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1. 发明授权

US08920888B2 Plasma process, film deposition method and system using rotary chuck 有权
标题翻译：等离子工艺，成膜方法和使用旋转卡盘的系统
公开(公告)号：US08920888B2
公开(公告)日：2014-12-30
申请号：US13439609
申请日：2012-04-04
申请人： Yu-Lung Yang , Ying Xiao , Chin-Hsiang Lin
发明人： Yu-Lung Yang , Ying Xiao , Chin-Hsiang Lin
IPC分类号： H05H1/24 , C23C16/00 , C23C16/52
CPC分类号： C23C16/45523 , C23C16/4584 , C23C16/46 , C23C16/50 , C23C16/52 , H01J37/32082 , H01J37/32733 , H01J37/3299
摘要： A chuck and a wafer supported thereon are rotated during a plasma process or a film deposition process to reduce thickness non-uniformity of a film processed or deposited on the wafer.
摘要翻译：在等离子体处理或薄膜沉积工艺期间，支撑在其上的卡盘和晶片旋转以减小加工或沉积在晶片上的膜的厚度不均匀性。

2. 发明申请

US20130245978A1 SYSTEMS AND METHODS OF CONTROLLING SEMICONDUCTOR WAFER FABRICATION PROCESSES 有权
标题翻译：控制半导体波形制造工艺的系统和方法
公开(公告)号：US20130245978A1
公开(公告)日：2013-09-19
申请号：US13419952
申请日：2012-03-14
申请人： Shih-Hung CHEN , Ying Xiao , Chin-Hsiang Lin
发明人： Shih-Hung CHEN , Ying Xiao , Chin-Hsiang Lin
IPC分类号： G06F15/00 , G01B11/26
CPC分类号： H01L21/67259 , H01L21/681 , H01L21/68764
摘要： A system and method of controlling a semiconductor wafer fabrication process. The method includes positioning a semiconductor wafer on a wafer support assembly in a wafer processing module. A signal is transmitted from a signal emitter positioned at a predetermined transmission angle relative to an axis normal to the wafer support assembly to check leveling of the wafer in the module, so that the signal is reflected from the wafer. The embodiment includes monitoring for the reflected signal at a predetermined reflectance angle relative to the axis normal to the wafer support assembly at a signal receiver. A warning indication is generated if the reflected signal is not received at the signal receiver.
摘要翻译：一种控制半导体晶片制造工艺的系统和方法。该方法包括将半导体晶片定位在晶片处理模块中的晶片支撑组件上。信号从相对于垂直于晶片支撑组件的轴线以预定的传输角定位的信号发射器传输，以检查模块中晶片的调平，使得信号从晶片反射。该实施例包括在信号接收器处相对于垂直于晶片支撑组件的轴以预定的反射角监视反射信号。如果在信号接收器处未接收到反射信号，则会产生警告指示。

3. 发明申请

US20130072013A1 Etching Method and Apparatus 有权
标题翻译：蚀刻方法和设备
公开(公告)号：US20130072013A1
公开(公告)日：2013-03-21
申请号：US13234975
申请日：2011-09-16
申请人： Shih-Hung Chen , Chien-An Chen , Ying Xiao , Ying Zhang
发明人： Shih-Hung Chen , Chien-An Chen , Ying Xiao , Ying Zhang
IPC分类号： H01L21/768 , C23F1/08 , H01L21/3065
CPC分类号： H01L21/31138 , H01L21/31116 , H01L21/76802
摘要： An etching method comprises etching an oxide layer with a first dc bias of a plasma chamber, removing a photoresist layer with a second dc bias of the plasma chamber and etching through a liner film with a third dc bias of the plasma chamber. In order to reduce the copper deposition on the wall of the plasma chamber, the third dc bias is set to be less than the first and second dc bias.
摘要翻译：蚀刻方法包括用等离子体室的第一直流偏压蚀刻氧化物层，用等离子体室的第二直流偏压去除光致抗蚀剂层，并通过具有等离子体室的第三直流偏压的衬垫膜进行蚀刻。为了减少等离子体室壁上的铜沉积，将第三直流偏压设定为小于第一和第二直流偏压。

