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    • 4. 发明申请
    • Complex optical device
    • 复杂光器件
    • US20070127534A1
    • 2007-06-07
    • US11633491
    • 2006-12-05
    • Tomonori ShimamuraMunechika KubotaKoji Yamada
    • Tomonori ShimamuraMunechika KubotaKoji Yamada
    • H01S3/10H01S5/00
    • H01S5/0265H01S5/0422H01S5/204H01S5/2213H01S5/2231
    • The present invention provides a complex optical device capable of decreasing electric power consumption, generating a high quality laser, and modulating the laser without degradation. The complex optical device includes a laser diode element (LD) and an electroabsorption modulator element (EAM) which are formed on the same substrate and optically coupled with each other. Both of the LD and the EAM are formed from a semiconductive upper cladding layer having a first conductive type, an insulating core layer, and a semiconductive lower cladding layer having a second conductive type opposite to the first conductive type. The electrical isolation layer extending through the core layer from the surface of the upper cladding layer up to the surface of the substrate is formed by an ion injection at an area between the LD and the EAM to isolate the LD and the EAM electrically. The ion injection does not optically have an influence on the insulating core layer through which the LD and the EAM are optically coupled with each other.
    • 本发明提供一种能够降低电力消耗,产生高质量激光,并且不劣化地调制激光的复合光学器件。 复合光学器件包括激光二极管元件(LD)和电吸收调制元件(EAM),其形成在相同的衬底上并彼此光学耦合。 LD和EAM都由具有第一导电类型,绝缘芯层和具有与第一导电类型相反的第二导电类型的半导体下包层的半导体上包层形成。 通过在LD和EAM之间的区域处的离子注入,形成从上覆层的表面延伸穿过芯层的电隔离层直到衬底的表面,以电隔离LD和EAM。 离子注入不会光学地影响LD和EAM彼此光学耦合的绝缘芯层。