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1. 发明授权

US08569937B1 Piezoelectric resonator with capacitive sense and/or force rebalance electrodes to control an amplitude of vibration 有权
标题翻译：具有电容感应和/或力重新平衡电极的压电谐振器来控制振动的振幅
公开(公告)号：US08569937B1
公开(公告)日：2013-10-29
申请号：US12835610
申请日：2010-07-13
申请人： Randall L. Kubena , Yook-Kong Yong
发明人： Randall L. Kubena , Yook-Kong Yong
IPC分类号： H03H9/125
CPC分类号： H03H9/1021 , H03H9/13 , H03H9/17
摘要： In an embodiment, a piezoelectric resonator configured for parametric amplification is disclosed. The piezoelectric resonator may include or comprise a piezoelectric member, and first and second resonator electrodes associated with the piezoelectric member and positioned to enable a first electric field to be generated in a first direction. The piezoelectric resonator may also include or comprise a parametric drive electrode associated with the piezoelectric member and positioned to enable a second electric field to be generated in a second direction.
摘要翻译：在一个实施例中，公开了一种配置用于参数放大的压电谐振器。压电谐振器可以包括或包括压电元件，以及与压电元件相关联并被定位成能够在第一方向上产生第一电场的第一和第二谐振器电极。压电谐振器还可以包括或包括与压电元件相关联的参数驱动电极，并被定位成能够在第二方向上产生第二电场。

2. 发明授权

US08593037B1 Resonator with a fluid cavity therein 有权
标题翻译：谐振器内有流体腔
公开(公告)号：US08593037B1
公开(公告)日：2013-11-26
申请号：US13434144
申请日：2012-03-29
申请人： Randall L. Kubena , Tsung-Yuan Hsu
发明人： Randall L. Kubena , Tsung-Yuan Hsu
IPC分类号： H01L41/053 , H01L41/047 , H01L41/107 , H01L41/113 , G01P3/26 , G01L7/00
CPC分类号： H04R17/00 , Y10T29/42 , Y10T29/49165 , Y10T29/49401
摘要： A quartz resonator flow cell has a piezoelectric quartz wafer with an electrode, pads, and interconnects disposed on a first side thereof. The piezoelectric quartz wafer has a second electrode disposed on a second side thereof, the second electrode opposing the first electrode. A substrate is provided having fluid ports therein and the piezoelectric quartz wafer is mounted to the substrate such that the second side thereof faces the substrate with a cavity being formed between the substrate and the wafer. The fluid ports in the substrate are aligned with the electrode on the second side of the piezoelectric quartz wafer which is in contact with the cavity.
摘要翻译：石英谐振器流通池具有压电石英晶片，其具有设置在其第一侧上的电极，焊盘和互连。压电石英晶片具有设置在其第二侧上的第二电极，第二电极与第一电极相对。提供了一种衬底，其中具有流体端口，并且将压电石英晶片安装到衬底上，使得其第二面面对衬底，在衬底和晶片之间形成空腔。衬底中的流体端口与压电石英晶片的与空腔接触的第二侧上的电极对齐。

3. 发明授权

US08151640B1 MEMS on-chip inertial navigation system with error correction 有权
标题翻译：具有误差校正的MEMS片上惯性导航系统
公开(公告)号：US08151640B1
公开(公告)日：2012-04-10
申请号：US12027247
申请日：2008-02-06
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： G01C19/00
CPC分类号： G01C19/5684
摘要： An on-chip navigation system, optionally combined with GPS (Global Positioning System) and/or an imaging array, which incorporates MEMS (MicroElectroMechanical Systems) components is possible by the use of careful material selection and novel bonding techniques used during fabrication. The use of MEMS components permits many of the components of a typical inertial navigation system to reside on a single chip. Because the components are in close proximity, the components can then be used to monitor the environmental changes of the chip, such as temperature and vibration, and correct for the resulting offsets of other components. This allows improved system performance even if the individual sensor components are not ideal.
摘要翻译：通过使用仔细的材料选择和在制造期间使用的新型结合技术，可以选择结合使用MEMS（微电子机械系统）部件的GPS（全球定位系统）和/或成像阵列的片上导航系统。使用MEMS组件允许典型惯性导航系统的许多组件驻留在单个芯片上。由于组件非常接近，因此可以使用组件来监视芯片的环境变化，例如温度和振动，并纠正其他组件产生的偏移。这样即使各个传感器组件不理想，也可以提高系统性能。

