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1. 发明授权

US08422132B2 Integrated planar polarizing device 有权
标题翻译：集成平面偏振装置
公开(公告)号：US08422132B2
公开(公告)日：2013-04-16
申请号：US12629644
申请日：2009-12-02
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： G02B5/30
CPC分类号： G02B5/3058 , H04N9/3167
摘要： The embodiments of the present invention provide an integrated planar polarizing device and methods of fabrication. The device, in the order of incidence along an optical path of an incident light beam from back position to front position, comprises a planar array of micro mirrors, a quarter wave retarder film and a reflective polarization plate. The micro mirrors are regularly spaced-apart in an identical tilted angle α relative to a base plane. The quarter wave retarder film is positioned between the micro mirrors and the reflective polarization plate. The reflective polarization plate is in parallel to the base plane and is adapted to transmit and polarize a first polarized light of the incident light beam in a first polarization state, and to reflect and polarize a second polarized light of the incident light beam in a second polarization, The micro mirrors are adapted to reflect the second polarized light passing and polarized through the quarter wave retarder film first time to pass and be polarized through the quarter wave retarder film second time, thereby converting the second polarized light to be a third polarized light in the first polarization state which can transmit the reflective polarization plate. The planar array of micro mirrors, the quarter wave retarder film and the reflective polarization plate are embedded in a transparent medium. The embodiments of the present invention could improve in device integration and simplification in assembly robustness.
摘要翻译：本发明的实施例提供一种集成的平面偏振装置和制造方法。该装置沿着从后方位置到前方位置的入射光束的光路的入射顺序包括微镜的平面阵列，四分之一波长延迟膜和反射偏振板。微反射镜相对于基面以相同的倾斜角α规则地间隔开。四分之一波长延迟膜位于微反射镜和反射偏振板之间。所述反射偏振板与所述基底平面平行，并且适于以第一偏振状态透射和偏振入射光束的第一偏振光，并且在第二偏振态中反射和偏振入射光束的第二偏振光微反射镜适于反射经过四分之一波长延迟器膜的第二偏振光通过第二偏振光并通过四分之一波长延迟片二次偏振，从而将第二偏振光转换为第三偏振光在可以透射反射偏振板的第一偏振状态下。微镜的平面阵列，四分之一波长延迟膜和反射偏振板嵌入透明介质中。本发明的实施例可以在设备集成和组装鲁棒性的简化方面得到改善。

2. 发明授权

US08058175B2 Method for planarization of wafer and method for formation of isolation structure in top metal layer 有权
标题翻译：晶圆平面化方法及顶层金属层隔离结构形成方法
公开(公告)号：US08058175B2
公开(公告)日：2011-11-15
申请号：US11852918
申请日：2007-09-10
申请人： Herb He Huang , Xianyong Pu , Yi'nan Han , Yiqun Chen
发明人： Herb He Huang , Xianyong Pu , Yi'nan Han , Yiqun Chen
IPC分类号： H01L21/311 , H01B13/00 , C30B33/00 , B44C1/22
CPC分类号： G02F1/133553 , G02F1/136277 , G02F2201/48
摘要： The invention discloses a planarization method for a wafer having a surface layer with a recess, comprises: forming an etching-resist layer on the surface layer to fill the entire recess; etching the etching-resist layer and the surface layer, till the surface layer outside the recess is flush to or lower than the bottom of the recess, the etching speed of the surface layer being higher than that of the etching-resist layer; removing the etching-resist layer; and etching the surface layer to a predetermined depth. The method can avoid concentric ring recesses on the surface of the wafer resulted from a chemical mechanical polishing (CMP) process in the prior art, and can be used to obtain a wafer surface suitable for optical applications.
摘要翻译：本发明公开了一种具有具有凹部的表面层的晶片的平面化方法，包括：在表面层上形成抗蚀剂层以填充整个凹部; 蚀刻抗蚀剂层和表面层，直到凹部外表面层平齐或低于凹部的底部，表面层的蚀刻速度高于抗蚀剂层的蚀刻速度; 去除抗蚀剂层; 并将表面层蚀刻到预定深度。该方法可以避免在现有技术中由化学机械抛光（CMP）工艺产生的晶片表面上的同心环凹槽，并且可以用于获得适合于光学应用的晶片表面。

