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    • 3. 发明授权
    • Workpiece stage of a resist curing device
    • 抗蚀剂固化装置的工件台
    • US06897415B2
    • 2005-05-24
    • US10180295
    • 2002-06-27
    • Yoshinori FujiwaraYasuhiko KenjoYoshihiko Watanabe
    • Yoshinori FujiwaraYasuhiko KenjoYoshihiko Watanabe
    • G03F7/20G03F7/38G03F7/40H01L21/027H05B3/74H05B3/68
    • G03F7/38G03F7/2024G03F7/40H01L21/67109
    • A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated with UV radiation with a simultaneous temperature increase, in which it is cooled after UV radiation and by which the resist is cured, the workpiece stage having heating and cooling arrangements, major warping of the carrier is avoided and reliable holding of the workpiece on the carrier surface by vacuum suction obtained by the carrier being made of an aluminum alloy or a copper alloy which meets the following condition: σ/σy3.1 σ labeling the thermal stress which is determined using the following formula: where E is Young's modulus (N/mm2) at 200° C., α is the coefficient of linear expansion (1/° C.) at 200° C. and ΔT is a temperature difference (° C.) of 120° C., and σy is the fracture point at 200° C.
    • 设计抗蚀剂固化装置的工件台,其中已经施加有抗蚀剂的工件通过真空吸附被保持在工件台上,其中工件被同时升温的UV辐射照射,其中它是 紫外线辐射后冷却,抗蚀剂固化,工件台具有加热和冷却布置,避免了载体的主要翘曲,并且通过由载体由铝制成的真空抽吸可靠地将工件保持在载体表面上 合金或铜合金,满足以下条件:<?in-line-formula description =“In-line formula”end =“lead”?> sigma / sigma -formulae description =“In-line Formulas”end =“tail”?> sigma标注使用下列公式确定的热应力:其中E是200时的杨氏模量(N / mm 2) °C,在200°C时,α是线性膨胀系数(1 /℃),而DeltaT是Te 温度差(°C)为120°C,σσ为200°C时的断裂点。
    • 5. 发明授权
    • Method of recycling household waste
    • 回收家庭垃圾的方法
    • US06655530B2
    • 2003-12-02
    • US09891243
    • 2001-06-27
    • Koichi NakamuraYoshihiko WatanabeKazufumi Watabe
    • Koichi NakamuraYoshihiko WatanabeKazufumi Watabe
    • B03B100
    • B03B9/06C05F9/02Y02A40/215Y10S71/903Y10S209/93
    • The household waste treatment requires neither incineration nor disposal in landfills. Two processing sub-systems, first one for combustibles and the other or second one for incombustibles, cooperate with each other as a single system for recycling the waste. The first sub-system deals with combustible waste to yields products for fertilizing and/or conditioning soil. In the process, what are inappropriate to the production of the soil fertilizing and/or conditioning products are sent to the second sub-system, which deals with incombustible waste. This sub-system sorts the incombustible waste materials into various kinds of recyclable products. Combustibles among the incombustible waste materials are sent to the first sub-system.
    • 家庭废物处理既不要求焚化也不需要在垃圾填埋场处置。 两个处理子系统,第一个可燃物,另一个或第二个用于不可燃物,彼此配合作为一个循环使用废物的系统。 第一个子系统处理可燃废物,以产生用于施肥和/或调理土壤的产品。 在此过程中,不适当的土壤肥料和/或调理产品的生产被送到第二个处理不可燃废物的子系统。 该子系统将不燃废物分类成各种可回收产品。 不燃废物中的可燃物被送到第一子系统。
    • 6. 发明授权
    • Substrate transport apparatus and transport teaching system
    • 基板运输装备和运输教学系统
    • US06438449B2
    • 2002-08-20
    • US09725553
    • 2000-11-29
    • Yasuo KawamatsuYoshihiko WatanabeYasuhiko Hashimoto
    • Yasuo KawamatsuYoshihiko WatanabeYasuhiko Hashimoto
    • G06F700
    • H01L21/6835B25J19/025H01L21/681H01L21/68707H01L2924/3025
    • To provide a substrate transport device and a transport teaching system which can automatically perform a teaching processing in order to reduce the burden of an operator and to eliminate a positional shift accurately and efficiently in a short time. Optical connectors 251, 252, 253 and 254 of a jig 200 and optical connectors 256, 257, 258 and 259 fixedly provided on a substrate transport device are opposed to each other and optical axes are coincident with each other. A lens having a high condensation ratio is provided in each optical connector. A light signal is output from optical sensor heads 231 and 241 through an optical fiber F2, each optical connector and an optical fiber F1, and a light signal input to optical sensor heads 232 and 242 is guided into the substrate transport device. Then, an arm 31b is automatically moved in a three-axis direction. Thus, an edge position of a detected portion 122 is detected to acquire positional information so that teaching information is obtained.
    • 为了提供能够自动执行教学处理的基板输送装置和运输教学系统,以减少操作者的负担,并在短时间内精确有效地消除位置偏移。 固定设置在基板输送装置上的夹具200的光连接器251,252,253和254以及固定地设置在基板输送装置上的光连接器256,257,258,259彼此相对并且光轴彼此重合。 在每个光学连接器中设置具有高冷凝率的透镜。 光信号通过光纤F2从光学传感器头231和241输出,每个光学连接器和光纤F1以及输入到光学传感器头232和242的光信号被引导到基板输送装置中。 然后,臂31b沿三轴方向自动移动。 因此,检测到检测部分122的边缘位置以获取位置信息,从而获得教学信息。
    • 7. 发明授权
    • Image diagnosis apparatus
    • 图像诊断装置
    • US5058176A
    • 1991-10-15
    • US295038
    • 1988-12-28
    • Toru ShimazakiKeiki YamaguchiYoshihiko WatanabeNoriaki Yamada
    • Toru ShimazakiKeiki YamaguchiYoshihiko WatanabeNoriaki Yamada
    • A61B6/03A61B5/055G01N23/04G01R33/48G01R33/56G06T5/40G06T11/00
    • G06T5/40G01R33/56G06T5/009G06T2207/10072G06T2207/10088
    • The image diagnosis apparatus of the present invention is equipped with means for automatically determining a window level and a window width for image displaying in accordance with the value of reconstructed image data. With this window level/window width calculating means (13), the window level is obtained with respect to each reconstructed image on the basis of the virtual average value of its pixel data and the window width is also obtained which has a certain relationship with that window level. When displaying each reconstructed image, a display is made in accordance with each window level and each window width thus obtained. Instead of the obtained window level and window width, those set by a manual setting section (23) may be used by a changeover operation when necessary.
    • PCT No.PCT / JP87 / 00462 Sec。 371日期:1988年12月28日第 102(e)日期1988年12月28日PCT提交1987年7月2日PCT公布。 第WO88 / 00026号公报 日本1988年1月14日。本发明的图像诊断装置配备有根据重构图像数据的值自动确定窗口水平和窗口宽度的装置。 利用该窗口级别/窗口宽度计算装置(13),基于其像素数据的虚拟平均值,获得关于每个重建图像的窗口级别,并且还获得与该像素数据具有一定关系的窗口宽度 窗口级别。 当显示每个重建图像时,根据如此获得的每个窗口级别和每个窗口宽度进行显示。 代替获得的窗口级别和窗口宽度,在必要时可以通过切换操作来使用由手动设置部分(23)设置的窗口等级和窗口宽度。