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1. 发明申请

US20110043228A1 METHOD AND APPARATUS FOR MEASURING WAFER BIAS POTENTIAL 有权
标题翻译：测量水平偏移的方法和装置
公开(公告)号：US20110043228A1
公开(公告)日：2011-02-24
申请号：US12545293
申请日：2009-08-21
申请人： Konstantin Makhratchev , John Valcore
发明人： Konstantin Makhratchev , John Valcore
IPC分类号： G01R27/08
CPC分类号： H01J37/32642 , H01J37/32935
摘要： A device for use in a wafer processing chamber having a plasma forming volume and a hot edge ring. The hot edge ring has a first surface and a second surface. The first surface is in contact with the plasma forming volume. The second surface is not in contact with the plasma forming volume. The device includes a detector operable to contact the second surface of the hot edge ring. The detector can detect a parameter of the hot edge ring and can provide a detected signal based on the detected parameter.
摘要翻译：一种用于具有等离子体形成体积和热边缘环的晶片处理室中的装置。热边缘环具有第一表面和第二表面。第一表面与等离子体形成体积接触。第二表面不与等离子体形成体积接触。该装置包括可操作以接触热边缘环的第二表面的检测器。检测器可以检测热边缘环的参数，并可以根据检测到的参数提供检测信号。

2. 发明申请

US20100201371A1 Harmonic Derived Arc Detector 有权
标题翻译：谐波衍生电弧探测器
公开(公告)号：US20100201371A1
公开(公告)日：2010-08-12
申请号：US12764145
申请日：2010-04-21
申请人： John Valcore , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
发明人： John Valcore , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
IPC分类号： G01R31/12
CPC分类号： H05H1/0062 , H01J37/32082 , H01J37/32935 , H01J37/32944 , H01J2237/0206
摘要： An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
摘要翻译：电弧检测系统包括射频（RF）信号探针，其感测RF等离子体室的输入处的RF信号，并且基于RF信号的电压，电流和功率中的至少一个产生信号。信号分析仪接收信号，对频率分量的信号进行监视，频率成分的频率大于或等于RF信号的基频，并根据频率成分产生输出信号。输出信号表示在等离子体室内发生电弧。

3. 发明申请

US20070102863A1 Automated banking machine 失效
标题翻译：自动银行机
公开(公告)号：US20070102863A1
公开(公告)日：2007-05-10
申请号：US11270363
申请日：2005-11-08
申请人： Paul Burns , Thomas Phillips , John Valcore , H. Graef , Edward Laskowski , James Meek , Martin Brown , Todd Galloway , Robert Barnett , Mike Ryan , James Kay , Mark Ward , David Peters , Greg Miller , Arindam Laha , Joe Altier
发明人： Paul Burns , Thomas Phillips , John Valcore , H. Graef , Edward Laskowski , James Meek , Martin Brown , Todd Galloway , Robert Barnett , Mike Ryan , James Kay , Mark Ward , David Peters , Greg Miller , Arindam Laha , Joe Altier
IPC分类号： B65H5/22 , B65H83/00 , B65H85/00
CPC分类号： G07D11/0018
摘要： An automated banking machine (10) includes a user interface (12) including an opening (20). Users of the machine deliver individual sheets and stacks of sheets to and from the machine through the opening. Stacks of sheets may include sheets such as notes, checks or other documents. Stacks input to the machine may include mixtures of various types of sheets. The machine operates to receive notes, process checks and perform other operations. Notes received in the machine may be recycled and dispensed to other users. Checks processed by the machine may be imaged by an imaging device, cancelled and stored in the machine or alternatively returned to a user.
摘要翻译：自动银行机（10）包括包括开口（20）的用户界面（12）。机器的用户通过开口将单张纸张和堆叠的纸张递送到机器。纸张堆叠可能包括纸张，如纸币，支票或其他文件。输入到机器的堆叠可以包括各种类型的片材的混合物。机器操作以接收笔记，过程检查和执行其他操作。在机器中收到的注意事项可以回收并分发给其他用户。由机器处理的检查可以由成像设备成像，取消并存储在机器中或者交替地返回给用户。

