and the active matrix driving circuitry. In the extended embodiment, the base plate further incorporates a set of thru-substrate via and backside bond pads. The set of thru-substrate via electrically connect a set of input-output pads of the active matrix driving circuitry to the bottom bond pads underneath the base plate. In addition, the conductive seal ring electrically connects the transparent conductive film placed underneath the transparent front plane plate, preferably made of glass, to the active matrix driving circuitry on the base plate. Electrostatically charged between the transparent conductive coating and an electrode array layer including a planar array of reflective pixel electrodes on top of the base plate, planar liquid crystal cell is operated to produce spatial light modulation to incident illumination. The method of wafer level process and packaging of the disclosed LCOS imagers is further disclosed.
摘要翻译：所公开的LCOS器件包括透明复合板，平面液晶单元，含有有源矩阵驱动电路的基板。在基本实施例中，平面液晶单元包括封装液晶填充并将透明复合板下方的透明导电层与基板和有源矩阵驱动电路连接的导电密封环。在扩展实施例中，基板还包括一组通孔基板通孔和背面接合焊盘。通过将有源矩阵驱动电路的一组输入输出焊盘电连接到底板下方的底部接合焊盘，该组通孔基板经过。此外，导电密封环将布置在透明前平面板下方的透明导电膜电连接到基板上的有源矩阵驱动电路，优选由玻璃制成。在透明导电涂层和包括在基板顶部上的反射像素电极的平面阵列的电极阵列层之间静电充电，操作平面液晶单元以对入射照明产生空间光调制。进一步公开了所公开的LCOS成像器的晶片级处理和封装的方法。

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