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    • 1. 发明授权
    • Semiconductor device supplying charging current to element to be charged
    • 为要充电的元件提供充电电流的半导体器件
    • US08674471B2
    • 2014-03-18
    • US13596209
    • 2012-08-28
    • Tomohide Terashima
    • Tomohide Terashima
    • H01L21/70H01L21/762
    • H02J7/022H01L27/0629H01L27/0635H03K17/6871H03K17/6872H03K17/6874H03K19/017509Y02B40/90
    • A semiconductor device supplying a charging current to a charging-target element includes: a semiconductor layer of a first conductivity type; a first semiconductor region of a second conductivity type formed on a main surface of the semiconductor layer and having a first node coupled to a first electrode of the charging-target element and a second node coupled to a power supply potential node supplied with a power supply voltage; a second semiconductor region of the first conductivity type formed in a surface of the first semiconductor region at a distance from the semiconductor layer and having a third node coupled to the power supply potential node; and a charge carrier drift restriction portion restricting drift of charge carrier from the third node to the semiconductor layer.
    • 向充电目标元件提供充电电流的半导体器件包括:第一导电类型的半导体层; 第二导电类型的第一半导体区域形成在半导体层的主表面上并且具有耦合到充电目标元件的第一电极的第一节点和耦合到被提供有电源的电源电位节点的第二节点 电压; 第一导电类型的第二半导体区域形成在距离半导体层一定距离的第一半导体区域的表面中,并且具有耦合到电源电位节点的第三节点; 以及电荷载流子漂移限制部分,其限制载流子从第三节点到半导体层的漂移。
    • 3. 发明授权
    • Semiconductor device provided with floating electrode
    • 具有浮置电极的半导体器件
    • US07755168B2
    • 2010-07-13
    • US11738039
    • 2007-04-20
    • Tomohide TerashimaShiori Uota
    • Tomohide TerashimaShiori Uota
    • H01L29/70
    • H01L29/735H01L29/0692H01L29/0821
    • A semiconductor device has a first conductivity-type first semiconductor region, a second conductivity-type second semiconductor region and a second conductivity-type third semiconductor region both located on or above the first semiconductor region, a second conductivity-type fourth semiconductor region between the second semiconductor region and the third semiconductor region, and a first conductivity-type fifth semiconductor region between the third semiconductor region and the fourth semiconductor region. The fourth semiconductor region and the fifth semiconductor region are electrically connected by a conductive member. A distance between the fourth semiconductor region and the third semiconductor region is larger than a width of the fourth semiconductor region.
    • 半导体器件具有位于第一半导体区域上方或上方的第一导电型第一半导体区域,第二导电型第二半导体区域和第二导电型第三半导体区域,位于第一半导体区域之间的第二导电型第四半导体区域 第二半导体区域和第三半导体区域,以及在第三半导体区域和第四半导体区域之间的第一导电类型的第五半导体区域。 第四半导体区域和第五半导体区域通过导电构件电连接。 第四半导体区域和第三半导体区域之间的距离大于第四半导体区域的宽度。
    • 9. 发明授权
    • VDMOS semiconductor device
    • VDMOS半导体器件
    • US5541430A
    • 1996-07-30
    • US54138
    • 1993-04-30
    • Tomohide Terashima
    • Tomohide Terashima
    • H01L21/331H01L21/332H01L21/336H01L29/06H01L29/423H01L29/739H01L29/745H01L29/749H01L29/78H01L29/76H01L29/74H01L29/94H01L31/062
    • H01L29/4236H01L29/66348H01L29/66378H01L29/66787H01L29/7455H01L29/749H01L29/7802H01L29/7813H01L29/0696H01L29/4238
    • In a semiconductor device having a low ON resistance, an n.sup.- -type epitaxial layer (1) is formed on an upper surface of an n.sup.+ -type substrate (8) and p-type diffusion regions (2) are selectively formed on its upper surface, while n-type diffusion regions (3) are further formed on upper surfaces thereof. A gate electrode (5) wrapped up in an oxide film (4) is provided on the upper surface of the n.sup.- -type epitaxial layer (1) and above portions of the p-type diffusion regions (2) held between the n.sup.- -type epitaxial layer (1) and the n.sup.+ -type diffusion regions (3). Grooves (9) are formed in the upper surface of the n.sup.- -type epitaxial layer (1) located under a gate electrode (5) to extend perpendicularly to junction planes between the n.sup.- -type epitaxial layer (1) and the p-type diffusion regions (2). While an ON resistance includes an accumulation resistance (Ra) and a JFET resistance (Rj), these resistances can be reduced since a gate width is increased due to formation of the grooves (9) and a current readily flows downwardly along the grooves (9).