4. 发明授权

US07802356B1 Method of fabricating an ultra thin quartz resonator component 有权
标题翻译：制造超薄石英谐振器元件的方法
公开(公告)号：US07802356B1
公开(公告)日：2010-09-28
申请号：US12034852
申请日：2008-02-21
申请人： David T. Chang , Randall L. Kubena , Pamela R. Patterson
发明人： David T. Chang , Randall L. Kubena , Pamela R. Patterson
IPC分类号： H04R31/00
CPC分类号： H03H9/172 , H03H3/04
摘要： A method for manufacturing a resonator is presented in the present application. The method includes providing a handle substrate, providing a host substrate, providing a quartz substrate comprising a first surface opposite a second surface, applying interposer film to the first surface of the quartz substrate, bonding the quartz substrate to the handle substrate wherein the interposer film is disposed between the quartz substrate and the handle substrate, thinning the second surface of the quartz substrate, removing a portion of the bonded quartz substrate to expose a portion of the interposer film, bonding the quartz substrate to the host substrate, and removing the handle substrate and the interposer film, thereby releasing the quartz substrate.
摘要翻译：在本申请中提出了一种用于制造谐振器的方法。该方法包括提供处理衬底，提供主体衬底，提供包括与第二表面相对的第一表面的石英衬底，将中介层膜施加到石英衬底的第一表面，将石英衬底接合到处理衬底，其中插入膜设置在石英基板和手柄基板之间，使石英基板的第二表面变薄，去除一部分键合的石英基板以暴露中间层膜的一部分，将石英基板接合到主基板，并且移除手柄基板和内插膜，从而释放石英基板。

5. 发明授权

US07671431B1 Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects 失效
标题翻译：具有晶片间互连的三叶草微型陀螺仪和具有贯穿晶片互连的三叶草微型制造器的制造方法
公开(公告)号：US07671431B1
公开(公告)日：2010-03-02
申请号：US11330376
申请日：2006-01-10
申请人： Randall L. Kubena , Frederic P. Stratton , David T. Chang
发明人： Randall L. Kubena , Frederic P. Stratton , David T. Chang
IPC分类号： H01L23/00
CPC分类号： G01C19/5719 , H01L21/76898
摘要： The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, preparing a base wafer with through-wafer interconnects, attaching the resonator wafer to the base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, and attaching a cap wafer on top of the base wafer.
摘要翻译：本发明涉及一种制造含有一体式立柱的三叶草微陀螺的方法，其特征在于，包括：将后晶片连接到谐振晶片，从后晶片形成底柱，附着于谐振晶片，制备带晶圆的基晶片互连，将谐振器晶片连接到基底晶片，其中底部支架装配到基底晶片中的柱孔中，从谐振器晶片形成顶部柱，其中底部和顶部柱围绕相同的轴线对称地形成，并且附接在基底晶片顶部的盖子晶片。

6. 发明授权

US07282834B2 Micro electrical mechanical system (MEMS) tuning using focused ion beams 失效
标题翻译：使用聚焦离子束的微机电系统（MEMS）调谐
公开(公告)号：US07282834B2
公开(公告)日：2007-10-16
申请号：US11148389
申请日：2005-06-07
申请人： Randall L. Kubena , Richard J. Joyce
发明人： Randall L. Kubena , Richard J. Joyce
IPC分类号： H01L41/08
CPC分类号： H03H3/0077
摘要： A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plurality of MEMS devices by depositing an active layer and then removing a portion of the active layer using FIB micromachining. Also, a method for tuning a MEMS device and vacuum packaging the MEMS device in situ are provided.
摘要翻译：公开了一种用于调整诸如MEMS器件的机电装置的方法。该方法包括在减压系统中操作MEMS装置，并使用FIB微机械加工来去除MEMS装置的一部分。另外，一种用于通过沉积有源层然后使用FIB微加工来去除一部分有源层来调谐多个MEMS器件的方法。此外，提供了一种用于调谐MEMS器件并原位真空封装MEMS器件的方法。

