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    • 2. 发明授权
    • Electrode-free resonator structures for frequency control, filters and sensors
    • 用于频率控制,滤波器和传感器的无电极谐振器结构
    • US06903629B1
    • 2005-06-07
    • US10669282
    • 2003-09-24
    • Arthur BallatoJohn R. VigYook-Kong Yong
    • Arthur BallatoJohn R. VigYook-Kong Yong
    • H03H9/17H03H9/56H03H9/205H03H9/54
    • H03H9/177H03H9/132H03H9/56H03H2003/0428H03H2003/0435
    • Double-sided, single-sided and ring electrode mesa resonators are provided that operate in the difficult 3 GHZ frequency with an electrode-free resonator area that serves as an energy-trapping area. The double-sided electrode-free resonator device is a double-sided mesa resonator plate, top and bottom wells, a mesa, and top and bottom electrodes deposited in such a way that the electrodes cover the plate surface and surround the mesa, which allows the mesa to protrude above the electrodes and provide an electrode-free resonator area. The top and bottom electrodes, which are acoustically coupled and controlled by acoustic gaps, create an electro-magnetic field and an excitation voltage within a vibrating area of the resonator plate generates an acoustic energy which is trapped within the resonator area and confined to the resonator area to minimize a leakage of the acoustic energy and provide a high Q factor at 3 GHz. The resonator has a resonator frequency determined by a resonator thickness dimension, t3, influences the resonator area's ability to function as an active element trapping the acoustic energy. The inventors herein have observed a strong relationship between decreased resonator thickness and motional impedance. Double-sided and single-sided filter devices based on the same principles are also provided.
    • 提供双面,单面和环形电极台面共振器,其工作在困难的3 GHZ频率,无电极谐振器区域用作能量捕获区域。 双面无电极谐振器装置是双面台面共振器板,顶部和底部井,台面以及顶部和底部电极,以使得电极覆盖板表面并且围绕台面的方式沉积,这允许 台面突出在电极上方,并提供无电极的谐振器区域。 通过声学间隙声学耦合和控制的顶部和底部电极产生电磁场,并且谐振器板的振动区域内的激发电压产生被吸收在谐振器区域内并限于谐振器的声能 以最小化声能的泄漏并在3GHz提供高Q因子。 谐振器具有由谐振器厚度尺寸t 3确定的谐振器频率,影响谐振器区域作为捕获声能的有源元件的功能。 发明人在此观察到减小的谐振器厚度和运动阻抗之间的强关系。 还提供了基于相同原理的双面和单面过滤装置。
    • 4. 发明授权
    • Piezoelectric vibration angular velocity sensor
    • 压电振动角速度传感器
    • US07571648B2
    • 2009-08-11
    • US11752674
    • 2007-05-23
    • Yook-Kong YongMihir S PatelShigeo KannaMasako Tanaka
    • Yook-Kong YongMihir S PatelShigeo KannaMasako Tanaka
    • G01P9/04
    • G01C19/5642
    • An angular velocity sensor includes a protrusion protruding in a Y′-axis direction and extending in an X-axis direction on a main surface of a rotated Y cut quartz plate, and an excitation electrode and a detection electrode formed on the main surface adjacent to this protrusion. This excitation electrode excites thickness-shear vibration in the X-axis direction on the quartz substrate, exiting vibration on the protrusion. Then, the protrusion is bent and displaced due to Coriolis force acting in a direction orthogonal to the vibration of the protrusion corresponding to a rotation around an Y′ axis. This displacement at the protrusion is applied to the quartz substrate as stress. The detection electrode detects change of this stress, thereby angular speed added to the angular velocity sensor is detected.
    • 一种角速度传感器包括沿Y'轴方向突出并在旋转的Y切割石英板的主表面上沿X轴方向延伸的突起,以及形成在主表面上的激励电极和检测电极, 这个突出。 该激发电极激发石英基板上的X轴方向的厚度 - 剪切振动,从而突出突出的振动。 然后,由于在与围绕Y'轴的旋转相对应的与突起的振动正交的方向作用的科里奥利力,突起被弯曲和位移。 突起处的位移作为应力施加到石英基板。 检测电极检测该应力的变化,从而检测加到角速度传感器的角速度。
    • 7. 发明申请
    • ANGULAR VELOCITY SENSOR
    • 角速度传感器
    • US20080289418A1
    • 2008-11-27
    • US11752674
    • 2007-05-23
    • Yook-Kong YONGMihir S. PATELShigeo KANNAMasako TANAKA
    • Yook-Kong YONGMihir S. PATELShigeo KANNAMasako TANAKA
    • G01P15/097
    • G01C19/5642
    • An angular velocity sensor includes a protrusion protruding in a Y′-axis direction and extending in an X-axis direction on a main surface of a rotated Y cut quartz plate, and an excitation electrode and a detection electrode formed on the main surface adjacent to this protrusion. This excitation electrode excites thickness-shear vibration in the X-axis direction on the quartz substrate, exiting vibration on the protrusion. Then, the protrusion is bent and displaced due to Coriolis force acting in a direction orthogonal to the vibration of the protrusion corresponding to a rotation around an Y′ axis. This displacement at the protrusion is applied to the quartz substrate as stress. The detection electrode detects change of this stress, thereby angular speed added to the angular velocity sensor is detected.
