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    • 1. 发明授权
    • Specific phase range for ion injection into ion trap device
    • 离子注入离子阱装置的特定相位范围
    • US08742330B2
    • 2014-06-03
    • US13458708
    • 2012-04-27
    • Junichi Taniguchi
    • Junichi Taniguchi
    • H01J49/42H01J49/36
    • H01J49/424
    • When ions accumulated in the exit side end of ion guide are to be injected into ion trap as packets, the application of square wave high frequency voltage to ring electrode from main voltage generating unit is stopped. Once nearly all the ions have been injected into ion trap, the application of square wave high frequency voltage from main voltage generating unit to ring electrode is momentarily started, at which time the application of square wave high frequency voltage is started from a phase in the range of 90°±40° or 270°±40°. It is thereby possible to reduce the extent of spread of ions immediately after application of high frequency voltage and to improve the ion trapping efficiency.
    • 当离子导管的出射侧端部积聚的离子以离子阱形式注入离子阱时,停止从主电压产生部向环形电极施加方波高频电压。 一旦几乎所有的离子都被注入到离子阱中,从主电压产生单元到环形电极的方波高频电压的施加暂时开始,此时方波高频电压的应用从 范围为90°±40°或270°±40°。 因此,可以在施加高频电压之后立即减少离子扩散的程度并提高离子捕获效率。
    • 2. 发明授权
    • Ion trap mass spectrometer
    • 离子阱质谱仪
    • US08513592B2
    • 2013-08-20
    • US13585623
    • 2012-08-14
    • Junichi Taniguchi
    • Junichi Taniguchi
    • H01J49/26
    • H01J49/424
    • An ion trap mass spectrometer with high sensitivity for detection in the high mass-to-charge ratio is provided. with separate measurement of square-wave voltages on the positive and negative electrode sides applied to a ring electrode in rectifying circuits and smoothing the measured voltages in integrating circuits, respectively, the areas of square-wave voltages on the positive and negative electrode sides are replaced with the peak values h1 and h2 of DC signals, respectively. A comparator circuit outputs the difference of said peak values as the error signal Δ, and variable delay circuits adjust the amount of delay of control signals so that the error signal Δ becomes zero. This changes the relative phase relation between control signals on the positive and negative electrode sides that turn on and off the switches, and renders the duty ratio of square-wave voltages nearly 50%.
    • 提供了一种具有高灵敏度的离子阱质谱仪,用于高质量 - 电荷比的检测。 在分别对施加到整流电路中的环形电极的正极侧和负极侧上的方波电压进行单独测量,并且分别在积分电路中平滑测量的电压,正负极侧的方波电压的面积被替换 分别具有DC信号的峰值h1和h2。 比较器电路将所述峰值的差作为误差信号Delta输出,并且可变延迟电路调节控制信号的延迟量,使得误差信号Delta变为零。 这改变了正极和负极两侧的控制信号之间的相对相位关系,导通和关断开关,并使方波电压的占空比接近50%。
    • 3. 发明申请
    • Ion Trap Time-Of-Flight Mass Spectrometer
    • 离子阱飞行时间质谱仪
    • US20120138788A1
    • 2012-06-07
    • US13310377
    • 2011-12-02
    • Junichi TANIGUCHI
    • Junichi TANIGUCHI
    • H01J49/40
    • H01J49/424H01J49/004H01J49/40
    • A technique for improving the mass-resolving power of an ion trap time-of-flight mass spectrometer is provided. At the final stage of a cooling process before the ejection of ions from an ion trap, the frequency of a rectangular-wave voltage applied to a ring electrode of the ion trap is increased for a few to several cycles. This operation reduces the confining potential depth of the ion trap and decelerates the captured ions. The turn-around time of the ions is shortened when the rectangular-wave voltage is halted and an accelerating electric field is created. Thus, the variation in the time of flight of the ions with the same mass-to-charge ratio is reduced. The time for increasing the frequency is determined so that a spread of the ions because of the depth reduction of the confining potential will fall within the range that can be corrected in the time-of-flight mass spectrometer.The amendments were made simply to meet the requirement of not exceeding 150 words for Abstracts and were not made in response to any type of substantive rejections. No new matter has been added in the new Abstract.
