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1. 发明申请

US20160093409A1 GUARD APERTURE TO CONTROL ION ANGULAR DISTRIBUTION IN PLASMA PROCESSING 有权
标题翻译：用于控制等离子体处理中的离子角分布的保护孔
公开(公告)号：US20160093409A1
公开(公告)日：2016-03-31
申请号：US14502794
申请日：2014-09-30
申请人： Sang Ki NAM , Ludovic GODET
发明人： Sang Ki NAM , Ludovic GODET
IPC分类号： G21F1/02 , H01J37/32 , C23C16/50
CPC分类号： H01J37/3244 , C23C16/042 , C23C16/50 , H01J37/32357 , H01J37/32422 , H01J37/32568 , H01J37/32623 , H01J37/32706
摘要： A guard aperture is described to control the ion angular distribution in plasma processing in one example a workpiece processing system has a plasma chamber, a plasma source to generate a plasma containing gas ions in the plasma chamber, the plasma forming a sheath above the workpiece, the sheath having an electric field, a workpiece holder in the chamber to apply a bias voltage to the workpiece to attract ions across the plasma sheath to be incident on the workpiece, a control aperture between the sheath and the workpiece, the aperture being positioned to modify an angular distribution of the ions that are incident on the workpiece, and a guard aperture between the sheath and the control aperture to isolate an electrical field of the control aperture from the plasma sheath.
摘要翻译：在一个示例中描述了保护孔以控制等离子体处理中的离子角分布，工件处理系统具有等离子体室，等离子体源，以产生在等离子体室中包含气体离子的等离子体，等离子体在工件上形成鞘，所述护套具有电场，所述腔室中的工件保持器用于向所述工件施加偏置电压以将离子穿过所述等离子体护套以入射到所述工件上，所述护套和所述工件之间的控制孔，所述孔定位成修改入射在工件上的离子的角度分布，以及护套和控制孔之间的保护孔，以将控制孔的电场与等离子体鞘隔开。

2. 发明授权

US09230779B2 Methods and apparatus for correcting for non-uniformity in a plasma processing system 有权
标题翻译：用于校正等离子体处理系统中的不均匀性的方法和装置
公开(公告)号：US09230779B2
公开(公告)日：2016-01-05
申请号：US13423279
申请日：2012-03-19
申请人： Sang Ki Nam , Rajinder Dhindsa
发明人： Sang Ki Nam , Rajinder Dhindsa
IPC分类号： H01J37/32 , C23C16/44 , C23C16/455 , C23C16/509 , A23G3/26 , B05B12/00 , B05B13/04 , H01L21/67
CPC分类号： H01J37/32183 , A23G3/26 , B05B12/00 , B05B13/0431 , B05B13/0452 , C23C16/4401 , C23C16/45565 , C23C16/509 , C23C16/5096 , H01J37/32009 , H01J37/32082 , H01J37/321 , H01J37/32174 , H01J37/3244 , H01J37/32532 , H01J37/32623 , H01J37/32935 , H01J37/32972 , H01J37/3299 , H01L21/67069 , H01L21/6715 , H01L21/67253
摘要： A plasma processing system having a plasma processing chamber comprising at least one of a chamber wall and a chamber liner is disclosed. The plasma processing system includes a plurality of ground straps disposed around a circumference of a chamber surface, the chamber surface being one of the chamber walls and the chamber liner of the plasma processing chamber. The plasma processing system further includes at least a first impedance device coupled to at least a first ground strap of the plurality of ground straps, wherein a second ground strap of the plurality of ground straps is not provided with a second impedance device having the same impedance value as the first impedance device.
摘要翻译：公开了一种具有等离子体处理室的等离子体处理系统，其包括室壁和腔室衬套中的至少一个。等离子体处理系统包括围绕室表面的圆周设置的多个接地带，室表面是等离子体处理室的室壁和室衬套之一。等离子处理系统还包括耦合到多个接地带的至少第一接地带的至少第一阻抗器件，其中多个接地带的第二接地带没有设置具有相同阻抗的第二阻抗器件值作为第一阻抗器件。