    • 一种角速度传感器包括沿Y'轴方向突出并在旋转的Y切割石英板的主表面上沿X轴方向延伸的突起,以及形成在主表面上的激励电极和检测电极, 这个突出。 该激发电极激发石英基板上的X轴方向的厚度 - 剪切振动,从而突出突出的振动。 然后,由于在与围绕Y'轴的旋转相对应的与突起的振动正交的方向作用的科里奥利力,突起被弯曲和位移。 突起处的位移作为应力施加到石英基板。 检测电极检测该应力的变化,从而检测加到角速度传感器的角速度。
    • 8. 发明授权
    • Quartz crystal resonator
    • 石英晶体谐振器
    • US07608986B2
    • 2009-10-27
    • US11537920
    • 2006-10-02
    • Yook-Kong YongMihir S PatelMasako Tanaka
    • Yook-Kong YongMihir S PatelMasako Tanaka
    • H01L41/053H01L41/18
    • H03H9/08H03H9/02023H03H9/0547H03H9/0595H03H9/1035
    • A quartz crystal resonator includes a quartz crystal resonator element having a main surface including an X axis (electrical axis) and a Z′ axis of an inclination rotated at an angle (y) equal to or greater than 36.4 degrees and equal to or smaller than, 40.5 degrees from a Z axis (optical axis) around the X axis, a main vibrating portion vibrating at a predetermined resonance frequency (f) and a supporting portion integrally formed with the main vibrating portion in such a manner as to be formed peripherally to surround the main vibrating portion, and two covers having a thermal expansion coefficient equal to or greater than 6×10−6 per degrees centigrade and equal to or smaller than 10×10−6 per degrees centigrade and bonded to the supporting portion so as to sandwich the quartz crystal resonator element therebetween.
    • 石英晶体谐振器包括具有包括X轴(电轴)的主表面和以等于或大于36.4度并且等于或小于等于或等于36.4度的角度(y)旋转的倾斜的Z'轴的石英晶体谐振器元件 相对于X轴的Z轴(光轴)为40.5度,以规定的共振频率(f)振动的主振动部和与主振动部一体形成的支撑部, 围绕主振动部分,以及两个热膨胀系数等于或大于6×10 -6 /摄氏度并且等于或小于10×10 -6 /摄氏度的盖,并结合到支撑部分,以夹持石英晶体 谐振元件。
    • 9. 发明申请
    • QUARTZ CRYSTAL RESONATOR
    • QUARTZ水晶谐振器
    • US20080079334A1
    • 2008-04-03
    • US11537920
    • 2006-10-02
    • Yook-Kong YONGMihir S. PATELMasako TANAKA
    • Yook-Kong YONGMihir S. PATELMasako TANAKA
    • H01L41/00
    • H03H9/08H03H9/02023H03H9/0547H03H9/0595H03H9/1035
    • A quartz crystal resonator includes a quartz crystal resonator element having a main surface including an X axis (electrical axis) and a Z′ axis of an inclination rotated at an angle (y) equal to or greater than 36.4 degrees and equal to or smaller than, 40.5 degrees from a Z axis (optical axis) around the X axis, a main vibrating portion vibrating at a predetermined resonance frequency (f) and a supporting portion integrally formed with the main vibrating portion in such a manner as to be formed peripherally to surround the main vibrating portion, and two covers having a thermal expansion coefficient equal to or greater than 6×10−6 per degrees centigrade and equal to or smaller than 10×10−6 per degrees centigrade and bonded to the supporting portion so as to sandwich the quartz crystal resonator element therebetween.
    • 石英晶体谐振器包括具有包括X轴(电轴)的主表面和以等于或大于36.4度并且等于或小于等于或等于36.4度的角度(y)旋转的倾斜的Z'轴的石英晶体谐振器元件 相对于X轴的Z轴(光轴)为40.5度,以规定的共振频率(f)振动的主振动部和与主振动部一体形成的支撑部, 围绕主振动部分,并且具有等于或大于6×10 -6 /℃的热膨胀系数和等于或小于10×10 -6 /度的两个盖 并且结合到支撑部分,以将石英晶体谐振元件夹在其间。
    • 10. 发明授权
    • Stiffness effects in piezoelectric devices
    • 压电器件的刚度效应
    • US06230113B1
    • 2001-05-08
    • US09212816
    • 1998-12-16
    • Ji WangYook-Kong YongTsutomu Imai
    • Ji WangYook-Kong YongTsutomu Imai
    • G06F1750
    • H01L41/22
    • A method for verifying the design of piezoelectric devices includes expressing attributes of such piezoelectric device or subsystem thereof in terms of an elastic property or properties of a different subsystem or device component of the piezoelectric device. Such piezoelectric device may include a layer of piezoelectric material and one or more electrodes affixed to one or more faces of such layer. Computational complexity of models of the design are reduced by modeling displacement of the electrodes as being equal to displacement of the layer of piezoelectric material during operation of such piezoelectric device. Further reduction in computational complexity is achieved by modeling electrode displacement as being uniform within each electrode. Stress in the piezoelectric device or subsystem thereof is expressed in terms of elastic properties of a different subsystem of the piezoelectric device. Further any express dependence on strain in a subsystem or device component of the piezoelectric device may be eliminated to reduce model complexity. Higher order terms of such models can be ignored in many instances for further reduction in computational complexity.
    • 用于验证压电装置的设计的方法包括在压电装置的不同子系统或装置部件的弹性或弹性特性方面表示这种压电装置或其子系统的属性。 这种压电装置可以包括一层压电材料和一个或多个固定在该层的一个或多个面上的电极。 通过对电极的位移进行建模来减少设计模型的计算复杂度,使其等于在压电装置运行期间压电材料层的位移。 通过将电极位移建模为在每个电极内均匀,可以进一步降低计算复杂度。 压电装置或其子系统中的应力由压电装置的不同子系统的弹性特性表示。 此外,可以消除对压电器件的子系统或器件部件中的应变的任何明显的依赖性,以降低模型的复杂性。 在许多情况下,这种模型的高阶项可以被忽略,以进一步降低计算复杂度。