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    • 10. 发明授权
    • Probe, method of its manufacturing, and probe-type memory
    • 探针,其制造方法和探针型记忆
    • US06208789B1
    • 2001-03-27
    • US09463184
    • 2000-01-21
    • Yasushi Ogimoto
    • Yasushi Ogimoto
    • G02B602
    • G01Q60/22G02B6/241
    • A probe comprising a core (2) having a first end part (2a) on which light from a light source is incident and a second end part (2b) with a diameter smaller than a wavelength of the incident light and a cladding (1) covering the core (2). A thin nitride film (3) made of at least one nitride selected from titanium nitride, zirconium nitride, and hafnium nitride is formed on a surface of the core (2) on the side of the second end part (2b) except the first and second end parts (2a) and (2b). The thin nitride film (3) has a high reflectivity for light with a wavelength of longer than 600 nm and the incident light does not leak out of the probe and reaches the tip of the probe, so that the intensity of the light emitted from the tip of the probe is improved. When the probe is used in a probe-type memory, high density recording with an excellent signal quality (S/N) can be realized.
    • 一种探针,包括具有第一端部(2a)的芯体(2),来自光源的光入射到所述第一端部(2a),以及直径小于入射光的波长的第二端部(2b)和包层(1) 覆盖核心(2)。 在第二端部(2b)的除了第一和第二端部的一侧的芯(2)的表面上形成由氮化钛,氮化锆和氮化铪中的至少一种氮化物制成的薄氮化物膜(3) 第二端部(2a)和(2b)。 薄氮化物膜(3)对于波长超过600nm的光具有高反射率,并且入射光不会从探针中泄漏并到达探针的尖端,使得从 提高探头尖端。 当探针用于探针型存储器时,可以实现具有优异信号质量(S / N)的高密度记录。