3. 发明授权

US08898889B2 Chuck assembly for plasma processing 有权
标题翻译：用于等离子体处理的卡盘组件
公开(公告)号：US08898889B2
公开(公告)日：2014-12-02
申请号：US13419369
申请日：2012-03-13
申请人： Sang Ki Nam , Rajinder Dhindsa , Alexei Marakhtanov
发明人： Sang Ki Nam , Rajinder Dhindsa , Alexei Marakhtanov
IPC分类号： B23P19/00 , H01J37/32 , H01L21/683
CPC分类号： H01J37/32577 , H01J37/32715 , H01L21/6831 , Y10T29/49117 , Y10T29/53178 , Y10T279/23
摘要： Systems and methods are presented for a peripheral RF feed and symmetric RF return for symmetric RF delivery. According to one embodiment, a chuck assembly for plasma processing is provided. The chuck assembly includes an electrostatic chuck having a substrate support surface on a first side, a facility plate coupled to the electrostatic chuck on a second side that is opposite the substrate support surface, a peripheral RF feed configured to deliver RF power, the peripheral RF feed having a first portion contacting a periphery of the facility plate and an RF strap coupling the peripheral RF feed to an RF source.
摘要翻译：提出了用于对称RF传输的外围RF馈送和对称RF返回的系统和方法。根据一个实施例，提供了一种用于等离子体处理的卡盘组件。卡盘组件包括：静电卡盘，其具有在第一侧上的基板支撑表面，在与基板支撑表面相对的第二侧耦合到静电卡盘的设备板，被配置为提供RF功率的外围RF馈送，外围RF 进料具有接触设备板的周边的第一部分和将外围RF进料耦合到RF源的RF带。

4. 发明申请

US20130240482A1 METHODS AND APPARATUS FOR SELECTIVELY MODIFYING RF CURRENT PATHS IN A PLASMA PROCESSING SYSTEM 有权
标题翻译：在等离子体处理系统中选择性地修改射频电流的方法和装置
公开(公告)号：US20130240482A1
公开(公告)日：2013-09-19
申请号：US13423281
申请日：2012-03-19
申请人： Sang Ki Nam , Rajinder Dhindsa , Alexei Marakhtanov
发明人： Sang Ki Nam , Rajinder Dhindsa , Alexei Marakhtanov
IPC分类号： C23F1/08 , G01N33/00
CPC分类号： H01J37/32935 , C23C16/4585 , C23C16/505 , C23C16/52 , H01J37/32082 , H01J37/32174 , H01J37/32183 , H01J37/32697 , H01J37/32715 , H01J37/3299 , H01J2237/327 , H01J2237/3343
摘要： Methods and apparatus for modifying RF current path lengths are disclosed. Apparatus includes a plasma processing system having an RF power supply and a lower electrode having a conductive portion. There is included an insulative component disposed in an RF current path between the RF power supply and the conductive portion. There are included a plurality of RF path modifiers disposed within the insulative component, the plurality of RF path modifiers being disposed at different angular positions relative to a reference angle drawn from a center of the insulative component, whereby at least a first one of the plurality of RF path modifiers is electrically connected to the conductive portion and at least a second one of the plurality of the plurality of RF path modifiers is not electrically connected to the conductive portion.
摘要翻译：公开了用于修改RF电流路径长度的方法和装置。装置包括具有RF电源的等离子体处理系统和具有导电部分的下电极。包括设置在RF电源和导电部分之间的RF电流路径中的绝缘部件。包括设置在绝缘部件内的多个RF路径修改器，多个RF路径修改器相对于从绝缘部件的中心绘制的参考角度设置在不同的角位置，由此至少第一个的RF路径修改器电连接到导电部分，并且多个RF路径修改器中的至少第二个RF电路修改器未电连接到导电部分。

