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    • 8. 发明申请
    • Method for Production of Optical Waveguides and Coupling and Devices Made from the Same
    • 用于制造光波导和耦合的方法及其制造
    • US20140004638A1
    • 2014-01-02
    • US13931530
    • 2013-06-28
    • Payam Rabiei
    • Payam Rabiei
    • G02B6/13
    • G02B6/13B82Y20/00G02B6/1223G02B6/136G02B2006/1204G02B2006/12045G02B2006/12054G02B2006/12057G02B2006/12097
    • Novel processing methods for production of high-refractive index contrast and low loss optical waveguides are disclosed. In one embodiment, a “channel” waveguide is produced by first depositing a lower cladding material layer with a low refractive index on a base substrate, a refractory metal layer, and a top diffusion barrier layer. Then, a trench is formed with an open surface to the refractory metal layer. The open surface is subsequently oxidized to form an oxidized refractory metal region, and the top diffusion barrier layer and the non-oxidized refractory metal region are removed. Then, a low-refractive-index top cladding layer is deposited on this waveguide structure to encapsulate the oxidized refractory metal region. In another embodiment, a “ridge” waveguide is produced by using similar process steps with an added step of depositing a high-refractive-index material layer and an optional optically-transparent layer.
    • 公开了用于生产高折射率对比度和低损耗光波导的新型加工方法。 在一个实施例中,通过在基底衬底,难熔金属层和顶部扩散阻挡层上首先沉积具有低折射率的下覆层材料层来制造“通道”波导。 然后,形成具有开口表面的难熔金属层的沟槽。 随后将开放的表面氧化以形成氧化的难熔金属区域,并且去除顶部扩散阻挡层和未氧化的难熔金属区域。 然后,在该波导结构上沉积低折射率顶层,以封装氧化的难熔金属区域。 在另一个实施例中,通过使用类似的工艺步骤,通过沉积高折射率材料层和可选的光学透明层的附加步骤来制造“脊”波导。