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    • 4. 发明授权
    • Apparatus for material surface observation
    • 用于材料表面观察的装置
    • US5111043A
    • 1992-05-05
    • US639129
    • 1991-01-09
    • Naoto ShigenakaTsuneyuki HashimotoMotomasa Fuse
    • Naoto ShigenakaTsuneyuki HashimotoMotomasa Fuse
    • G01Q30/02H01J37/28
    • H01J37/28H01J2237/244
    • An apparatus of material surface observation related to the present invention is a scanning electron microscope which is combined with an accelerator of charged particles. The material surface is activated by irradiation of the charged particles and a surface reaction is induced. Secondary electron in generated by irradiation of the scanning electron beam depending on a shape of the material surface. The secondary electron generated by the irradiation of the scanning electron beam is discriminated from the secondary electrode generated by the irradiation of the charged particles, and only a signal of the secondary electron generated by the irradiation of the scanning electron beam is visualized. Consequently, a reaction process of the material surface which is activated or is reaction-induced by the irradiation of the charged particles can be observed in atomic level with less noise.
    • 与本发明有关的材料表面观察装置是与带电粒子的加速器结合的扫描型电子显微镜。 材料表面通过照射带电粒子而被激活,并引起表面反应。 根据材料表面的形状通过扫描电子束的照射而产生的二次电子。 通过照射扫描电子束产生的二次电子与通过照射带电粒子产生的二次电极区分开,只有通过扫描电子束的照射产生的二次电子的信号被可视化。 因此,能够以较小的噪音以原子级观察被激发的物质表面或被带电粒子的照射反应的反应过程。