5. 发明申请

US20050221909A1 Golf club with transparent grip 失效
标题翻译：高尔夫俱乐部透明抓地力
公开(公告)号：US20050221909A1
公开(公告)日：2005-10-06
申请号：US10816782
申请日：2004-04-02
申请人： Sang-Ki Nam
发明人： Sang-Ki Nam
IPC分类号： A63B53/14 , G09F23/00
CPC分类号： A63B53/14 , A63B60/14 , A63B60/54 , G09F23/00 , G09F23/0066
摘要： The present invention relates to a transparent grip having golf club, wherein the prints for public information like photos or pictures are incorporated in the grip and the content of the incorporated prints is observable from the outside. Because the grip(G) is composed of a sheet layer(20) of an elastomeric material to increase the gripping and hitting senses and to alleviate the shock by covering the entire or a part of circumference of shaft(10), a coating film layer(30,30′) to protect the sheet layer(20) and a transparent shell(40) as an integrally molded body, which is transparent enough to make the sheet layer(20) visible from the outside and which is formed with a cavity(400) to receive a shaft(10), the sheet layer(20) can keep the record of, for example, the address or name of the owner without the worry of blotting or staining. The sheet layer(20) made of an elastomeric material, the transparent thin coating film layer(30,30′) formed with a number of fine projections and the transparent shell(40) made of special material, in combination, bring forth the effect of being soft and not slippery and giving the gripping assurance and snug feeling. Particularly, the invention has the advantage that individuals can incorporate the photographs, pictures or particular matters for various events or commemorations into the grips with ease and at reduced cost to make this invention very practical.
摘要翻译：本发明涉及一种具有高尔夫球杆的透明手柄，其中用于诸如照片或图片的公开信息的照片被并入抓地力，并且从外部观察到所包含的打印物的内容。由于手柄（G）由弹性体材料的片层（20）组成，以增加夹持和击打感觉，并且通过覆盖轴（10）的圆周的整个或一部分来减轻冲击，涂膜层（30,30'）以保护片层（20）和作为整体模制体的透明壳体（40），其是足够透明的，以使得片材层（20）从外部可见并且形成有空腔（400）以接收轴（10），所述片层（20）可以保持例如所有者的地址或名称的记录，而不用印迹或染色。由弹性体材料制成的片层（20），形成有多个细小突起的透明薄膜层（30,30'）和由特殊材料制成的透明壳体（40）组合起来产生效果柔软而不滑，给人的保持和贴心的感觉。特别地，本发明的优点在于，个人可以将各种事件或纪念品的照片，图片或特定事项容易地并且以降低的成本并入手柄中，以使本发明非常实用。

6. 发明申请

US20130240147A1 METHODS AND APPARATUS FOR SELECTIVELY MODULATING AZIMUTHAL NON-UNIFORMITY IN A PLASMA PROCESSING SYSTEM 审中-公开
标题翻译：在等离子体处理系统中选择性地调整AZIMUTHAL非均匀性的方法和装置
公开(公告)号：US20130240147A1
公开(公告)日：2013-09-19
申请号：US13423284
申请日：2012-03-19
申请人： Sang Ki Nam , Rajinder Dhindsa , Alexei Marakhtanov
发明人： Sang Ki Nam , Rajinder Dhindsa , Alexei Marakhtanov
IPC分类号： H01L21/3065
CPC分类号： H01J37/32082 , H01J37/32669
摘要： Methods and apparatus for modulating azimuthal non-uniformity in a plasma processing chamber are disclosed. Apparatus includes a plasma processing system having a plasma processing chamber. There is included an RF power supply and a lower electrode configured to receive RF signal from the power supply. There is also included magnet ring disposed off-center relative to a center of the lower electrode, the magnet ring further disposed in one of a first position and a second position, the first position being below the lower electrode, the second position being around an outer periphery of the lower electrode.
摘要翻译：公开了用于调制等离子体处理室中的方位不均匀性的方法和装置。装置包括具有等离子体处理室的等离子体处理系统。包括RF电源和配置成从电源接收RF信号的下电极。还包括相对于下电极的中心偏心设置的磁环，磁环进一步设置在第一位置和第二位置中的一个位置，第一位置在下电极下方，第二位置围绕下电极下电极的外周。