4. 发明申请

US20120155572A1 High efficiency, remotely reconfigurable remote radio head unit system and method for wireless communications 有权
标题翻译：高效，远程可重构的远程无线电头单元系统和无线通信方法
公开(公告)号：US20120155572A1
公开(公告)日：2012-06-21
申请号：US12928943
申请日：2010-12-21
申请人： Wan Jong Kim , Kyoung Joon Cho , Shawn Patrick Stapleton , Ying Xiao
发明人： Wan Jong Kim , Kyoung Joon Cho , Shawn Patrick Stapleton , Ying Xiao
IPC分类号： H04L25/49
CPC分类号： H04B1/0475 , H03F1/3247 , H03F3/24 , H03F3/68 , H03F2201/3224 , H04B1/0064 , H04W24/02 , H04W84/047 , H04W88/08 , H04W88/085 , Y02D70/00 , Y02D70/122 , Y02D70/1242 , Y02D70/1262 , Y02D70/142 , Y02D70/146 , Y02D70/40
摘要： A remote radio head unit (RRU) system for achieving high efficiency and high linearity in wideband communication systems is disclosed. The present invention is based on the method of adaptive digital predistortion to linearize a power amplifier inside the RRU. The power amplifier characteristics such as variation of linearity and asymmetric distortion of the amplifier output signal are monitored by a wideband feedback path and controlled by the adaptation algorithm in a digital module. Therefore, embodiments of the present invention can compensate for the nonlinearities as well as memory effects of the power amplifier systems and also improve performance, in terms of power added efficiency, adjacent channel leakage ratio and peak-to-average power ratio. The present disclosure enables a power amplifier system to be field reconfigurable and support multi-modulation schemes (modulation agnostic), multi-carriers, multi-frequency bands and multi-channels. As a result, the remote radio head system is particularly suitable for wireless transmission systems, such as base-stations, repeaters, and indoor signal coverage systems.
摘要翻译：公开了一种用于在宽带通信系统中实现高效率和高线性度的远程无线电头单元（RRU）系统。本发明基于对RRU内的功率放大器进行线性化的自适应数字预失真的方法。诸如放大器输出信号的线性度和非对称失真的功率放大器特性由宽带反馈路径监测并由数字模块中的自适应算法控制。因此，本发明的实施例可以补偿功率放大器系统的非线性以及存储器效应，并且在功率附加效率，相邻信道泄漏比和峰值与平均功率比方面也提高性能。本公开使得功率放大器系统能够是现场可重构的并且支持多调制方案（不可调制调制），多载波，多频带和多信道。因此，远程无线电头系统特别适用于诸如基站，中继器和室内信号覆盖系统之类的无线传输系统。

5. 发明申请

US20110029147A1 Multi-interval dispatch method for enabling dispatchers in power grid control centers to manage changes 有权
标题翻译：多间隔调度方式，使电网控制中心的调度员能够管理变更
公开(公告)号：US20110029147A1
公开(公告)日：2011-02-03
申请号：US12830019
申请日：2010-07-02
申请人： David Sun , Kwok Cheung , Xing Wang , But-Chung Chiu , Ying Xiao
发明人： David Sun , Kwok Cheung , Xing Wang , But-Chung Chiu , Ying Xiao
IPC分类号： G06F1/26
CPC分类号： H02J3/00 , G05B15/02 , G06Q10/06 , G06Q50/06 , Y04S10/54
摘要： A method is provided that enables dispatchers in power grid control centers to manage changes by applying multi-interval dispatch. A multi-stage resource scheduling engine and a comprehensive operating plan are used. Multiple system parameter scenarios are coordinated.
摘要翻译：提供了一种方法，使得电网控制中心的调度员能够通过应用多间隔调度来管理变更。使用多阶段资源调度引擎和综合运行计划。协调多个系统参数场景。

