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    • 4. 发明申请
    • INTEGRATED ELECTROSTATIC DISCHARGE (ESD) CLAMPING
    • 集成静电放电(ESD)钳位
    • US20160099240A1
    • 2016-04-07
    • US14966688
    • 2015-12-11
    • Weize ChenPatrice M. Parris
    • Weize ChenPatrice M. Parris
    • H01L27/02H01L27/07H01L21/768H01L21/762H01L29/66H01L29/06
    • H01L27/0259H01L21/76224H01L21/76895H01L27/027H01L27/0711H01L27/0722H01L29/0623H01L29/0649H01L29/0653H01L29/1083H01L29/1087H01L29/6625H01L29/66659H01L29/66681H01L29/78H01L29/7835
    • A method of fabricating a laterally diffused metal-oxide-semiconductor (LDMOS) transistor device having a bipolar transistor for electrostatic discharge (ESD) protection includes doping a substrate to form a body region of the LDMOS transistor device in the substrate, the body region having a first conductivity type, forming a doped isolating region of the LDMOS transistor device in the substrate, the doped isolating region having a second conductivity type and surrounding a device area of the LDMOS transistor device in which the body region is disposed, forming a base contact region of the bipolar transistor, the base contact region being disposed within the body region and having the first conductivity type, and doping the substrate to form an isolation contact region for the doped isolating region that defines a collector region of the bipolar transistor, to form source and drain regions of the LDMOS transistor device in the substrate, and to form an emitter region of the bipolar transistor within the body region.
    • 制造具有用于静电放电(ESD)保护的双极型晶体管的横向扩散的金属氧化物半导体(LDMOS)晶体管器件的方法包括:掺杂衬底以在衬底中形成LDMOS晶体管器件的体区,所述体区具有 第一导电类型,在衬底中形成LDMOS晶体管器件的掺杂隔离区域,掺杂隔离区域具有第二导电类型并围绕其中设置体区的LDMOS晶体管器件的器件区域,形成基极接触 所述基极接触区域设置在所述主体区域内并且具有所述第一导电类型,并且掺杂所述衬底以形成用于限定所述双极晶体管的集电极区域的掺杂隔离区域的隔离接触区域,以形成所述双极晶体管的集电极区域 在衬底中的LDMOS晶体管器件的源极和漏极区域,并且形成双极性tr的发射极区域 体内区域内的电阻。