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    • 4. 发明授权
    • Apparatus for fabricating display device
    • 用于制造显示装置的装置
    • US08869418B2
    • 2014-10-28
    • US12603890
    • 2009-10-22
    • Sang Ho Park
    • Sang Ho Park
    • F26B25/06F26B13/30F26B5/04H01L21/67G02F1/13
    • H01L21/67109G02F1/1303
    • A fabrication apparatus of a display that is adaptive for improving reliability is disclosed. The fabrication apparatus of a display device includes a chamber for vacuum heating; a hot plate disposed on the inside of the chamber; a plurality of external pipes that are disposed on the outside of the chamber, and to which vent gas for converting the atmospheric pressure of the inside of the chamber, which is in a vacuum state, into the atmospheric pressure of the outside is supplied; a gas outlet tube, which is extended from the external pipe and disposed on the inner side surface of the chamber in order to discharge the vent gas; and a gas heating part which is disposed on each of the external pipe and heats up the vent gas supplied from the outside.
    • 公开了一种适于提高可靠性的显示器的制造装置。 显示装置的制造装置包括用于真空加热的室; 设置在所述腔室内部的热板; 多个外部管道,其设置在所述室的外部,并且供给用于将处于真空状态的所述室内部的大气压转换成外部大气压的排气; 气体出口管,其从外管延伸并设置在室的内侧表面上,以便排出排气; 以及气体加热部,其设置在每个外部管上并加热从外部供应的排气。