7. 发明申请

US20130127124A1 PERIPHERAL RF FEED AND SYMMETRIC RF RETURN WITH RF STRAP INPUT 有权
标题翻译：外围射频馈线和对射RF返回与RF STRAP输入
公开(公告)号：US20130127124A1
公开(公告)日：2013-05-23
申请号：US13419369
申请日：2012-03-13
申请人： Sang Ki Nam , Rajinder Dhindsa , Alexei Marakhtanov
发明人： Sang Ki Nam , Rajinder Dhindsa , Alexei Marakhtanov
IPC分类号： B23B31/28 , H05K13/00
CPC分类号： H01J37/32577 , H01J37/32715 , H01L21/6831 , Y10T29/49117 , Y10T29/53178 , Y10T279/23
摘要： Systems and methods are presented for a peripheral RF feed and symmetric RF return for symmetric RF delivery. According to one embodiment, a chuck assembly for plasma processing is provided. The chuck assembly includes an electrostatic chuck having a substrate support surface on a first side, a facility plate coupled to the electrostatic chuck on a second side that is opposite the substrate support surface, a peripheral RF feed configured to deliver RF power, the peripheral RF feed having a first portion contacting a periphery of the facility plate and an RF strap coupling the peripheral RF feed to an RF source.
摘要翻译：提出了用于对称RF传输的外围RF馈送和对称RF返回的系统和方法。根据一个实施例，提供了一种用于等离子体处理的卡盘组件。卡盘组件包括：静电卡盘，其具有在第一侧上的基板支撑表面，在与基板支撑表面相对的第二侧耦合到静电卡盘的设备板，被配置为提供RF功率的外围RF馈送，外围RF 进料具有接触设备板的周边的第一部分和将外围RF进料耦合到RF源的RF带。

8. 发明申请

US20130126476A1 DUAL ZONE TEMPERATURE CONTROL OF UPPER ELECTRODES 有权
标题翻译：上电极双区温度控制
公开(公告)号：US20130126476A1
公开(公告)日：2013-05-23
申请号：US13420949
申请日：2012-03-15
申请人： Alexei Marakhtanov , Rajinder Dhindsa , Ryan Bise , Lumin Li , Sang Ki Nam , Jim Rogers , Eric Hudson , Gerardo Delgadino , Andrew D. Bailey, III , Mike Kellogg , Anthony de la LIera
发明人： Alexei Marakhtanov , Rajinder Dhindsa , Ryan Bise , Lumin Li , Sang Ki Nam , Jim Rogers , Eric Hudson , Gerardo Delgadino , Andrew D. Bailey, III , Mike Kellogg , Anthony de la LIera
IPC分类号： C23F1/00 , C23F1/08
CPC分类号： H01J37/32642 , H01J37/3244 , H01J37/32541 , H01J37/32724 , H01L21/67109
摘要： A system and method of plasma processing includes a plasma chamber including a substrate support and an upper electrode opposite the substrate support, the upper electrode having a plurality of concentric temperature control zones and a controller coupled to the plasma chamber.
摘要翻译：等离子体处理的系统和方法包括等离子体室，其包括基板支撑件和与基板支撑件相对的上电极，上电极具有多个同心温度控制区域和耦合到等离子体室的控制器。

