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1. 发明授权

US08103983B2 Electrically-driven optical proximity correction to compensate for non-optical effects 有权
标题翻译：电动光学接近校正补偿非光学效果
公开(公告)号：US08103983B2
公开(公告)日：2012-01-24
申请号：US12269477
申请日：2008-11-12
申请人： Kanak B. Agarwal , Shayak Banerjee , Praveen Elakkumanan , Lars W. Liebmann
发明人： Kanak B. Agarwal , Shayak Banerjee , Praveen Elakkumanan , Lars W. Liebmann
IPC分类号： G06F17/50
CPC分类号： G06F17/5081 , G03F1/36 , G06F2217/10
摘要： A contour of a mask design for an integrated circuit is modified to compensate for systematic variations arising from non-optical effects such as stress, well proximity, rapid thermal anneal, or spacer thickness. Electrical characteristics of a simulated integrated circuit chip fabricated using the mask design are extracted and compared to design specifications, and one or more edges of the contour are adjusted to reduce the systematic variation until the electrical characteristic is within specification. The particular electrical characteristic preferably depends on which layer is to be fabricated from the mask: on-current for a polysilicon; resistance for contact; resistance and capacitance for metal; current for active; and resistance for vias. For systematic threshold voltage variation, the contour is adjusted to match a gate length which corresponds to an on-current value according to pre-calculated curves for contour current and gate length at a nominal threshold voltage of the chip.
摘要翻译：改进了用于集成电路的掩模设计的轮廓，以补偿由非光学效应（例如应力，阱接近度，快速热退火或间隔物厚度）引起的系统变化。提取使用掩模设计制造的模拟集成电路芯片的电气特性，并将其与设计规范进行比较，并调整轮廓的一个或多个边缘以减少系统变化，直到电气特性在规格范围内。特定的电特性优选地取决于由掩模制成的层：多晶硅的导通电流; 接触阻力; 金属电阻和电容; 当前活跃; 和通孔阻力。对于系统阈值电压变化，调整轮廓以根据芯片的标称阈值电压下的轮廓电流和栅极长度的预先计算的曲线来匹配对应于导通电流值的栅极长度。

2. 发明申请

US20100122231A1 ELECTRICALLY-DRIVEN OPTICAL PROXIMITY CORRECTION TO COMPENSATE FOR NON-OPTICAL EFFECTS 有权
标题翻译：电动驱动光学近似校正补偿非光学效应
公开(公告)号：US20100122231A1
公开(公告)日：2010-05-13
申请号：US12269477
申请日：2008-11-12
申请人： Kanak B. Agarwal , Shayak Banerjee , Praveen Elakkumanan , Lars W. Liebmann
发明人： Kanak B. Agarwal , Shayak Banerjee , Praveen Elakkumanan , Lars W. Liebmann
IPC分类号： G06F17/50
CPC分类号： G06F17/5081 , G03F1/36 , G06F2217/10
摘要： A contour of a mask design for an integrated circuit is modified to compensate for systematic variations arising from non-optical effects such as stress, well proximity, rapid thermal anneal, or spacer thickness. Electrical characteristics of a simulated integrated circuit chip fabricated using the mask design are extracted and compared to design specifications, and one or more edges of the contour are adjusted to reduce the systematic variation until the electrical characteristic is within specification. The particular electrical characteristic preferably depends on which layer is to be fabricated from the mask: on-current for a polysilicon; resistance for contact; resistance and capacitance for metal; current for active; and resistance for vias. For systematic threshold voltage variation, the contour is adjusted to match a gate length which corresponds to an on-current value according to pre-calculated curves for contour current and gate length at a nominal threshold voltage of the chip.
摘要翻译：改进了用于集成电路的掩模设计的轮廓，以补偿由非光学效应（例如应力，阱接近度，快速热退火或间隔物厚度）引起的系统变化。提取使用掩模设计制造的模拟集成电路芯片的电气特性，并将其与设计规范进行比较，并调整轮廓的一个或多个边缘以减少系统变化，直到电气特性在规格范围内。特定的电特性优选地取决于由掩模制成的层：多晶硅的导通电流; 接触阻力; 金属电阻和电容; 当前活跃; 和通孔阻力。对于系统阈值电压变化，调整轮廓以根据芯片的标称阈值电压下的轮廓电流和栅极长度的预先计算的曲线来匹配对应于导通电流值的栅极长度。