3. 发明授权

US07995165B2 LCOS display unit and method for forming the same 有权
标题翻译： LCOS显示单元及其形成方法
公开(公告)号：US07995165B2
公开(公告)日：2011-08-09
申请号：US11851331
申请日：2007-09-06
申请人： Herb He Huang , Xianyong Pu , Jianhong Mao , Yiqun Chen , Jing Fu , Zhongshan Hong , Yanghui Xiang
发明人： Herb He Huang , Xianyong Pu , Jianhong Mao , Yiqun Chen , Jing Fu , Zhongshan Hong , Yanghui Xiang
IPC分类号： G02F1/1335
CPC分类号： G02F1/136277 , G02F1/133553 , G02F1/136209 , H01L27/12 , H01L27/1214 , H01L27/13 , H01L29/78633 , H01L29/78654
摘要： An embodiment of the present invention discloses a Liquid Crystal on Silicon (LCOS) display unit, in which a Metal-Insulator-Metal (MIM) capacitor consisting of a micromirror layer, a insulation layer and a light shielding layer is formed by grounding the light shielding layer on a pixel switch circuit layer. Therefore the pixel switch circuit and the capacitor are in vertical distribution, that is, the switch circuit and the capacitor both have an allowable design area of the size of one pixel. Another embodiment of the present invention provides a method for forming a Liquid Crystal on Silicon (LCOS) display unit.
摘要翻译：本发明的实施例公开了一种液晶硅（LCOS）显示单元，其中通过将光接地而形成由微镜层，绝缘层和遮光层组成的金属 - 绝缘体 - 金属（MIM）电容器像素开关电路层上的屏蔽层。因此，像素开关电路和电容器处于垂直分布，即开关电路和电容器都具有允许的一个像素尺寸的设计区域。本发明的另一个实施例提供了一种用于形成硅晶体（LCOS）显示单元的方法。

4. 发明授权

US08383489B2 SOI wafer and method for forming the same 有权
标题翻译： SOI晶片及其形成方法
公开(公告)号：US08383489B2
公开(公告)日：2013-02-26
申请号：US12815048
申请日：2010-06-14
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： H01L21/76
CPC分类号： H01L21/76254 , H01L21/76283
摘要： An SOI wafer and a method for forming the same, where the method for forming an SOI wafer includes: preparing a monocrystalline silicon wafer on which a mask layer is formed; etching the mask layer and the monocrystalline silicon wafer to form several trenches; forming a first insulating layer on the sidewalls and the bottoms of the trenches; etching and removing the first insulating layer on the bottoms of the trenches; etching along the trenches the monocrystalline silicon wafer beneath the trenches to form cavities; processing the inner walls of the cavities to form a second insulating layer; and filling up the trenches and the cavities with an insulating material layer. The process of the invention is easy to be implemented at a low manufacturing cost and an SOI wafer being formed is of high quality while being capable of being compatible with a standard process of manufacturing a bulk silicon CMOS.
摘要翻译： SOI晶片及其形成方法，其中SOI晶片的形成方法包括：制备其上形成有掩模层的单晶硅晶片; 蚀刻掩模层和单晶硅晶片以形成若干沟槽; 在沟槽的侧壁和底部上形成第一绝缘层; 蚀刻并去除沟槽底部的第一绝缘层; 沿着沟槽蚀刻沟槽下面的单晶硅晶片以形成空腔; 处理空腔的内壁以形成第二绝缘层; 并用绝缘材料层填充沟槽和空腔。本发明的方法易于以低制造成本实现，并且形成的SOI晶片具有高质量，同时能够与制造体硅CMOS的标准工艺兼容。

5. 发明授权

US08043891B2 Method of encapsulating a wafer level microdevice 有权
标题翻译：封装晶圆级微器件的方法
公开(公告)号：US08043891B2
公开(公告)日：2011-10-25
申请号：US12793295
申请日：2010-06-03
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： H01L21/00 , H01L21/50 , H01L21/48 , H01L21/44
CPC分类号： B81C1/00333 , B81C2203/0118
摘要： The present invention discloses a method of encapsulating a wafer level microdevice, which includes: fabricating a microdevice on top side of a first silicon wafer; depositing a first capping carbon film on the top side of the first silicon wafer; implementing a backside fabricating process of wafer from bottom side of the first silicon wafer by carrying the top side of the first silicon wafer through the first capping carbon film; removing the first capping carbon film by selective gaseous reaction with carbon; and encapsulating an encapsulation wafer onto the top side of the first silicon wafer. The present invention deposits and removes the first capping carbon film by means of chemical technology, thereby protecting the microdevice on the top side of the first wafer during implementing the backside fabricating process of wafer. The top side does not need to be protected through the encapsulation wafer before implementing the backside fabricating process of wafer, which makes the wafer thinner and convenient to be handled.
摘要翻译：本发明公开了一种封装晶片级微器件的方法，其包括：在第一硅晶片的顶侧上制造微型器件; 在第一硅晶片的顶侧上沉积第一封盖碳膜; 通过将第一硅晶片的顶侧通过第一封盖碳膜，从第一硅晶片的底侧实现晶片的背面制造工艺; 通过与碳的选择性气相反应去除第一封盖碳膜; 并将封装晶片封装在第一硅晶片的顶侧上。本发明通过化学技术沉积和去除第一封盖碳膜，从而在实现晶片的背面制造工艺期间保护微型器件在第一晶片的顶侧上。在实施晶片的背面制造工艺之前，顶侧不需要通过封装晶片进行保护，这使得晶片更薄且便于处理。