    • 提供了一种用于提高离子阱飞行时间质谱仪的质量分辨能力的技术。 在从离子阱排出离子之前的冷却过程的最后阶段,施加到离子阱的环形电极的矩形波电压的频率增加几个到几个周期。 该操作降低了离子阱的限制电位深度并使捕获的离子减速。 当矩形波电压停止并产生加速电场时,离子的周转时间被缩短。 因此,具有相同质荷比的离子的飞行时间的变化减小。 确定增加频率的时间,使得由于限制电位的深度降低而导致的离子扩散将落入可以在飞行时间质谱仪中校正的范围内。 这些修正案只是为了满足摘要不超过150个字的要求,并没有作出任何形式的实质性拒绝。 新的摘要没有增加新的内容。
    • 4. 发明申请
    • Ion Trap Mass Spectrometer
    • 离子阱质谱仪
    • US20120049059A1
    • 2012-03-01
    • US13219408
    • 2011-08-26
    • Junichi TANIGUCHI
    • Junichi TANIGUCHI
    • B01D59/44
    • H01J49/424H01J49/428
    • A technique for performing precursor isolation with a desired mass-to-charge ratio (m/z) in a digital ion trap while maintaining the q value at a substantially constant value is provided. A data obtained by digitizing an FNF signal having a notch is stored beforehand in an FNF waveform memory 15. In the process of precursor isolation, a main voltage timing controller 7 and a main voltage generator 9 generate a rectangular-wave voltage based on a reference clock signal CK. An auxiliary signal generator 14 reads data from the FNF waveform memory 15 and generates an FNF signal by performing digital-to-analogue conversion of the data in accordance with a clock signal synchronized with the reference clock signal CK. Under the command of a controller 30, a reference clock generator 6 produces the reference clock signal CK having a frequency corresponding to the m/z value of a target ion. Accordingly, a change in the m/z of the target ion leads to a change in the frequency of the reference clock signal CK, which causes the frequency of the rectangular-wave voltage and the central frequency of the notch of the FNF signal to change in the same proportion.
    • 提供了一种用于在数字离子阱中以期望的质荷比(m / z)进行前体隔离的技术,同时将q值保持在基本恒定的值。 通过数字化具有凹口的FNF信号获得的数据预先存储在FNF波形存储器15中。在前驱体隔离的过程中,主电压定时控制器7和主电压发生器9基于参考产生矩形波电压 时钟信号CK。 辅助信号发生器14从FNF波形存储器15读取数据,并且通过根据与参考时钟信号CK同步的时钟信号对数据进行数模转换来产生FNF信号。 在控制器30的指令下,参考时钟发生器6产生具有对应于目标离子的m / z值的频率的参考时钟信号CK。 因此,目标离子的m / z的变化导致参考时钟信号CK的频率的变化,这导致矩形波电压的频率和FNF信号的陷波的中心频率改变 以相同的比例。
    • 7. 发明授权
    • Ashing method
    • 灰化方法
    • US5763328A
    • 1998-06-09
    • US638712
    • 1996-04-29
    • Syuuichi YoshiharaJunichi Taniguchi
    • Syuuichi YoshiharaJunichi Taniguchi
    • G03F7/36H01L21/02H01L21/027H01L21/302H01L21/3065H01L21/3213H01L21/306
    • H01L21/02071
    • In an ashing method for ashing a wafer having an aluminum wiring layer etched by a chlorine containing gas, the wafer is ashed under the conditions that a mixture gas composed of an oxygen gas and at least one kind of alcohol gas selected from CH.sub.3 OH, C.sub.2 H.sub.5 OH, n--C.sub.3 H.sub.7 OH, and i--C.sub.3 H.sub.7 OH is used as an ashing gas, a flow ratio between the alcohol gas and the oxygen gas is set in the range of 1:1 to 1:5, pressure in an ashing chamber is set to 200 Pa or more, and temperature in the ashing chamber is set in the range of 200.degree. C. to 270.degree. C. Accordingly, corrosion in the aluminum wiring layer due to a residual component of the chloride containing gas in a photoresist film can be prevented.