    • 在具有低导通电阻的半导体器件中,在n +型衬底(8)的上表面上形成n型外延层(1),并且在其上部选择性地形成p型扩散区域(2) 而在其上表面上进一步形成n型扩散区(3)。 在n型外延层(1)的上表面和保持在n型外延层(1)的上方的p型扩散区域(2)的上方设置包围氧化膜(4)的栅电极(5) 型外延层(1)和n +型扩散区域(3)。 在位于栅电极(5)下方的n型外延层(1)的上表面中形成沟槽(9),以垂直于n型外延层(1)和p-型外延层 型扩散区域(2)。 虽然导通电阻包括累积电阻(Ra)和JFET电阻(Rj),但是由于形成沟槽(9)而导致栅极宽度增加,并且电流容易沿着沟槽(9)向下流动 )。
    • 10. 发明授权
    • Method of manufacturing vertical DMOS transistor with high
off-breakdown-voltage and low on-resistance
    • 制造具有高截止击穿电压和低导通电阻的垂直DMOS晶体管的方法
    • US5344789A
    • 1994-09-06
    • US155801
    • 1993-11-23
    • Tomohide Terashima
    • Tomohide Terashima
    • H01L21/18H01L21/336H01L29/06H01L29/423H01L29/78H01L21/44
    • H01L29/66734H01L29/0657H01L29/66712H01L29/7813H01L21/187H01L29/0638H01L29/4236Y10S148/05Y10S438/977
    • A semiconductor device includes an N.sup.- type semiconductor layer (2). The N.sup.- type semiconductor layer (2) includes a triangular pole trench (10), an apex portion thereof contains a gate electrode (5). The trench (10) penetrates the semiconductor layer (2) and a P type well region (3) and projects into an N.sup.+ type source region (4). A source electrode (7) is disposed so as to be insulated from the semiconductor layer (2) by an oxide film (9) and in contact with the well region (3) and the source region (4). A drain electrode (8) is connected to the semiconductor layer (2) through an N.sup.+ type semiconductor substrate (1). With higher potential at the gate electrode (5) than at the source electrode (7), the well region (3) is partially inverted into N type near the trench (10). Thus, the semiconductor device is turned on due to a channel created associated to the conductivity type inversion. Most of current flow allowed in the semiconductor layer (2) by the channel flows near the trench (10).Hence, even when process patterns are refined, electrode-to-electrode insulation remains undegraded in the semiconductor device, attaining low on-resistance and nigh off-breakdown voltage.
    • 半导体器件包括N型半导体层(2)。 N型半导体层(2)包括三角形极沟(10),其顶部包含栅电极(5)。 沟槽(10)穿透半导体层(2)和P型阱区(3)并投入到N +型源极区(4)中。 源电极(7)被设置为与氧化膜(9)与半导体层(2)绝缘并与阱区(3)和源极区(4)接触。 漏电极(8)通过N +型半导体衬底(1)与半导体层(2)连接。 在栅电极(5)处的电位高于源电极(7)时,在沟槽(10)附近,阱区域(3)被部分地反转成N型。 因此,由于与导电类型反转相关联的通道而导致半导体器件导通。 通过沟槽在半导体层(2)中允许的大部分电流流过在沟槽(10)附近流动。 因此,即使在精加工图形的情况下,半导体装置中的电极对电极的绝缘性仍未劣化,因此导通电阻和近击穿电压低。