6. 发明授权

US08482497B2 Switch matrix and display matrix of display device 有权
标题翻译：显示设备的开关矩阵和显示矩阵
公开(公告)号：US08482497B2
公开(公告)日：2013-07-09
申请号：US12815118
申请日：2010-06-14
申请人： Lei Zhang , Herb He Huang
发明人： Lei Zhang , Herb He Huang
IPC分类号： G09G3/34
CPC分类号： G09G3/20 , G09G3/3648 , G09G2300/08
摘要： The invention provides a switch matrix and display matrix of a display device. The display matrix of a display device includes: a switch matrix including M×N MEMS switches, wherein M is the number of rows and N is the number of columns, and MEMS switches in each row are controlled by a corresponding row drive signal to output respective column data signals; and a pixel matrix including M×N pixel units each of which is coupled with a corresponding one of the M×N MEMS switches and displays in response to the column data signal output from the corresponding MEMS switch. The switch matrix can simplify pixel design and reduce layout area of each pixel. Moreover, conventional design needs special process to handle high voltage of source driver. This invention can realize a display device with one common process while source driver uses high voltage process conventionally.
摘要翻译：本发明提供一种显示装置的开关矩阵和显示矩阵。显示装置的显示矩阵包括：包括M×N个MEMS开关的开关矩阵，其中M是行数，N是列数，并且每行中的MEMS开关由相应的行驱动信号控制以输出各列数据信号; 以及包括M×N个像素单元的像素矩阵，每个像素单元与M×N个MEMS开关中的相应一个耦合，并响应于从相应的MEMS开关输出的列数据信号来显示。开关矩阵可以简化像素设计，减少每个像素的布局面积。此外，常规设计需要特殊处理来处理高电压源驱动器。本发明可以实现具有一个共同过程的显示装置，而源驱动器通常使用高压处理。

7. 发明授权

US08379183B2 LCOS display unit and method for forming the same 有权
标题翻译： LCOS显示单元及其形成方法
公开(公告)号：US08379183B2
公开(公告)日：2013-02-19
申请号：US13155870
申请日：2011-06-08
申请人： Herb He Huang , Xianyong Pu , Jianhong Mao , Yiqun Chen , Jing Fu , Zhongshan Hong , Yanghui Xiang
发明人： Herb He Huang , Xianyong Pu , Jianhong Mao , Yiqun Chen , Jing Fu , Zhongshan Hong , Yanghui Xiang
IPC分类号： G02F1/13 , G02F1/1335
CPC分类号： G02F1/136277 , G02F1/133553 , G02F1/136209 , H01L27/12 , H01L27/1214 , H01L27/13 , H01L29/78633 , H01L29/78654
摘要： An embodiment of the present invention discloses a Liquid Crystal on Silicon (LCOS) display unit, in which a Metal-Insulator-Metal (MIM) capacitor consisting of a micromirror layer, a insulation layer and a light shielding layer is formed by grounding the light shielding layer on a pixel switch circuit layer. Therefore the pixel switch circuit and the capacitor are in vertical distribution, that is, the switch circuit and the capacitor both have an allowable design area of the size of one pixel. Another embodiment of the present invention provides a method for forming a Liquid Crystal on Silicon (LCOS) display unit.
摘要翻译：本发明的实施例公开了一种液晶硅（LCOS）显示单元，其中通过将光接地而形成由微镜层，绝缘层和遮光层组成的金属 - 绝缘体 - 金属（MIM）电容器像素开关电路层上的屏蔽层。因此，像素开关电路和电容器处于垂直分布，即开关电路和电容器都具有允许的一个像素尺寸的设计区域。本发明的另一个实施例提供了一种用于形成硅晶体（LCOS）显示单元的方法。