3. 发明授权

US08647893B1 Method for post decomposition density balancing in integrated circuit layouts, related system and program product 有权
标题翻译：集成电路布局中后分解密度平衡的方法，相关系统和程序产品
公开(公告)号：US08647893B1
公开(公告)日：2014-02-11
申请号：US13596126
申请日：2012-08-28
申请人： Kanak B. Agarwal , Shayak Banerjee , Lars W. Liebmann
发明人： Kanak B. Agarwal , Shayak Banerjee , Lars W. Liebmann
IPC分类号： H01L21/66
CPC分类号： H01L22/12 , G05B19/41835 , G06F17/5081 , H01L2924/0002 , Y02P90/265 , H01L2924/00
摘要： Embodiments of the invention provide a method of modifying a decomposed integrated circuit (IC) layout. The method includes providing a decomposed IC layout, the decomposed IC layout including a set of colors; determining a density of each color in the decomposed IC layout, wherein each color includes a plurality of features formed by a related exposure; separating the decomposed IC layout into a set of tiles; determining a first color with a minimum density in one tile of the set of tiles and a second color with a maximum density in tile, the first color including a first set of first features and the second color including a first set of second features; and replacing the first set of second features on the tile with a second set of first features, and the first set of first features on the tile with a second set of second features.
摘要翻译：本发明的实施例提供了一种修改分解的集成电路（IC）布局的方法。该方法包括提供分解的IC布局，分解的IC布局包括一组颜色; 确定分解的IC布局中的每种颜色的浓度，其中每种颜色包括通过相关曝光形成的多个特征; 将分解的IC布局分离成一组瓦片; 确定所述瓦片组中的一个瓦片中具有最小密度的第一颜色和具有瓦片中最大密度的第二颜色，所述第一颜色包括第一组第一特征，所述第二颜色包括第一组第二特征; 以及用第二组第一特征替换所述瓦片上的所述第一组第二特征，以及所述瓦片上的所述第一组第一特征具有第二组第二特征。

4. 发明申请

US20140065728A1 METHOD FOR POST DECOMPOSITION DENSITY BALANCING IN INTEGRATED CIRCUIT LAYOUTS, RELATED SYSTEM AND PROGRAM PRODUCT 有权
标题翻译：一体化电路中分解密度平衡的方法，相关系统和程序产品
公开(公告)号：US20140065728A1
公开(公告)日：2014-03-06
申请号：US13596126
申请日：2012-08-28
申请人： Kanak B. Agarwal , Shayak Banerjee , Lars W. Liebmann
发明人： Kanak B. Agarwal , Shayak Banerjee , Lars W. Liebmann
IPC分类号： H01L21/66 , G05B19/418
CPC分类号： H01L22/12 , G05B19/41835 , G06F17/5081 , H01L2924/0002 , Y02P90/265 , H01L2924/00
摘要： Embodiments of the invention provide a method of modifying a decomposed integrated circuit (IC) layout. The method includes providing a decomposed IC layout, the decomposed IC layout including a set of colors; determining a density of each color in the decomposed IC layout, wherein each color includes a plurality of features formed by a related exposure; separating the decomposed IC layout into a set of tiles; determining a first color with a minimum density in one tile of the set of tiles and a second color with a maximum density in tile, the first color including a first set of first features and the second color including a first set of second features; and replacing the first set of second features on the tile with a second set of first features, and the first set of first features on the tile with a second set of second features.
摘要翻译：本发明的实施例提供了一种修改分解的集成电路（IC）布局的方法。该方法包括提供分解的IC布局，分解的IC布局包括一组颜色; 确定分解的IC布局中的每种颜色的浓度，其中每种颜色包括通过相关曝光形成的多个特征; 将分解的IC布局分离成一组瓦片; 确定所述瓦片组中的一个瓦片中具有最小密度的第一颜色和具有瓦片中最大密度的第二颜色，所述第一颜色包括第一组第一特征，所述第二颜色包括第一组第二特征; 以及用第二组第一特征替换所述瓦片上的所述第一组第二特征，以及所述瓦片上的所述第一组第一特征具有第二组第二特征。

5. 发明授权

US07865864B2 Electrically driven optical proximity correction 有权
标题翻译：电驱动光学邻近校正
公开(公告)号：US07865864B2
公开(公告)日：2011-01-04
申请号：US12024188
申请日：2008-02-01
申请人： Shayak Banerjee , James A. Culp , Praveen Elakkumanan , Lars W. Liebmann
发明人： Shayak Banerjee , James A. Culp , Praveen Elakkumanan , Lars W. Liebmann
IPC分类号： G06F17/50
CPC分类号： G06F17/5081 , G03F1/36
摘要： An approach that provides electrically driven optical proximity correction is described. In one embodiment, there is a method for performing an electrically driven optical proximity correction. In this embodiment, an integrated circuit mask layout representative of a plurality of layered shapes each defined by features and edges is received. A lithography simulation is run on the mask layout. An electrical characteristic is extracted from the output of the lithography simulation for each layer of the mask layout. A determination as to whether the extracted electrical characteristic is in conformance with a target electrical characteristic is made. Edges of the plurality of layered shapes in the mask layout are adjusted in response to determining that the extracted electrical characteristic for a layer in the mask layout fails to conform with the target electrical characteristic.
摘要翻译：描述了提供电驱动光学邻近校正的方法。在一个实施例中，存在执行电驱动光学邻近校正的方法。在本实施例中，接收表示由特征和边缘定义的多个分层形状的集成电路掩模布局。在掩模布局上运行光刻仿真。从掩模布局的每层的光刻模拟的输出中提取电特性。确定提取的电特性是否与目标电特性一致。响应于确定提取的掩模布局中的层的电特性不符合目标电特性，调整掩模布局中的多个分层形状的边缘。

