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    • 3. 发明授权
    • Method for producing fine structure
    • 生产精细结构的方法
    • US08221963B2
    • 2012-07-17
    • US12342147
    • 2008-12-23
    • Jun AmakoDaisuke Sawaki
    • Jun AmakoDaisuke Sawaki
    • G03F7/20G02B5/18
    • G03F7/001G02B5/1857G03F7/70408
    • A method for producing a fine structure includes: (a) forming a photosensitive film to cover a plurality of first convex portions formed in at least one surface of a substrate; (b) arranging liquid to cover the photosensitive film on the at least one surface of the substrate; (c) arranging a transparent parallel plate such that the parallel plate opposes the substrate via the liquid; (d) generating interference field by a laser beam to irradiate the interference field onto the photosensitive film via the parallel plate and the liquid; (e) removing the liquid and the parallel plate to develop the photosensitive film so as to form a photosensitive film pattern; and (f) etching the substrate using a mask of the photosensitive film pattern to form a plurality of fine convex portions smaller than the first convex portions on the at least one surface of the substrate. In the method, the liquid arranged at step (b) has a refractive index larger than 1 and equal to or smaller than a refractive index of the photosensitive film.
    • 精细结构的制造方法包括:(a)形成感光膜以覆盖形成在基板的至少一个表面中的多个第一凸部; (b)布置液体以覆盖基板的至少一个表面上的感光膜; (c)布置透明平行板,使得平行板经由液体与基板相对; (d)通过激光束产生干涉场,以通过平行板和液体将干涉场照射到感光膜上; (e)去除液体和平行板以显影感光膜以形成感光膜图案; 以及(f)使用所述感光膜图案的掩模蚀刻所述基板,以形成比所述基板的所述至少一个表面上的所述第一凸部小的多个细小凸部。 在该方法中,在步骤(b)中布置的液体的折射率大于1且等于或小于感光膜的折射率。
    • 7. 发明申请
    • OPTICAL DEVICE, ANALYZING APPARATUS AND SPECTROSCOPIC METHOD
    • 光学装置,分析装置和光谱方法
    • US20110267613A1
    • 2011-11-03
    • US13095103
    • 2011-04-27
    • Jun AMAKOKohei YAMADA
    • Jun AMAKOKohei YAMADA
    • G01J3/44
    • G01N21/658G01N21/554
    • An optical device includes a first projection group in which electrically conductive projections are arranged at a first period along a direction parallel to a virtual plane. When light traveling in a direction inclined with respect to a vertical line directed to the virtual plane is incident on the first projection group, surface plasmon resonance is generated at a first resonance peak wavelength and a second resonance peak wavelength. A first resonance peak wavelength band including the first resonance peak wavelength includes an excitation wavelength in surface-enhanced Raman scattering. A second resonance peak wavelength band including the second resonance peak wavelength includes a Raman scattering wavelength in the surface-enhanced Raman scattering.
    • 光学装置包括第一投影组,其中导电突起沿着平行于虚拟平面的方向以第一周期排列。 当在相对于指向虚拟平面的垂直线倾斜的方向上行进的光入射到第一投影组时,在第一共振峰值波长和第二共振峰值波长处产生表面等离子体共振。 包括第一共振峰值波长的第一共振峰值波长包括表面增强拉曼散射中的激发波长。 包括第二谐振峰值波长的第二共振峰值波长包括表面增强拉曼散射中的拉曼散射波长。
    • 10. 发明申请
    • OPTICAL ELEMENT AND PROJECTION DISPLAY DEVICE
    • 光学元件和投影显示设备
    • US20080304153A1
    • 2008-12-11
    • US12132810
    • 2008-06-04
    • Jun AMAKODaisuke SAWAKI
    • Jun AMAKODaisuke SAWAKI
    • G02B5/18G02B5/30
    • G02B5/3058G02B5/1842G02B5/1861
    • An optical element, includes: a diffractive functional layer which diffracts at least part of incident light; and a grid formed on a first surface of the diffractive functional layer, the grid including a plurality of fine wires and having a polarization separation function; wherein the optical element reflects a part of the incident light while transmitting another part of the incident light, the first surface of the diffractive functional layer including a plurality of first regions; a plurality of second regions, a height thereof relative to a second surface of the diffractive functional layer being different from that of the first regions, the second surface being an opposite surface to the first surface; and a step provided at a border between the first regions and the second regions.
    • 光学元件包括:衍射功能层,衍射至少部分入射光; 以及形成在所述衍射功能层的第一表面上的栅格,所述栅格包括多根细线并具有偏振分离功能; 其中所述光学元件在透射另一部分入射光的同时反射入射光的一部分,所述衍射功能层的第一表面包括多个第一区域; 多个第二区域,其相对于所述衍射功能层的第二表面的高度与所述第一区域的高度不同,所述第二表面是与所述第一表面相反的表面; 以及设置在第一区域和第二区域之间的边界处的台阶。