7. 发明授权

US07232700B1 Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense 失效
标题翻译：集成全硅电容式微型电机具有垂直差分感应和控制以及用于制备具有垂直差分感的集成全硅电容式微型电机
公开(公告)号：US07232700B1
公开(公告)日：2007-06-19
申请号：US11008715
申请日：2004-12-08
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： H01L21/00
CPC分类号： G01C19/5719
摘要： The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching the resonator wafer to a base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, preparing a cap with backside metallization, and attaching a cap wafer on top of the base wafer. The present invention relates further to a gyroscope containing an integrated post with on or off-chip electronics.
摘要翻译：本发明涉及一种制造含有一体式立柱的三叶草微陀螺仪的方法，该方法包括：将后晶片连接到共振器晶片，从后晶片形成底柱，附着于谐振晶片，将谐振晶片连接到基片，其中所述底柱装配到所述基底晶片中的柱孔中，从所述谐振器晶片形成顶部柱，其中所述底部和顶部柱围绕相同轴线对称地形成，制备具有背侧金属化的盖，并且附接盖片在基础晶片的顶部。本发明还涉及一种包含具有片上或片外电子器件的集成柱的陀螺仪。

8. 发明授权

US08769802B1 Method of fabrication an ultra-thin quartz resonator 有权
标题翻译：制造超薄石英谐振器的方法
公开(公告)号：US08769802B1
公开(公告)日：2014-07-08
申请号：US12831028
申请日：2010-07-06
申请人： David T. Chang , Randall L. Kubena , Pamela R. Patterson
发明人： David T. Chang , Randall L. Kubena , Pamela R. Patterson
IPC分类号： H04R31/00
CPC分类号： H03H9/172 , H03H3/04
摘要： A method for manufacturing a resonator is presented in the present application. The method includes providing a handle substrate, providing a host substrate, providing a quartz substrate comprising a first surface opposite a second surface, applying interposer film to the first surface of the quartz substrate, bonding the quartz substrate to the handle substrate wherein the interposer film is disposed between the quartz substrate and the handle substrate, thinning the second surface of the quartz substrate, removing a portion of the bonded quartz substrate to expose a portion of the interposer film, bonding the quartz substrate to the host substrate, and removing the handle substrate and the interposer film, thereby releasing the quartz substrate.
摘要翻译：在本申请中提出了一种用于制造谐振器的方法。该方法包括提供处理衬底，提供主体衬底，提供包括与第二表面相对的第一表面的石英衬底，将中介层膜施加到石英衬底的第一表面，将石英衬底接合到处理衬底，其中插入膜设置在石英基板和手柄基板之间，使石英基板的第二表面变薄，去除一部分键合的石英基板以暴露中间层膜的一部分，将石英基板接合到主基板，并且移除手柄基板和内插膜，从而释放石英基板。

