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    • 8. 发明授权
    • Improved method of making a photoconductive member
    • 改进的制造感光体的方法
    • US4715927A
    • 1987-12-29
    • US941244
    • 1986-11-21
    • Annette G. JohncockStephen J. Hudgens
    • Annette G. JohncockStephen J. Hudgens
    • C23C16/511H01L31/09H01L31/20C30B25/02
    • H01L31/095C23C16/511H01L31/202Y02E10/50Y02P70/521
    • A process for making photoconductive semiconductor alloys and members with high reaction gas conversion efficiencies and at high deposition rates utilizes microwave energy to form a deposition plasma. The high deposition rates and high gas conversion efficiencies allow photoconductive members to be formed of amorphous semiconductor alloys at commercially viable rates.The process includes coupling microwave energy into a substantially enclosed reaction vessel containing a substrate and depositing amorphous photoconductive alloys onto the substrate from a reaction gas introduced into the vessel. The photoconductive member includes a bottom blocking layer, a photoconductive layer and a top blocking layer. The photoconductive member can be formed in a negative or positive charge type configuration. The members can include a top blocking enhancement layer and/or an improved infrared photoresponsive layer.
    • 用于制造光导半导体合金和具有高反应气体转化效率和高沉积速率的部件的方法利用微波能量来形成沉积等离子体。 高沉积速率和高气体转换效率使得光电导元件以商业上可行的速率由非晶半导体合金形成。 该方法包括将微波能量耦合到包含基底的基本封闭的反应容器中,并将非晶态光导电合金从引入容器的反应气体沉积到基底上。 感光体包括底部阻挡层,光电导层和顶部阻挡层。 感光体可以形成为负电荷型或正电荷型。 构件可以包括顶部阻挡增强层和/或改进的红外光响应层。