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    • 5. 发明授权
    • Electrostatic discharge protection device with complementary dual drain implant
    • 具有互补双漏极植入物的静电放电保护器件
    • US06998685B2
    • 2006-02-14
    • US10662673
    • 2003-09-15
    • Indrajit MannaKeng Foo LoPee Ya TanMichael Cheng
    • Indrajit MannaKeng Foo LoPee Ya TanMichael Cheng
    • H01L23/62
    • H01L29/0847H01L27/0266H01L29/1083H01L29/78H01L2924/0002H01L2924/00
    • Off-chip driver (OCD) NMOS transistors with ESD protection are formed by interposing an P-ESD implant between the N+ drain regions of OCD NMOS transistors and the N-well such that the P-ESD surrounds a section of the N-well. The P-ESD implant is dosed less than the N+ source/drain implants but higher than the N-well dose. In another embodiment, N-well doping is used along with P-ESD doping, where the P-ESD doping is chosen such that it counterdopes the N-well underneath the N+ drains. The N-well, however, still maintains electrical connection to the N+ drains. This procedure creates a larger surface under the area where the junction breakdown occurs and an increased radius of curvature of the junction. The P-ESD implant is covered by N-type on three sides creating better parasitic bipolar transistor characteristics.
    • 具有ESD保护的片外驱动器(OCD)NMOS晶体管通过在OCD NMOS晶体管的N +漏极区域和N阱之间插入P-ESD注入而形成,使得P-ESD围绕N阱的一部分。 P-ESD植入物的剂量小于N +源/漏植入物,但高于N阱剂量。 在另一个实施例中,使用N阱掺杂以及P-ESD掺杂,其中选择P-ESD掺杂使得其对N +漏极下方的N阱进行反向。 然而,N阱仍然保持与N +排水管的电气连接。 该过程在结点发生的区域下面形成较大的表面,并且连接部的曲率半径增加。 P-ESD植入体在三面覆盖N型,产生更好的寄生双极晶体管特性。