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    • 2. 发明授权
    • Method for manufacturing a semiconductor optical functional device
    • 半导体光功能元件的制造方法
    • US06521476B2
    • 2003-02-18
    • US09978053
    • 2001-10-17
    • Munechika Kubota
    • Munechika Kubota
    • H01L2100
    • H01S5/2231H01S5/2081H01S5/2205H01S5/2213
    • A method for manufacturing a semiconductor optical functional device, comprising: forming a laminated semiconductor layer over a substrate; forming an island-form preliminary pattern whose side wall surface is substantially perpendicular to the upper surface of the substrate by patterning all or part of the laminated semiconductor layer; forming an insulating material component on the top side of the substrate so that the upper surface of the preliminary pattern and part of the side walls of the preliminary pattern are exposed; and etching the side walls of the preliminary pattern and thereby changing the preliminary pattern into a reversed-mesa structure component that contributes to optical function and forming a space between the reversed-mesa structure component and the insulating material component.
    • 一种半导体光功能元件的制造方法,其特征在于,在基板上形成层叠半导体层, 通过图案化全部或部分层叠半导体层,形成其侧壁表面基本上垂直于衬底的上表面的岛状初步图案; 在基板的上侧形成绝缘材料部件,使得预备图案的上表面和初步图案的侧壁的一部分露出; 并且蚀刻初步图案的侧壁,从而将初步图案改变成有助于光学功能并在反台面结构部件和绝缘材料部件之间形成空间的反台面结构部件。
    • 6. 发明申请
    • Complex optical device
    • 复杂光器件
    • US20070127534A1
    • 2007-06-07
    • US11633491
    • 2006-12-05
    • Tomonori ShimamuraMunechika KubotaKoji Yamada
    • Tomonori ShimamuraMunechika KubotaKoji Yamada
    • H01S3/10H01S5/00
    • H01S5/0265H01S5/0422H01S5/204H01S5/2213H01S5/2231
    • The present invention provides a complex optical device capable of decreasing electric power consumption, generating a high quality laser, and modulating the laser without degradation. The complex optical device includes a laser diode element (LD) and an electroabsorption modulator element (EAM) which are formed on the same substrate and optically coupled with each other. Both of the LD and the EAM are formed from a semiconductive upper cladding layer having a first conductive type, an insulating core layer, and a semiconductive lower cladding layer having a second conductive type opposite to the first conductive type. The electrical isolation layer extending through the core layer from the surface of the upper cladding layer up to the surface of the substrate is formed by an ion injection at an area between the LD and the EAM to isolate the LD and the EAM electrically. The ion injection does not optically have an influence on the insulating core layer through which the LD and the EAM are optically coupled with each other.
    • 本发明提供一种能够降低电力消耗,产生高质量激光,并且不劣化地调制激光的复合光学器件。 复合光学器件包括激光二极管元件(LD)和电吸收调制元件(EAM),其形成在相同的衬底上并彼此光学耦合。 LD和EAM都由具有第一导电类型,绝缘芯层和具有与第一导电类型相反的第二导电类型的半导体下包层的半导体上包层形成。 通过在LD和EAM之间的区域处的离子注入,形成从上覆层的表面延伸穿过芯层的电隔离层直到衬底的表面,以电隔离LD和EAM。 离子注入不会光学地影响LD和EAM彼此光学耦合的绝缘芯层。