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    • 9. 发明授权
    • Electrically-driven optical proximity correction to compensate for non-optical effects
    • 电动光学接近校正补偿非光学效果
    • US08103983B2
    • 2012-01-24
    • US12269477
    • 2008-11-12
    • Kanak B. AgarwalShayak BanerjeePraveen ElakkumananLars W. Liebmann
    • Kanak B. AgarwalShayak BanerjeePraveen ElakkumananLars W. Liebmann
    • G06F17/50
    • G06F17/5081G03F1/36G06F2217/10
    • A contour of a mask design for an integrated circuit is modified to compensate for systematic variations arising from non-optical effects such as stress, well proximity, rapid thermal anneal, or spacer thickness. Electrical characteristics of a simulated integrated circuit chip fabricated using the mask design are extracted and compared to design specifications, and one or more edges of the contour are adjusted to reduce the systematic variation until the electrical characteristic is within specification. The particular electrical characteristic preferably depends on which layer is to be fabricated from the mask: on-current for a polysilicon; resistance for contact; resistance and capacitance for metal; current for active; and resistance for vias. For systematic threshold voltage variation, the contour is adjusted to match a gate length which corresponds to an on-current value according to pre-calculated curves for contour current and gate length at a nominal threshold voltage of the chip.
    • 改进了用于集成电路的掩模设计的轮廓,以补偿由非光学效应(例如应力,阱接近度,快速热退火或间隔物厚度)引起的系统变化。 提取使用掩模设计制造的模拟集成电路芯片的电气特性,并将其与设计规范进行比较,并调整轮廓的一个或多个边缘以减少系统变化,直到电气特性在规格范围内。 特定的电特性优选地取决于由掩模制成的层:多晶硅的导通电流; 接触阻力; 金属电阻和电容; 当前活跃; 和通孔阻力。 对于系统阈值电压变化,调整轮廓以根据芯片的标称阈值电压下的轮廓电流和栅极长度的预先计算的曲线来匹配对应于导通电流值的栅极长度。
    • 10. 发明申请
    • ELECTRICALLY-DRIVEN OPTICAL PROXIMITY CORRECTION TO COMPENSATE FOR NON-OPTICAL EFFECTS
    • 电动驱动光学近似校正补偿非光学效应
    • US20100122231A1
    • 2010-05-13
    • US12269477
    • 2008-11-12
    • Kanak B. AgarwalShayak BanerjeePraveen ElakkumananLars W. Liebmann
    • Kanak B. AgarwalShayak BanerjeePraveen ElakkumananLars W. Liebmann
    • G06F17/50
    • G06F17/5081G03F1/36G06F2217/10
    • A contour of a mask design for an integrated circuit is modified to compensate for systematic variations arising from non-optical effects such as stress, well proximity, rapid thermal anneal, or spacer thickness. Electrical characteristics of a simulated integrated circuit chip fabricated using the mask design are extracted and compared to design specifications, and one or more edges of the contour are adjusted to reduce the systematic variation until the electrical characteristic is within specification. The particular electrical characteristic preferably depends on which layer is to be fabricated from the mask: on-current for a polysilicon; resistance for contact; resistance and capacitance for metal; current for active; and resistance for vias. For systematic threshold voltage variation, the contour is adjusted to match a gate length which corresponds to an on-current value according to pre-calculated curves for contour current and gate length at a nominal threshold voltage of the chip.
    • 改进了用于集成电路的掩模设计的轮廓,以补偿由非光学效应(例如应力,阱接近度,快速热退火或间隔物厚度)引起的系统变化。 提取使用掩模设计制造的模拟集成电路芯片的电气特性,并将其与设计规范进行比较,并调整轮廓的一个或多个边缘以减少系统变化,直到电气特性在规格范围内。 特定的电特性优选地取决于由掩模制成的层:多晶硅的导通电流; 接触阻力; 金属电阻和电容; 当前活跃; 和通孔阻力。 对于系统阈值电压变化,调整轮廓以根据芯片的标称阈值电压下的轮廓电流和栅极长度的预先计算的曲线来匹配对应于导通电流值的栅极长度。