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    • 1. 发明授权
    • Patterning process
    • 图案化过程
    • US08492078B2
    • 2013-07-23
    • US13010318
    • 2011-01-20
    • Jun HatakeyamaTakeshi NagataKoji Hasegawa
    • Jun HatakeyamaTakeshi NagataKoji Hasegawa
    • G03F7/26
    • G03F7/0397G03F7/0046G03F7/11G03F7/2041G03F7/325
    • A pattern is formed by coating a resist composition comprising a polymer comprising recurring units having an optionally acid labile group-substituted naphthol group, an acid generator, and an organic solvent onto a substrate, baking to form a resist film, exposing the resist film to high-energy radiation, baking, and developing the exposed film with an organic solvent developer to form a negative pattern wherein the unexposed region of film is dissolved and the exposed region of film is not dissolved. In the process of image formation via positive/negative reversal by organic solvent development, the resist film has a high dissolution contrast and controlled acid diffusion. By subjecting the resist film to exposure through a mask having a lattice-like pattern and organic solvent development, a fine hole pattern can be formed at a high precision of dimensional control.
    • 通过将包含含有任选的酸不稳定基取代的萘酚基的重复单元,酸产生剂和有机溶剂的聚合物的抗蚀剂组合物涂布在基材上,烘烤以形成抗蚀剂膜,将抗蚀剂膜暴露于 高能辐射,烘烤,并用有机溶剂显影剂显影曝光的薄膜以形成其中未暴露的薄膜区域溶解并且曝光区域不溶解的负图案。 在通过有机溶剂显影的正/负反转的图像形成过程中,抗蚀剂膜具有高的溶解对比度和受控的酸扩散。 通过使抗蚀剂膜通过具有格子状图案和有机溶剂显影的掩模进行曝光,可以以高精度的尺寸控制形成细孔图案。
    • 4. 发明申请
    • Magnetic recording medium
    • 磁记录介质
    • US20060187589A1
    • 2006-08-24
    • US11358123
    • 2006-02-22
    • Takeshi HarasawaNaoto AbeTakeshi Nagata
    • Takeshi HarasawaNaoto AbeTakeshi Nagata
    • G11B5/33
    • G11B5/70G11B5/842
    • Provided is a magnetic recording medium capable of achieving high reproduction output in a short wavelength region. The magnetic recording medium comprises a nonmagnetic layer comprising a nonmagnetic powder and a binder and a magnetic layer comprising a ferromagnetic powder and a binder in this order on a nonmagnetic support. The magnetic layer has a squareness ranging from 0.6 to 1.0 in a perpendicular direction, and the magnetic recording medium is employed for recording a magnetic signal on the medium in a longitudinal direction at a linear recording density of equal to or greater than 300 Kbpi using a recording head with a gap length of equal to or less than 0.3 micrometer, and reproducing the magnetic signal using a magnetoresistive head with a shield spacing of equal to or less than 0.2 micrometer.
    • 提供了能够在短波长区域中实现高再现输出的磁记录介质。 该磁记录介质包括非磁性层,其包含非磁性粉末和粘合剂,以及磁性层,其包含铁磁粉末和粘合剂,其顺序为非磁性载体。 磁性层在垂直方向上具有0.6至1.0的正方形,并且磁记录介质用于以等于或大于300Kbpi的线性记录密度在纵向方向上在介质上记录磁信号,使用 记录头的间隙长度等于或小于0.3微米,并且使用屏蔽间距等于或小于0.2微米的磁阻头再现磁信号。