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    • 4. 发明授权
    • Atomic force microscopes and methods of measuring specimens using the same
    • 原子力显微镜和使用其测量样品的方法
    • US08499360B2
    • 2013-07-30
    • US12929674
    • 2011-02-08
    • Yonmook Park
    • Yonmook Park
    • G01Q10/04
    • G01Q10/04G01Q60/38
    • Atomic force microscopes and methods of measuring specimens using the same. An atomic force microscope may precisely measure a 3D shape of a specimen using both a short-stroke scanner and a long-stroke scanner. The atomic force microscope may include a stage to transfer a specimen, at least one cantilever which includes a probe such that a driving displacement and a driving frequency are changed by attractive force and repulsive force in relation to atoms of the specimen, at least one short-stroke scanner which includes the cantilever so as to perform short-stroke scanning of the specimen, at least one long-stroke scanner which includes the short-stroke scanner so as to perform long-stroke scanning of the specimen, and at least one coarse approach system for transferring the short-stroke scanner and the long-stroke scanner to the specimen.
    • 原子力显微镜和使用其测量样品的方法。 原子力显微镜可以使用短行程扫描仪和长行程扫描仪来精确地测量样本的3D形状。 原子力显微镜可以包括传送试样的阶段,至少一个包括探针的悬臂,使得驱动位移和驱动频率相对于试样的原子的吸引力和排斥力而改变,至少一个短 行程扫描器,其包括所述悬臂,以对所述样本进行短行程扫描;至少一个长行程扫描器,其包括所述短行程扫描器,以对所述样本进行长行程扫描;以及至少一个粗略扫描器 将短行程扫描仪和长行程扫描仪转移到样本的接近系统。
    • 5. 发明申请
    • Atomic force microscopes and methods of measuring specimens using the same
    • 原子力显微镜和使用其测量样品的方法
    • US20110203020A1
    • 2011-08-18
    • US12929674
    • 2011-02-08
    • Yonmook Park
    • Yonmook Park
    • G01Q10/02G01Q10/00
    • G01Q10/04G01Q60/38
    • Atomic force microscopes and methods of measuring specimens using the same. An atomic force microscope may precisely measure a 3D shape of a specimen using both a short-stroke scanner and a long-stroke scanner. The atomic force microscope may include a stage to transfer a specimen, at least one cantilever which includes a probe such that a driving displacement and a driving frequency are changed by attractive force and repulsive force in relation to atoms of the specimen, at least one short-stroke scanner which includes the cantilever so as to perform short-stroke scanning of the specimen, at least one long-stroke scanner which includes the short-stroke scanner so as to perform long-stroke scanning of the specimen, and at least one coarse approach system for transferring the short-stroke scanner and the long-stroke scanner to the specimen.
    • 原子力显微镜和使用其测量样品的方法。 原子力显微镜可以使用短行程扫描仪和长行程扫描仪来精确地测量样本的3D形状。 原子力显微镜可以包括传送试样的阶段,至少一个包括探针的悬臂,使得驱动位移和驱动频率相对于试样的原子的吸引力和排斥力而改变,至少一个短 行程扫描器,其包括所述悬臂,以对所述样本进行短行程扫描;至少一个长行程扫描器,其包括所述短行程扫描器,以对所述样本执行长行程扫描;以及至少一个粗略扫描器 将短行程扫描仪和长行程扫描仪转移到样本的接近系统。
    • 7. 发明申请
    • HIGH-SPEED AND HIGH-RESOLUTION ATOMIC FORCE MICROSCOPE
    • 高速和高分辨率原子力显微镜
    • US20110307980A1
    • 2011-12-15
    • US13114642
    • 2011-05-24
    • Yonmook ParkDong Min Kim
    • Yonmook ParkDong Min Kim
    • G01Q60/24
    • G01Q10/04
    • According to example embodiments, an atomic force microscope includes a probe tip, a cantilever including the probe tip, a displacement measurement device, and a movement device. A vibrating displacement of the cantilever changes according to a force between atoms of the probe tip and atoms of a surface of a sample. The displacement measurement device is configured to irradiate a beam emitted from a light source on the cantilever and to measure a displacement of the cantilever based on the beam reflected from the cantilever. The movement device is configured to move the cantilever and the displacement measurement device simultaneously when the sample is scanned.
    • 根据示例性实施例,原子力显微镜包括探针尖端,包括探针尖端的悬臂,位移测量装置和移动装置。 悬臂的振动位移根据探针尖端的原子与样品表面的原子之间的力而变化。 位移测量装置被配置为将从光源发射的光束照射在悬臂上,并且基于从悬臂反射的光束来测量悬臂的位移。 移动装置被配置为当扫描样品时同时移动悬臂和位移测量装置。