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    • 1. 发明授权
    • Apparatus for material surface observation
    • 用于材料表面观察的装置
    • US5111043A
    • 1992-05-05
    • US639129
    • 1991-01-09
    • Naoto ShigenakaTsuneyuki HashimotoMotomasa Fuse
    • Naoto ShigenakaTsuneyuki HashimotoMotomasa Fuse
    • G01Q30/02H01J37/28
    • H01J37/28H01J2237/244
    • An apparatus of material surface observation related to the present invention is a scanning electron microscope which is combined with an accelerator of charged particles. The material surface is activated by irradiation of the charged particles and a surface reaction is induced. Secondary electron in generated by irradiation of the scanning electron beam depending on a shape of the material surface. The secondary electron generated by the irradiation of the scanning electron beam is discriminated from the secondary electrode generated by the irradiation of the charged particles, and only a signal of the secondary electron generated by the irradiation of the scanning electron beam is visualized. Consequently, a reaction process of the material surface which is activated or is reaction-induced by the irradiation of the charged particles can be observed in atomic level with less noise.
    • 与本发明有关的材料表面观察装置是与带电粒子的加速器结合的扫描型电子显微镜。 材料表面通过照射带电粒子而被激活,并引起表面反应。 根据材料表面的形状通过扫描电子束的照射而产生的二次电子。 通过照射扫描电子束产生的二次电子与通过照射带电粒子产生的二次电极区分开,只有通过扫描电子束的照射产生的二次电子的信号被可视化。 因此,能够以较小的噪音以原子级观察被激发的物质表面或被带电粒子的照射反应的反应过程。
    • 2. 发明授权
    • Semiconductor integrated circuit device and its test method
    • 半导体集成电路器件及其测试方法
    • US5991906A
    • 1999-11-23
    • US9257
    • 1998-01-20
    • Tsuneyuki Hashimoto
    • Tsuneyuki Hashimoto
    • G01R31/28G01R31/3185
    • G01R31/318527
    • In a semiconductor integrated circuit device having a test circuit, the test time can be shortened and further the circuit activation ratio can be increased, while reducing the circuit scale. In the operation test mode, the counter circuit (10) is divided into the first counter circuit (10a) and the second counter circuit (10b) by use of the test circuit (20). Further, the same input count clock CK is inputted at the same time to both the first and second counter circuits (10a, 10b) in parallel. The normal operation of the counter circuit (10) can be discriminated by checking whether the output signal A of the first counter circuit (10a) matches the output signal B of the second counter circuit (10b) or not.
    • 在具有测试电路的半导体集成电路器件中,可以缩短测试时间,并且在减小电路规模的同时可以进一步提高电路激活率。 在操作测试模式中,通过使用测试电路(20)将计数器电路(10)分成第一计数器电路(10a)和第二计数器电路(10b)。 此外,相同的输入计数时钟CK被同时输入到第一和第二计数器电路(10a,10b)并行。 可以通过检查第一计数器电路(10a)的输出信号A是否与第二计数器电路(10b)的输出信号B匹配来鉴别计数器电路(10)的正常操作。
    • 4. 发明授权
    • Method and apparatus for measuring degree of vacuum in an electron
microscope
    • 用于在电子显微镜中测量真空度的方法和装置
    • US4803356A
    • 1989-02-07
    • US70549
    • 1987-07-07
    • Hiroki KumahoraTsuneyuki HashimotoEiichi Nishimura
    • Hiroki KumahoraTsuneyuki HashimotoEiichi Nishimura
    • G01L21/32G01N23/225H01J37/18H01J37/26H01J41/04G21K1/00
    • H01J37/18
    • The present invention comprises disposing an electrode group consisting of an anode and cathodes provided on both sides of the anode at a portion where the degree of vacuum in an electron microscope is to be measured closing in thermal electrons between the electrode group and a magnetic field forming lens systems such as objective lens system, condenser lens system and the like of the electron microscope, collecting a gas ionized by the thermal electrons closed therebetween to measure an ionic current, thereby realizing measurement of a degree of vacuum on a sample specimen part or thereabout without deteriorating a performance of the electrons microscope. For generating the thermal electron, for example, an observing electron beam of the electron microscope is collided with cathodes of the electrode group. For measuring the degree of vacuum on the sample specimen part of thereabout, the anode is disposed between an objective lens pole piece and a sample specimen holder stage and the objective lens pole piece and the sample specimen holder stage are used as cathodes so that the degree of vacuum can simply be measured thereby.
    • 本发明包括将由阳极组成的电极组和设置在阳极两侧的阴极的电极组和磁场形成之间的热电子闭合的电子显微镜中的真空度进行测量的部分 透镜系统如电子显微镜的物镜系统,聚光透镜系统等,收集由其间封闭的热电子离子化的气体来测量离子电流,从而实现对样品部分或其上的真空度的测量 而不会劣化电子显微镜的性能。 为了产生热电子,例如,电子显微镜的观察电子束与电极组的阴极相撞。 为了测量其上的样品部分的真空度,将阳极设置在物镜极片和样品保持台之间,并且将物镜极片和样品保持台用作阴极,使得程度 可以简单地测量真空度。