4. 发明授权

US08293023B2 System and method for monitoring wafer stress 失效
标题翻译：用于监测晶片应力的系统和方法
公开(公告)号：US08293023B2
公开(公告)日：2012-10-23
申请号：US12616415
申请日：2009-11-11
申请人： John Valcore , Mark Kawaguchi , Cristian Paduraru
发明人： John Valcore , Mark Kawaguchi , Cristian Paduraru
IPC分类号： B08B7/04
CPC分类号： H01L21/67253 , H01L21/67051
摘要： A method of using a processing system that is operable to deposit liquid and to remove liquid by way of negative pressure. The method includes arranging a device to have at least one of the liquid deposited thereon by the processing system and the liquid removed therefrom by the processing system. The device has a sensor portion disposed thereon. The sensor portion can provide a sensor signal based on pressure related to the at least one of the liquid being deposited thereon by the processing system and the liquid being removed therefrom by the processing system. The method further includes performing at least one of depositing, by the processing system, the liquid onto the device and removing the liquid, by the processing system, from the device. The method still further includes providing the sensor signal, by the sensor portion, based on the pressure related to the at least one of the liquid being deposited onto the device and the liquid being removed from the device.
摘要翻译：一种使用可操作以沉积液体并通过负压去除液体的处理系统的方法。该方法包括将装置设置成具有通过处理系统沉积在其上的液体中的至少一种，以及由处理系统从其中移出的液体。该装置具有设置在其上的传感器部分。传感器部分可以基于与由处理系统沉积在其上的液体中的至少一种相关的压力提供传感器信号，并且由处理系统从其中除去的液体。该方法还包括执行由处理系统将液体沉积到装置上并且由处理系统从装置中去除液体中的至少一种。该方法还包括通过传感器部分基于与被沉积到装置上的液体中的至少一种相关的压力和从装置移除的液体来提供传感器信号。

5. 发明申请

US20110094538A1 SYSTEM AND METHOD FOR MONITORING WAFER STRESS 失效
标题翻译：用于监测波浪应力的系统和方法
公开(公告)号：US20110094538A1
公开(公告)日：2011-04-28
申请号：US12616415
申请日：2009-11-11
申请人： John Valcore , Mark Kawaguchi , Cristian Paduraru
发明人： John Valcore , Mark Kawaguchi , Cristian Paduraru
IPC分类号： B08B3/04 , G05D16/00 , G01L19/12
CPC分类号： H01L21/67253 , H01L21/67051
摘要： A method of using a processing system that is operable to deposit liquid and to remove liquid by way of negative pressure. The method includes arranging a device to have at least one of the liquid deposited thereon by the processing system and the liquid removed therefrom by the processing system. The device has a sensor portion disposed thereon. The sensor portion can provide a sensor signal based on pressure related to the at least one of the liquid being deposited thereon by the processing system and the liquid being removed therefrom by the processing system. The method further includes performing at least one of depositing, by the processing system, the liquid onto the device and removing the liquid, by the processing system, from the device. The method still further includes providing the sensor signal, by the sensor portion, based on the pressure related to the at least one of the liquid being deposited onto the device and the liquid being removed from the device.
摘要翻译：一种使用可操作以沉积液体并通过负压去除液体的处理系统的方法。该方法包括将装置设置成具有通过处理系统沉积在其上的液体中的至少一种，以及由处理系统从其中移出的液体。该装置具有设置在其上的传感器部分。传感器部分可以基于与由处理系统沉积在其上的液体中的至少一种相关的压力提供传感器信号，并且由处理系统从其中除去的液体。该方法还包括执行由处理系统将液体沉积到装置上并且由处理系统从装置中去除液体中的至少一种。该方法还包括通过传感器部分基于与被沉积到装置上的液体中的至少一种相关的压力和从装置移除的液体来提供传感器信号。

6. 发明申请

US20100283482A1 NON-DESTRUCTIVE SIGNAL PROPAGATION SYSTEM AND METHOD TO DETERMINE SUBSTRATE INTEGRITY 有权
标题翻译：非破坏性信号传播系统和确定基板完整性的方法
公开(公告)号：US20100283482A1
公开(公告)日：2010-11-11
申请号：US12435934
申请日：2009-05-05
申请人： John Valcore
发明人： John Valcore
IPC分类号： G01R23/20
CPC分类号： G01N29/11 , G01N29/075 , G01N29/2475 , G01N2291/044 , G01N2291/106 , G01N2291/2697 , H01L22/12
摘要： In various exemplary embodiments described herein, a system and associated method relate to non-destructive signal propagation to detect one or more defects in a substrate. The system can be built into a semiconductor process tool such as a substrate handling mechanism. The system comprises a transducer configured to convert one or more frequencies from an electrical signal into at least one mechanical pulse. The mechanical pulse is coupled to the substrate through the substrate handling mechanism. A plurality of sensors is positioned distal to the transducer and configured to be coupled, acoustically or mechanically, to the substrate. The plurality of distal sensors is further configured to detect both the mechanical pulse and any distortions to the pulse. A signal analyzer is coupled to the plurality of distal sensors to compare the detected pulse and any distortions to the pulse with a baseline response.
摘要翻译：在本文描述的各种示例性实施例中，系统和相关联的方法涉及非破坏性信号传播以检测衬底中的一个或多个缺陷。该系统可以内置在诸如基板处理机构的半导体处理工具中。该系统包括被配置为将一个或多个频率从电信号转换成至少一个机械脉冲的换能器。机械脉冲通过基板处理机构耦合到基板。多个传感器位于换能器的远侧并且被配置为与声学或机械地耦合到基底。多个远端传感器还被配置为检测机械脉冲和对脉冲的任何失真。信号分析器耦合到多个远端传感器，以将检测到的脉冲和具有基线响应的脉冲的任何失真进行比较。