    • 在用含有氯气气蚀刻了铝布线层的晶片灰化灰化方法中,在由氧气和至少一种醇气体组成的混合气体中选择CH 3 OH,C 2 H 5 OH, n-C3H7OH和i-C3H7OH用作灰化气体,醇气体和氧气之间的流量比设定在1:1至1:5的范围内,灰化室中的压力设定为200Pa 以上,灰化室内的温度设定在200〜270℃的范围内。因此,可以防止由于光致抗蚀剂膜中含氯化物气体的残留成分导致的铝配线层的腐蚀。
    • 8. 发明授权
    • Ion trap time-of-flight mass spectrometer
    • 离子阱飞行时间质谱仪
    • US08368014B2
    • 2013-02-05
    • US13310377
    • 2011-12-02
    • Junichi Taniguchi
    • Junichi Taniguchi
    • H01J49/40H01J49/42
    • H01J49/424H01J49/004H01J49/40
    • A technique for improving the mass-resolving power of an ion trap time-of-flight mass spectrometer is provided. At the final stage of a cooling process before the ejection of ions from an ion trap, the frequency of a rectangular-wave voltage applied to a ring electrode of the ion trap is increased for a few to several cycles. This operation reduces the confining potential depth of the ion trap and decelerates the captured ions. The turn-around time of the ions is shortened when the rectangular-wave voltage is halted and an accelerating electric field is created. Thus, the variation in the time of flight of the ions with the same mass-to-charge ratio is reduced. The time for increasing the frequency is determined so that a spread of the ions because of the depth reduction of the confining potential will fall within the range that can be corrected in the time-of-flight mass spectrometer.
    • 提供了一种用于提高离子阱飞行时间质谱仪的质量分辨能力的技术。 在从离子阱排出离子之前的冷却过程的最后阶段,施加到离子阱的环形电极的矩形波电压的频率增加几个到几个周期。 该操作降低了离子阱的限制电位深度并使捕获的离子减速。 当矩形波电压停止并产生加速电场时,离子的周转时间被缩短。 因此,具有相同质荷比的离子的飞行时间的变化减小。 确定增加频率的时间,使得由于限制电位的深度降低而导致的离子扩散将落入可以在飞行时间质谱仪中校正的范围内。
    • 9. 发明申请
    • Mass Spectrometer
    • 质谱仪
    • US20110095180A1
    • 2011-04-28
    • US12999957
    • 2008-06-20
    • Junichi Taniguchi
    • Junichi Taniguchi
    • H01J49/40
    • H01J49/36H01J49/004H01J49/0481H01J49/40H01J49/424H01J49/426H01J49/427
    • In performing an isolation of specific ions or performing a dissociation operation by CID, ions are captured by applying a radio-frequency high voltage to a ring electrode 31 as before. In a cooling operation which is performed immediately before target ions are ejected toward a TOFMS unit 4 with the ions stored in an ion trap 3, a radio-frequency high voltage is not applied to the ring electrode 31 but to end cap electrodes 32 and 34 to capture the ions. In this operation, the frequency thereof is set to be higher than that of the voltage applied to the ring electrode 31 and the amplitude is also increased in order to assure a large pseudopotential and keep the low mass cutoff (LMC). This narrows the spatial distribution of the cooled ions, reducing the variation of the initial positions of the ions at the point in time when they are ejected, which increases the mass resolution. In addition, since an isolation of ions having a large m/z can be performed with a great qz value as is conventionally done, a high mass selectivity can be assured.
    • 在执行特定离子的分离或通过CID进行解离操作时,如前所述通过向环形电极31施加射频高电压来捕获离子。 在将离子存储在离子阱3内的目标离子朝向TOFMS单元4喷射之前执行的冷却操作中,高频高压不施加到环形电极31而是端盖电极32和34 捕获离子。 在这种操作中,其频率被设置为高于施加到环形电极31的电压的频率,并且为了确保大的伪电位并保持低质量截止(LMC),振幅也增加。 这减小了冷却的离子的空间分布,减少了它们在喷射时的时间点上离子的初始位置的变化,这增加了质量分辨率。 此外,由于如以往那样以大的qz值进行具有大m / z的离子的分离,因此可以确保高的质量选择性。