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    • 3. 发明授权
    • Scan device for microscope measurement instrument
    • 扫描仪用于显微镜测量仪器
    • US08796654B2
    • 2014-08-05
    • US13056293
    • 2008-07-31
    • Masahiro OhtaNoriaki OyabuKenjiro KimuraShinichiro IdoKei KobayashiHirofumi YamadaKazumi Matsushige
    • Masahiro OhtaNoriaki OyabuKenjiro KimuraShinichiro IdoKei KobayashiHirofumi YamadaKazumi Matsushige
    • G01N21/86G01V8/00G01N35/10G01Q10/06H01J37/20H01J37/26H01J37/28B82Y35/00
    • G01N35/1011B82Y35/00G01Q10/065H01J37/20H01J37/265H01J37/28H01J2237/20228
    • A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
    • 将探针连续地移动到设置在样本上的测量区域中的多个测量点,以测量z位移量。 激励控制单元根据位移检测单元的检测输出反馈控制压电元件,使得悬臂的振动振幅恒定。 此外,垂直位移控制单元反馈控制垂直位置扫描单元,以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。 当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时,主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。 结果,可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。 这消除了不必要的测量时间,这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。
    • 4. 发明授权
    • Semiconductor device with fault detection function
    • 具有故障检测功能的半导体器件
    • US08497695B2
    • 2013-07-30
    • US12227441
    • 2007-06-13
    • Chiaki MatobaKei Kobayashi
    • Chiaki MatobaKei Kobayashi
    • G01R31/3187
    • G01R31/2856H01L21/78H01L22/34H01L2924/0002H01L2924/00
    • A semiconductor device (1) detecting damage to the peripheral part of a chip which could potentially grow into a defect includes: a wire (3) formed along the outer periphery of a semiconductor chip (2d) to detect damage; a detection circuit (4) provided in the semiconductor chip (2) to supply a detection signal to the wire (3) to detect a break in the wire (3); an output terminal (5) for outputting the detection signal having passed through the wire (3); an internal circuit (6) provided in the semiconductor chip (2); an output switching circuit (7) selecting either an output signal of the internal circuit (6) or the detection signal having passed the wire (3) for output to the output terminal (5); a heating element (15a) heating the peripheral part of the chip; a power supply circuit (16) supplying power to the heating element; and a temperature detection/control circuit (17) controlling the heating by the heating element. This configuration enables easy detection of damage to the chip by logic test without additional measurement terminals. The configuration also enables detection of chips which could develop a defect when packaged.
    • 检测对潜在生长成缺陷的芯片的周边部分的损坏的半导体器件(1)包括:沿着半导体芯片(2d)的外周形成的用于检测损伤的线(3) 设置在半导体芯片(2)中的检测电路(4),用于向线(3)提供检测信号以检测线(3)中的断裂; 输出端子(5),用于输出已经通过导线(3)的检测信号; 设置在所述半导体芯片(2)中的内部电路(6) 输出切换电路(7),选择内部电路(6)的输出信号或通过导线(3)的检测信号输出到输出端子(5); 加热芯片周边部分的加热元件; 电源电路(16),向所述加热元件供电; 以及控制加热元件的加热的温度检测/控制电路(17)。 该配置可以通过逻辑测试轻松检测芯片的损坏,无需附加的测量端子。 该配置还能够检测在封装时可能产生缺陷的芯片。
    • 5. 发明申请
    • Scan Device
    • 扫描设备
    • US20110261352A1
    • 2011-10-27
    • US13056293
    • 2008-07-31
    • Masahiro OhtaNoriaki OyabuKenjiro KimuraShinichiro IdoKei KobayashiHirofumi YamadaKazumi Matsushige
    • Masahiro OhtaNoriaki OyabuKenjiro KimuraShinichiro IdoKei KobayashiHirofumi YamadaKazumi Matsushige
    • G01N21/01
    • G01N35/1011B82Y35/00G01Q10/065H01J37/20H01J37/265H01J37/28H01J2237/20228
    • A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
    • 将探针连续地移动到设置在样本上的测量区域中的多个测量点,以测量z位移量。 激励控制单元根据位移检测单元的检测输出反馈控制压电元件,使得悬臂的振动振幅恒定。 此外,垂直位移控制单元反馈控制垂直位置扫描单元,以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。 当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时,主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。 结果,可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。 这消除了不必要的测量时间,这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。