9. 发明授权

US08766745B1 Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same 有权
标题翻译：具有超薄导电外电极的基于石英的盘式谐振器陀螺仪及其制造方法
公开(公告)号：US08766745B1
公开(公告)日：2014-07-01
申请号：US12488784
申请日：2009-06-22
申请人： Randall L. Kubena , David T. Chang , Robert L. Larson
发明人： Randall L. Kubena , David T. Chang , Robert L. Larson
IPC分类号： H03H9/02 , G01C19/00 , H03H9/24
CPC分类号： G01P1/00 , G01C19/5684 , H03H3/0072 , H03H9/02244 , H03H9/0552 , H03H9/1057 , H03H9/2436 , H03H2009/02283 , H03H2009/02496
摘要： A disk resonator gyroscope includes a quartz base, a quartz resonator disk having a central pillar connected to the base, the quartz resonator disk having a surface facing the base and having plurality of circumferential slots in the surface of the quartz resonator disk around the central pillar, and an electrode comprised of quartz and connected to the base outside of an outer edge of the resonator disk.
摘要翻译：盘式谐振器陀螺仪包括石英基座，具有连接到基座的中心柱的石英谐振器盘，石英谐振器盘具有面向基座的表面，并且在石英谐振器盘周围的中心支柱的表面中具有多个周向槽以及由石英组成并且连接到谐振器盘的外边缘外部的基座的电极。

10. 发明授权

US08765615B1 Quartz-based MEMS resonators and methods of fabricating same 有权
标题翻译：基于石英的MEMS谐振器及其制造方法
公开(公告)号：US08765615B1
公开(公告)日：2014-07-01
申请号：US12816292
申请日：2010-06-15
申请人： David T. Chang , Frederic P. Stratton , Hung Nguyen , Randall L. Kubena
发明人： David T. Chang , Frederic P. Stratton , Hung Nguyen , Randall L. Kubena
IPC分类号： H01L21/302 , H01L21/311 , H01L21/3105
CPC分类号： H01L21/31111 , B81B2201/0271 , B81C1/00238 , B81C2201/0194 , B81C2203/036 , B81C2203/038 , H01L21/31056 , H03H3/0072 , H03H2009/02291
摘要： A quart resonator for use in lower frequency applications (typically lower than the higher end of the UHF spectrum) where relatively thick quartz members, having a thickness greater than ten microns, are called for. A method for fabricating same resonator includes providing a first quart substrate; thinning the first quartz substrate to a desired thickness; forming a metallic etch stop on a portion of a first major surface of the first quartz substrate; adhesively attaching the first major surface of the first quartz substrate with the metallic etch stop formed thereon to a second quartz substrate using a temporary adhesive; etching a via though the first quartz substrate to the etch stop; forming a metal electrode on a second major surface of the first quartz substrate, the metal electrode penetrating the via in the first quartz substrate to make ohmic contact with the metallic etch stop; bonding the metal electrode formed on the second major surface of the first quartz substrate to a pad formed on a substrate bearing oscillator drive circuitry to form a bond there between; and dissolving the temporary adhesive to thereby release the second quartz substrate from the substrate bearing oscillator drive circuitry and a portion of the first quartz substrate bonded thereto via the bond formed between the metal electrode formed on the second major surface of the first quartz substrate to and the pad formed on the substrate bearing oscillator drive circuitry.
摘要翻译：用于低频应用（通常低于UHF频谱的较高端）的夸特谐振器，其中厚度大于10微米的相对较厚的石英构件被要求。一种制造相同谐振器的方法包括提供第一夸脱基片; 将第一石英基板变薄至所需厚度; 在所述第一石英衬底的第一主表面的一部分上形成金属蚀刻停止件; 使用临时粘合剂将第一石英基板的第一主表面与其上形成的金属蚀刻停止粘合到第二石英基板上; 将通过第一石英衬底的通孔蚀刻到蚀刻停止部; 在所述第一石英衬底的第二主表面上形成金属电极，所述金属电极穿过所述第一石英衬底中的通孔以与所述金属蚀刻停止件欧姆接触; 将形成在第一石英衬底的第二主表面上的金属电极接合到形成在承载振荡器驱动电路的衬底上的焊盘，以在其之间形成结合; 并且将临时粘合剂溶解，从而从基板轴承振荡器驱动电路和第一石英基板的一部分经由形成在第一石英基板的第二主表面上的金属电极之间的键与第一石英基板接合的部分而释放第二石英基板衬垫形成在承载振荡器驱动电路的衬底上。

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