7. 发明申请

US20060163342A1 Automated banking machine 有权
公开(公告)号：US20060163342A1
公开(公告)日：2006-07-27
申请号：US11324903
申请日：2006-01-03
申请人： Keith Carpenter , Craig Hockman , Willis Miller , Laura Drozda , Paul Burns , Thomas Phillips , John Valcore , H. Graef , Edward Laskowski , James Meek , Martin Brown , Todd Galloway , Robert Barnett , Mike Ryan , James Kay , Mark Ward , David Peters , Greg Miller , Arindam Laha , Joe Altier
发明人： Keith Carpenter , Craig Hockman , Willis Miller , Laura Drozda , Paul Burns , Thomas Phillips , John Valcore , H. Graef , Edward Laskowski , James Meek , Martin Brown , Todd Galloway , Robert Barnett , Mike Ryan , James Kay , Mark Ward , David Peters , Greg Miller , Arindam Laha , Joe Altier
IPC分类号： G07F19/00
CPC分类号： G07F19/20 , B65H3/00 , B65H29/06 , B65H29/40 , B65H29/60 , B65H39/02 , B65H83/025 , B65H2301/42122 , B65H2301/42146 , B65H2404/261 , B65H2404/651 , B65H2404/655 , B65H2404/657 , B65H2701/1912 , G06Q20/042 , G06Q20/1085 , G07D7/12 , G07D7/181 , G07D7/20 , G07D11/0003 , G07D11/0018 , G07D11/0021 , G07D11/0048 , G07D11/0051 , G07D11/0054 , G07D11/0066 , G07D11/009 , G07F19/201 , G07F19/202 , G07F19/203
摘要： An automated banking machine (10) includes a user interface (12) including an opening (20). Users of the machine deliver individual sheets and stacks of sheets to and from the machine through the opening. Stacks of sheets may include sheets such as notes, checks or other documents. Stacks input to the machine may include mixtures of various types of sheets. The machine operates to receive notes, process checks and perform other operations. Notes received in the machine may be recycled and dispensed to other users. Checks processed by the machine may be imaged by an imaging device, cancelled and stored in the machine or alternatively returned to a user.

8. 发明申请

US20110094546A1 SYSTEM AND METHOD FOR WAFER CARRIER VIBRATION REDUCTION 审中-公开
标题翻译：用于减少载波振幅的系统和方法
公开(公告)号：US20110094546A1
公开(公告)日：2011-04-28
申请号：US12620338
申请日：2009-11-17
申请人： John Valcore , Valeriy Litvak , Christine Cyterski
发明人： John Valcore , Valeriy Litvak , Christine Cyterski
IPC分类号： B08B3/00
CPC分类号： H01L21/67259 , H01L21/67028 , H01L21/67253
摘要： An aspect of the present invention provides a system and method for controlling a wafer cleaning system having a wafer carrier and a driving portion. The wafer carrier can move along a path in a first direction and a second direction. The driving portion can controllably move the wafer carrier in the first direction and the second direction. The control system includes a vibration sensor portion and a wafer carrier position controller. The vibration sensor portion can detect vibration of the wafer carrier and can output a vibration signal based on the detected vibration. The wafer carrier position controller can instruct the driving portion to modify motion of the wafer carrier based on the vibration signal to reduce the detected vibration.
摘要翻译：本发明的一个方面提供一种用于控制具有晶片载体和驱动部分的晶片清洁系统的系统和方法。晶片载体可沿第一方向和第二方向的路径移动。驱动部分可以在第一方向和第二方向上可控地移动晶片载体。控制系统包括振动传感器部分和晶片载体位置控制器。振动传感器部分可以检测晶片载体的振动，并且可以基于检测到的振动输出振动信号。晶片载体位置控制器可以指示驱动部分基于振动信号修改晶片载体的运动，以减少检测到的振动。