6. 发明申请

US20090199151A1 ELECTRICALLY DRIVEN OPTICAL PROXIMITY CORRECTION 有权
标题翻译：电动驱动光学临近校正
公开(公告)号：US20090199151A1
公开(公告)日：2009-08-06
申请号：US12024188
申请日：2008-02-01
申请人： Shayak Banerjee , James A. Culp , Praveen Elakkumanan , Lars W. Liebmann
发明人： Shayak Banerjee , James A. Culp , Praveen Elakkumanan , Lars W. Liebmann
IPC分类号： G06F17/50
CPC分类号： G06F17/5081 , G03F1/36
摘要： An approach that provides electrically driven optical proximity correction is described. In one embodiment, there is a method for performing an electrically driven optical proximity correction. In this embodiment, an integrated circuit mask layout representative of a plurality of layered shapes each defined by features and edges is received. A lithography simulation is run on the mask layout. An electrical characteristic is extracted from the output of the lithography simulation for each layer of the mask layout. A determination as to whether the extracted electrical characteristic is in conformance with a target electrical characteristic is made. Edges of the plurality of layered shapes in the mask layout are adjusted in response to determining that the extracted electrical characteristic for a layer in the mask layout fails to conform with the target electrical characteristic.
摘要翻译：描述了提供电驱动光学邻近校正的方法。在一个实施例中，存在执行电驱动光学邻近校正的方法。在本实施例中，接收表示由特征和边缘定义的多个分层形状的集成电路掩模布局。在掩模布局上运行光刻仿真。从掩模布局的每层的光刻模拟的输出中提取电特性。确定提取的电特性是否与目标电特性一致。响应于确定提取的掩模布局中的层的电特性不符合目标电特性，调整掩模布局中的多个分层形状的边缘。

7. 发明申请

US20120040280A1 Simultaneous Optical Proximity Correction and Decomposition for Double Exposure Lithography 有权
标题翻译：双曝光平版印刷的同时光学接近校正和分解
公开(公告)号：US20120040280A1
公开(公告)日：2012-02-16
申请号：US12856208
申请日：2010-08-13
申请人： Kanak B. Agarwal , Shayak Banerjee
发明人： Kanak B. Agarwal , Shayak Banerjee
IPC分类号： G03F7/20 , G03B27/42
CPC分类号： G03F7/70433 , G03F1/36 , G03F7/70441 , G03F7/70466
摘要： A mechanism is provided for simultaneous optical proximity correction (OPC) and decomposition for double exposure lithography. The mechanism begins with two masks that are equal to each other and to the target. The mechanism simultaneously optimizes both masks to obtain a wafer image that both matches the target and is robust to process variations. The mechanism develops a lithographic cost function that optimizes for contour fidelity as well as robustness to variation. The mechanism minimizes the cost function using gradient descent. The gradient descent works on analytically evaluating the derivative of the cost function with respect to mask movement for both masks. It then moves the masks by a fraction of the derivative.
摘要翻译：提供了用于同时光学邻近校正（OPC）和用于双曝光光刻的分解的机制。该机制以两个彼此相等并且与目标相同的掩模开始。该机制同时优化两个掩模以获得两者匹配目标并且对于处理变化是鲁棒的晶片图像。该机制开发出光刻成本函数，优化轮廓保真度以及变化的鲁棒性。该机制使用梯度下降最小化成本函数。梯度下降用于分析评估两个掩模相对于掩模移动的成本函数的导数。然后将掩模移动一部分衍生物。