8. 发明授权

US08375791B2 Capacitive MEMS gyroscope and method of making the same 有权
标题翻译：电容式MEMS陀螺仪及其制作方法
公开(公告)号：US08375791B2
公开(公告)日：2013-02-19
申请号：US12834250
申请日：2010-07-12
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： A capacitive MEMS gyroscope and a method of making the same are disclosed. The capacitive MEMS gyroscope comprises a semiconductor substrate and a suspended composite wheel. The semiconductor substrate comprises: a read-out circuitry; at least one bottom electrode disposed on top of the semiconductor substrate, centered to a rotation axis and electrically connected to the read-out circuitry; at least one contact pad disposed on the top of the semiconductor substrate, electrically to the read-out circuitry; the composite wheel, partially made of dielectric film and configured in suspension above and in parallel to the semiconductor substrate and centered to the rotation axis, comprises: at least one top electrode disposed on the composite wheel, aligned vertically with one of the bottom electrode, electrically to the read-out circuitry; at least one circumferential spring centered to the rotation axis, bridging the composite wheel and the semiconductor substrate and consisting of at least one top electrode which electrically connects the top electrode to the contact pad on the semiconductor substrate. The gyroscope of the present invention formed by depositing and photolithographically patterning has miniaturized size, low tolerance scope and high sensing accuracy, as well as low fabrication costs owing to special bulk MEMS fabrication device unnecessary.
摘要翻译：公开了一种电容式MEMS陀螺仪及其制造方法。电容式MEMS陀螺仪包括半导体衬底和悬挂复合轮。半导体衬底包括：读出电路; 设置在所述半导体衬底的顶部上的至少一个底部电极，其以旋转轴为中心并电连接到所述读出电路; 至少一个接触焊盘，设置在所述半导体衬底的顶部上，电读取电路; 部分地由电介质膜制成并且被配置为悬挂在半导体衬底上方并与半导体衬底并居于旋转轴线的复合轮包括：设置在复合轮上的至少一个顶电极，与底电极之一垂直排列，电读取电路; 至少一个以旋转轴为中心的周向弹簧，桥接复合轮和半导体衬底，并且由至少一个顶部电极组成，该顶部电极将顶部电极电连接到半导体衬底上的接触焊盘。通过沉积和光刻图案形成的本发明的陀螺仪由于不需要特殊的体积MEMS制造装置而具有小型化，低容差范围和高感测精度以及低制造成本。

9. 发明授权

US08282216B2 Single-imager projection engine assembly 有权
标题翻译：单成像投影发动机总成
公开(公告)号：US08282216B2
公开(公告)日：2012-10-09
申请号：US12683144
申请日：2010-01-06
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： G03B21/14 , G03B21/28 , G02F1/1335 , F21V9/14 , H04N9/69
CPC分类号： G02B27/283 , H04N9/3167
摘要： A single-imager projection engine assembly includes a light source, a reflective polarization modulation imager, a reflective quarter wave composite plate, a projection lens system, and a PBS assembly which includes a first polarization beam splitting film and a second polarization beam splitting film in a V-notch pairing configuration. The first polarization beam splitting film reflects the illumination light in first polarization state to the reflective polarization modulation imager, while the second polarization beam splitting film and the reflective quarter wave composite plate in conjunction convert the illumination light in second polarization state passing through the first polarization beam splitting film to first polarization state and reflects the converted to the reflective polarization modulation imager. Combined illumination is modulated, polarization rotated and reflected by the reflective polarization modulation imager back to the PBS assembly for projection through the projection lens.
摘要翻译：单成像投影引擎组件包括光源，反射偏振调制成像器，反射四分之一波复合板，投影透镜系统和PBS组件，其包括第一偏振分束膜和第二偏振分束膜 V形槽配对配置。第一偏振分束膜将第一偏振态的照明光反射到反射偏振调制成像器，而第二偏振分束膜和反射四分之一波长复合板一起转换通过第一偏振的第二偏振态的照明光将分束膜分解为第一极化状态并将其转换成反射偏振调制成像器。组合的照明被调制，偏振旋转并由反射偏振调制成像器反射回PBS组件以通过投影透镜投射。

10. 发明授权

US08270065B2 Colored electrophoretic display 有权
标题翻译：彩色电泳显示
公开(公告)号：US08270065B2
公开(公告)日：2012-09-18
申请号：US12833243
申请日：2010-07-09
申请人： Herb He Huang
发明人： Herb He Huang
IPC分类号： G02B26/00
CPC分类号： G02F1/167 , G02F2001/1676 , G02F2203/34 , G09G3/3446
摘要： A colored electrophoretic display includes a transparent substrate, a transparent conductive layer, a planar electrophoretic cell, and a backplane substrate in sequence of receiving an incident light. The backplane substrate includes a first block reflective electrode, a second block reflective electrode and a third block reflective electrode, tiled in a planar arrangement perpendicular to the incident light and electrically connected to a driving circuitry in the backplane substrate. The driving circuitry electrically drives the first block reflective electrode, the second block reflective electrode and the third block reflective electrode individually as well as the transparent conductive layer to form spatially colored reflective light modulation.
摘要翻译：彩色电泳显示器包括透明基板，透明导电层，平面电泳池和背板基板，以接收入射光。背板基板包括第一块反射电极，第二块反射电极和第三块反射电极，它们被平铺在与入射光垂直的平面布置中并电连接到背板基板中的驱动电路。驱动电路单独地驱动第一块反射电极，第二块反射电极和第三块反射电极以及透明导电层，以形成空间有色的反射光调制。

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