9. 发明申请

US20070095897A1 Automated banking machine 有权
标题翻译：自动银行机
公开(公告)号：US20070095897A1
公开(公告)日：2007-05-03
申请号：US11409283
申请日：2006-04-21
申请人： Keith Carpenter , Craig Hockman , Willis Miller , Laura Drozda , Paul Burns , Thomas Phillips , John Valcore , H. Graef , Edward Laskowski , James Meek , Martin Brown , Todd Galloway , Robert Barnett , Mike Ryan , James Kay , Mark Ward , David Peters , Greg Miller , Arindam Laha , Joe Altier
发明人： Keith Carpenter , Craig Hockman , Willis Miller , Laura Drozda , Paul Burns , Thomas Phillips , John Valcore , H. Graef , Edward Laskowski , James Meek , Martin Brown , Todd Galloway , Robert Barnett , Mike Ryan , James Kay , Mark Ward , David Peters , Greg Miller , Arindam Laha , Joe Altier
IPC分类号： G07F19/00
CPC分类号： G07F19/206 , G06Q20/042 , G06Q20/10 , G06Q20/102 , G06Q20/108 , G06Q20/1085 , G06Q40/00 , G07F19/20
摘要： A cash dispensing automated banking machine (10) includes a user interface (12) including an opening (20). Users of the machine deliver individual sheets and stacks of sheets to and from the machine through the opening. Stacks of sheets may include sheets such as notes, checks or other documents. Stacks input to the machine may include mixtures of various types of sheets. The machine operates to receive notes, process checks and perform other operations. Notes received in the machine may be recycled and dispensed to other users. Checks processed by the machine may be imaged by an imaging device, cancelled and stored in the machine or alternatively returned to a user.
摘要翻译：现金分配自动银行机（10）包括包括开口（20）的用户界面（12）。机器的用户通过开口将单张纸张和堆叠的纸张递送到机器。纸张堆叠可能包括纸张，如纸币，支票或其他文件。输入到机器的堆叠可以包括各种类型的片材的混合物。机器操作以接收笔记，过程检查和执行其他操作。在机器中收到的注意事项可以回收并分发给其他用户。由机器处理的检查可以由成像设备成像，取消并存储在机器中或者交替地返回给用户。

10. 发明申请

US20060151595A1 Automated banking machine 有权
标题翻译：自动银行机
公开(公告)号：US20060151595A1
公开(公告)日：2006-07-13
申请号：US11324835
申请日：2006-01-03
申请人： Keith Carpenter , Craig Hockman , Willis Miller , Laura Drozda , Paul Burns , Thomas Phillips , John Valcore , H. Graef , Edward Laskowski , James Meek , Martin Brown , Todd Galloway , Robert Barnett , Mike Ryan , James Kay , Mark Ward , David Peters , Greg Miller , Arindam Laha , Joe Altier
发明人： Keith Carpenter , Craig Hockman , Willis Miller , Laura Drozda , Paul Burns , Thomas Phillips , John Valcore , H. Graef , Edward Laskowski , James Meek , Martin Brown , Todd Galloway , Robert Barnett , Mike Ryan , James Kay , Mark Ward , David Peters , Greg Miller , Arindam Laha , Joe Altier
IPC分类号： G07F19/00 , G06F7/08
CPC分类号： G07F19/202 , G06Q20/042 , G07F19/20 , G07F19/203
摘要： An automated banking machine (10) includes a user interface (12) including an opening (20). Users of the machine deliver individual sheets and stacks of sheets to and from the machine through the opening. Stacks of sheets may include sheets such as notes, checks or other documents. Stacks input to the machine may include mixtures of various types of sheets. The machine operates to receive notes, process checks and perform other operations. Notes received in the machine may be recycled and dispensed to other users. Checks processed by the machine may be imaged by an imaging device, cancelled and stored in the machine or alternatively returned to a user.
摘要翻译：自动银行机（10）包括包括开口（20）的用户界面（12）。机器的用户通过开口将单张纸张和堆叠的纸张递送到机器。床单可能包括纸张，如纸币，支票或其他文件。输入到机器的堆叠可以包括各种类型的片材的混合物。机器操作以接收笔记，过程检查和执行其他操作。在机器中收到的注意事项可以回收并分发给其他用户。由机器处理的检查可以由成像设备成像，取消并存储在机器中或者交替地返回给用户。

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