8. 发明申请

US20110150343A1 Optical Proximity Correction for Transistors Using Harmonic Mean of Gate Length 失效
标题翻译：使用栅极长度的谐波均值的晶体管的光学接近校正
公开(公告)号：US20110150343A1
公开(公告)日：2011-06-23
申请号：US12645627
申请日：2009-12-23
申请人： Kanak B. Agarwal , Shayak Banerjee
发明人： Kanak B. Agarwal , Shayak Banerjee
IPC分类号： G06K9/48
CPC分类号： G06K9/48 , G03F1/36 , G03F7/70441
摘要： A mechanism is provided for harmonic mean optical proximity correction (HMOPC). A lithographic simulator in a HMOPC mechanism generates an image of a mask shape based on a target shape on a wafer thereby forming one or more lithographic contours. A cost function evaluator module determines a geometric cost function associated with the one or more lithographic contours. An edge movement module minimizes the geometric cost function thereby forming a minimized geometric cost function. The edge movement module determines a set of edge movements for each slice in a set of slices associated with the one or more lithographic contours using the minimized geometric cost function. The edge movement module moves the edges of the mask shape using the set of edge movements for each slice in the set of slices. The HMOPC mechanism then produces a clean mask shape using the set of edge movements.
摘要翻译：提供了一种用于谐波平均光学邻近校正（HMOPC）的机制。 HMOPC机构中的光刻模拟器基于晶片上的目标形状产生掩模形状的图像，从而形成一个或多个平版轮廓。成本函数评估器模块确定与一个或多个平版轮廓相关联的几何成本函数。边缘移动模块最小化几何成本函数，从而形成最小化的几何成本函数。边缘移动模块使用最小化的几何成本函数确定与一个或多个平版印刷轮廓相关联的一组切片中的每个切片的一组边缘移动。边缘移动模块使用该组切片中的每个切片的边缘移动集来移动掩模形状的边缘。然后，HMOPC机构使用一组边缘移动产生干净的掩模形状。

9. 发明授权

US08782573B2 Solutions for retargeting integrated circuit layouts based on diffraction pattern analysis 失效
$Solutions for retargeting integrated circuit layouts based on diffraction pattern analysis$
标题翻译：基于衍射图案分析的重新定位集成电路布局的解决方案
公开(公告)号：US08782573B2
公开(公告)日：2014-07-15
申请号：US13600319
申请日：2012-08-31
申请人： Kanak B. Agarwal , Shayak Banerjee
发明人： Kanak B. Agarwal , Shayak Banerjee
IPC分类号： G06F17/50
CPC分类号： G03F7/70441
摘要： A computer-implemented method for retargeting an Integrated Circuit (IC) layout is disclosed. In one embodiment, the method includes generating a diffraction pattern for the IC layout including a set of diffraction-orders, the IC layout including a set of features defined by a set of target edges, analyzing the diffraction pattern with a merit function to estimate printability of the IC layout, monitoring a change in value of the merit function as a position of at least one of the set of target edges is adjusted across a range, and retargeting the set of target edges based on the monitoring of the merit function.
摘要翻译：公开了一种用于重新定位集成电路（IC）布局的计算机实现的方法。在一个实施例中，该方法包括生成包括一组衍射级的IC布局的衍射图案，该IC布局包括由一组目标边缘定义的一组特征，用优点函数分析衍射图案以估计可印刷性的IC布局，监视优值函数的值的变化作为所述一组目标边缘中的至少一个的位置在一个范围内被调整，并且基于所述优值函数的监视来重新定位所述一组目标边缘。

10. 发明申请

US20100333049A1 Model-Based Retargeting of Layout Patterns for Sub-Wavelength Photolithography 有权
标题翻译：用于亚波长光刻的布局图案的基于模型的重新定位
公开(公告)号：US20100333049A1
公开(公告)日：2010-12-30
申请号：US12492301
申请日：2009-06-26
申请人： Kanak B. Agarwal , Shayak Banerjee , Sani R. Nassif
发明人： Kanak B. Agarwal , Shayak Banerjee , Sani R. Nassif
IPC分类号： G06F17/50
CPC分类号： G03F1/36
摘要： Mechanism are provided for model-based retargeting of photolithographic layouts. An optical proximity correction is performed on a set of target patterns for a predetermined number of iterations until a counter value exceeds a maximum predetermined number of iterations in order to produce a set of optical proximity correction mask shapes. A set of lithographic contours is generated for each of the set of optical proximity correction mask shapes in response to the counter value exceeding the maximum predetermined number of iterations. A normalized image log slope (NILS) extraction is performed on the set of target shapes and use the set of lithographic contours to produce NILS values. The set of target patterns is modified based on the NILS values in response to the NILS values failing to be within a predetermined limit. The steps are repeated until the NILS values are within the predetermined limit.
摘要翻译：提供了用于光刻布局的基于模型的重新定位的机制。对预定次数的迭代的一组目标图案执行光学邻近校正，直到计数器值超过最大预定迭代次数为了产生一组光学邻近校正掩模形状。响应于计数器值超过最大预定迭代次数，针对所述一组光学邻近校正掩模形状中的每一个生成一组光刻轮廓。在目标形状集上执行归一化图像对数斜率（NILS）提取，并使用该组光刻轮廓来产生NILS值。基于NILS值响应于NILS值不能在预定限度内修改目标模式集合。重复这些步骤，直到NILS值在预定限度内。

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