6. 发明授权

US07619280B2 Current sense trench type MOSFET with improved accuracy and ESD withstand capability 有权
标题翻译：电流检测沟槽型MOSFET具有改进的精度和ESD承受能力
公开(公告)号：US07619280B2
公开(公告)日：2009-11-17
申请号：US11066178
申请日：2005-01-31
申请人： Jianjun Cao , Ying Xiao , Kyle Spring , Daniel M. Kinzer
发明人： Jianjun Cao , Ying Xiao , Kyle Spring , Daniel M. Kinzer
IPC分类号： H01L29/76
CPC分类号： H01L29/7815 , H01L29/0696 , H01L29/0847 , H01L29/1095 , H01L29/407 , H01L29/41766 , H01L29/4232 , H01L29/4238 , H01L29/7811 , H01L29/7813
摘要： The active area of a current sense die is surrounded by a transition region which extends to the terminating periphery of the die. Spaced parallel MOSgated trenches extend through and define an active area. The trench positions in the transition region are eliminated or are deactivated, as by shorting to the MOSFET source of the trench, or by removing the source regions in areas of the transition region. By inactivating MOSgate action in the transition region surrounding the source, the device is made less sensitive to current ratio variation due to varying manufacturing tolerances. The gate to source capacitance is increased by surrounding the active area with an enlarged P+ field region which is at least five times the area of the active region, thereby to make the device less sensitive to ESD failure.
摘要翻译：电流感测管芯的有源区域被延伸到管芯的端部周边的过渡区域包围。间距平行的MOS沟槽延伸通过并定义有效区域。过渡区域中的沟槽位置被消除或被去激活，如通过短路到MOSFET的MOSFET源，或者通过去除过渡区域的区域中的源极区域。通过使围绕源极的过渡区域中的MOSgate动作失效，由于变化的制造公差，该器件对电流比率变化的敏感度较低。通过用有源区域的面积的至少五倍的扩大的P +场区域围绕有源区域来增加栅极到源极电容，从而使得器件对ESD故障较不敏感。

7. 发明申请

US20090095871A1 Support for computer peripheral device 失效
公开(公告)号：US20090095871A1
公开(公告)日：2009-04-16
申请号：US11979862
申请日：2007-11-09
申请人： Shi-Ying Xiao , Yi-Jun Lai , Zhong-Wei Lin
发明人： Shi-Ying Xiao , Yi-Jun Lai , Zhong-Wei Lin
IPC分类号： G06F1/16 , B41J11/02
CPC分类号： G06F1/1607 , Y10S248/918
摘要： The present invention relates to a support of a computer peripheral device including a first frame, a second frame pivotally coupled to the first frame at a first end, and a movable arm connected to and movable relative to the second frame. The second frame has an extension at the other end for clamping an object between the extension and the first frame. A computer peripheral device is coupled to an end of the movable arm opposite the end that is coupled to the second frame.

8. 发明申请

US20070222888A1 Web cam with auto-adjusting angled image device 审中-公开
标题翻译：带有自动调整角度的图像设备的网络摄像头
公开(公告)号：US20070222888A1
公开(公告)日：2007-09-27
申请号：US11385754
申请日：2006-03-22
申请人： Shi-Ying Xiao , Hui-Mei Zhang
发明人： Shi-Ying Xiao , Hui-Mei Zhang
IPC分类号： H04N5/225
CPC分类号： H04N5/2252
摘要： The present invention relates to a web cam coupled to a computer system, an in particular to a web cam with an automatic image angle adjustment device responsive to rotation of a housing of the camera. Once a user rotates the housing of the web cam, the web cam will cause electrical contact or disengagement of a conductor relative to a contact, and thereby generate a feedback signal for enabling the computer system to give a counter rotation to an angled image and align the angled image with a display.
摘要翻译：本发明涉及一种联接到计算机系统的腹板凸轮，特别涉及一种具有自动图像角度调节装置的腹板凸轮，该自动图像角度调节装置响应于相机外壳的旋转。一旦用户旋转腹板凸轮的壳体，腹板凸轮将导致导体相对于接触件的电接触或脱离接合，从而产生反馈信号，以使得计算机系统能够对成角度的图像进行反向旋转并对齐带有显示的成角度图像。