9. 发明申请

US20080102974A1 GOLF CLUB GRIP 审中-公开
标题翻译：高尔夫俱乐部
公开(公告)号：US20080102974A1
公开(公告)日：2008-05-01
申请号：US11558743
申请日：2006-11-10
申请人： Sang Ki Nam , Min-Jung Nam , Seoug-Woo Nam , Min-Woo Nam
发明人： Sang Ki Nam , Min-Jung Nam , Seoug-Woo Nam , Min-Woo Nam
IPC分类号： A63B53/14
CPC分类号： A63B53/14 , A63B60/00 , A63B2071/0694 , G09F23/00 , G09F23/0066
摘要： The present invention relates to the golf club grip that is instilled with a publicity use of printing layer such as pictures or diagram, letters and so on inside of grip so that the intended publicity can be easily seen externally, and also prevents the damage of printing layer as well as the contents of publicity that is printed on the printing layer can be seen more clearly externally. The present invention is composed of the body of grip (10) that is equipped with air well (11) which is inserted to the upper part of shaft (S) and glued; printing layer (20) that is glued to the exterior of above body of grip (10) elastically so that it displays the contents of publicity that is self elastic; transparent layer (30) that is formed to wrap around the exterior of above printing layer (20) and the upper part of body of grip (10) with a hole (31) that corresponds to air well (11) of body of grip (10) so that the contents of publicity on the printing layer (20) can be easily identified.
摘要翻译：本发明涉及一种高尔夫球杆握把，其中，在把手内部注入诸如画面或图，字母等印刷层的宣传用途，从而可以容易地从外部看到预期的宣传，并且还防止打印损坏打印在印刷层上的图层以及宣传的内容可以从外部看得更清楚。本发明由装有空气井（11）的把手（10）主体构成，其插入轴（S）的上部并胶合; 打印层（20），其弹性地胶合到上述握把（10）的外部，使得其显示具有自弹性的宣传内容; 透明层（30），其被形成为围绕上述印刷层（20）的外部和具有对应于手柄的空气孔（11）的孔（31）的把手（10）的上部包裹 10），可以容易地识别印刷层（20）上的宣传内容。

10. 发明授权

US07025690B2 Golf club with transparent grip 失效
标题翻译：高尔夫俱乐部透明抓地力
公开(公告)号：US07025690B2
公开(公告)日：2006-04-11
申请号：US10816782
申请日：2004-04-02
申请人： Sang-Ki Nam
发明人： Sang-Ki Nam
IPC分类号： A63B53/14
CPC分类号： A63B53/14 , A63B60/14 , A63B60/54 , G09F23/00 , G09F23/0066
摘要： A transparent grip of a golf club, wherein prints for public information like photos or pictures are incorporated in the grip and the content of the incorporated prints is observable from the outside. The grip is composed of a sheet layer of an elastomeric material to increase gripping and hitting senses and to alleviate shock by covering the entire or a part of the circumference of the shaft of the golf club, a coating film layer to protect the sheet layer and a transparent shell as an integrally molded body, which is transparent enough to make the sheet layer visible from the outside and which is formed with a cavity to receive the shaft. The sheet layer can keep the record of, for example, the address or name of the owner without the worry of blotting or staining. The sheet layer, made of an elastomeric material, the transparent thin coating film layer formed with a number of fine projections and the transparent shell made of special material, in combination, bring forth the effect of being soft and not slippery and provide assurance and a snug feeling when gripped. Particularly, the invention has the advantage that individuals can incorporate photographs, pictures or particular matters for various events or commemorations into the grips with ease and at reduced cost making this invention very practical.
摘要翻译：高尔夫球杆的透明抓地力，其中诸如照片或图片的公开信息的打印物被并入抓握中，并且从外部观察到所包含的打印物的内容。手柄由弹性体材料的片层组成，以增加夹持和击打感觉，并通过覆盖高尔夫球杆的轴的圆周的整个或一部分来减轻冲击，涂膜层以保护片层和作为整体成型体的透明壳体，其透明度足以使片材层从外部可见，并且形成有用于容纳轴的空腔。片层可以保持例如所有者的地址或名称的记录，而不用担心印迹或染色。由弹性体材料制成的片层，形成有多个细小突起的透明薄膜层和由特殊材料制成的透明壳组合起来，产生柔软而不光滑的效果并提供保证和握紧时感觉舒适。特别地，本发明的优点在于，个人可以将各种事件或纪念品的照片，图片或特定事项容易地并且以较低的成本结合到手柄中，从而使本发明非常实用。

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