9. 发明授权

US08944739B2 Loadport bridge for semiconductor fabrication tools 有权
标题翻译：用于半导体制造工具的承载桥
公开(公告)号：US08944739B2
公开(公告)日：2015-02-03
申请号：US13486024
申请日：2012-06-01
申请人： Shih-Hung Chen , Ying Xiao , Chin-Hsiang Lin
发明人： Shih-Hung Chen , Ying Xiao , Chin-Hsiang Lin
IPC分类号： H01L21/677
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67775
摘要： A wafer handling system with apparatus for transporting wafers between semiconductor fabrication tools. In one embodiment, the apparatus is a loadport bridge mechanism including an enclosure having first and second mounting ends, a docking port at each end configured and dimensioned to interface with a loadport of a semiconductor tool, and at least one wafer transport robot operable to transport a wafer between the docking ports. The wafer transport robot hands off or receives a wafer to/from a tool robot at the loadports of a first and second tool. The bridge mechanism allows one or more wafers to be transferred between loadports of different tools on an individual basis without reliance on the FAB's automated material handling system (AMHS) for bulk wafer transport inside a wafer carrier such as a FOUP or others.
摘要翻译：一种具有用于在半导体制造工具之间传输晶片的装置的晶片处理系统。在一个实施例中，该装置是装载端口机构，其包括具有第一和第二安装端的外壳，每个端部处的对接端口被构造和尺寸设计成与半导体工具的承载端口相接合，以及至少一个可运输的晶片传送机械手在对接端口之间的晶片。晶片传送机器人在第一和第二工具的载荷端口移动或接收来自工具机器人的晶片。桥接机构允许一个或多个晶片在不同工具的载荷端口之间单独传输，而不依赖于FAB的自动化材料处理系统（AMHS），用于在诸如FOUP或其它晶片载体之间的体晶片传输。

10. 发明申请

US20110156815A1 MODULATION AGNOSTIC DIGITAL HYBRID MODE POWER AMPLIFIER SYSTEM AND METHOD 有权
标题翻译：调制惯性数字混合模式功率放大器系统及方法
公开(公告)号：US20110156815A1
公开(公告)日：2011-06-30
申请号：US12928931
申请日：2010-12-21
申请人： Wan Jong Kim , Kyoung Joon Cho , Shawn Patrick Stapleton , Ying Xiao
发明人： Wan Jong Kim , Kyoung Joon Cho , Shawn Patrick Stapleton , Ying Xiao
IPC分类号： H03F1/26
CPC分类号： H03F1/304 , H03F1/3241 , H03F1/3247 , H03F1/3258 , H03F3/087 , H03F3/19 , H03F3/24 , H03F2200/18 , H03F2200/204 , H03F2200/207 , H03F2200/447 , H03F2200/451 , H03F2201/3206 , H03F2201/3209 , H03F2201/3212 , H03F2201/3215 , H03F2201/3224 , H03F2201/3227 , H04L25/067 , H04L25/08 , H04L27/0008 , H04L27/368 , H04W24/02
摘要： A RF-digital hybrid mode power amplifier system for achieving high efficiency and high linearity in wideband communication systems is disclosed. The present invention is based on the method of adaptive digital predistortion to linearize a power amplifier in the RF domain. The present disclosure enables a power amplifier system to be field reconfigurable and support multi-modulation schemes (modulation agnostic), multi-carriers and multi-channels. As a result, the digital hybrid mode power amplifier system is particularly suitable for wireless transmission systems, such as base-stations, repeaters, and indoor signal coverage systems, where baseband I-Q signal information is not readily available.
摘要翻译：公开了一种用于在宽带通信系统中实现高效率和高线性度的RF数字混合模式功率放大器系统。本发明基于对RF域中的功率放大器进行线性化的自适应数字预失真的方法。本公开使得功率放大器系统能够是现场可重新配置的并且支持多调制方案（调制不可知），多载波和多信道。结果，数字混合模式功率放大器系统特别适用于诸如基站，中继器和室内信号覆盖系统之类的无线传输系统，其中基带I-Q信号信息不容易获得。

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