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    • 4. 发明授权
    • Method for forming electret containing positive ions
    • 形成含有正离子的驻极体的方法
    • US09263192B2
    • 2016-02-16
    • US14013858
    • 2013-08-29
    • AOI Electronics Co., Ltd.
    • Masato SuzukiHiroki Hayashi
    • C23C14/04C23C14/14H01G7/02
    • H01G7/02H01G7/025H02N1/08
    • A method for forming an electret containing positive ions, includes: a first step of contacting water vapor including positive ions to a Si substrate to which heat is being applied, and forming an oxide layer including those ions; a second step of, along with applying an electric field that makes the side of the oxide layer that does not contact the Si substrate be the negative side, and that makes its other side be a positive side, applying heat to the Si substrate in a hydrogen atmosphere, and causing the ions in the oxide layer to shift; and a third step of contacting water vapor including a chemical substance, in an atmosphere of an inactive gas, for forming a hydrophobic chemically adsorbed monomolecular layer, and thus forming a hydrophobic membrane upon the oxide layer; wherein the second step and the third step are performed continuously within one common vessel.
    • 一种形成含有正离子的驻极体的方法,包括:使包含正离子的水蒸气与施加了热量的Si衬底接触并形成包括那些离子的氧化物层的第一步骤; 第二步,连同施加使不与Si衬底接触的氧化物层的一侧的电场为负极,使其另一侧为正极侧,向Si衬底施加热量 氢气氛,并使氧化层中的离子发生移动; 以及在惰性气体的气氛中使含有化学物质的水蒸汽接触,形成疏水性化学吸附单分子层,从而在氧化物层上形成疏水膜的第三工序; 其中所述第二步骤和所述第三步骤在一个公共容器内连续进行。
    • 5. 发明授权
    • Method for manufacturing three-dimensionally shaped comb-tooth electret electrode
    • 制造三维形状的梳齿驻极体电极的方法
    • US08865498B2
    • 2014-10-21
    • US13968817
    • 2013-08-16
    • AOI Electronics Co., Ltd.
    • Masato SuzukiHiroki Hayashi
    • H01L21/00B81C1/00H01G7/02
    • B81C1/00B81C1/00436H01G7/025
    • A method for manufacturing a three-dimensionally shaped comb-tooth electret electrode, provided with positive ions, includes: forming a three-dimensional movable comb-tooth electrode and a three-dimensional fixed comb-tooth electrode from an Si substrate; contacting a vapor including ions thereto, and forming an oxide layer including ions upon surfaces of the comb-tooth electrodes with heat applied thereto; and applying a voltage between the movable electrode and the fixed electrode with heat applied thereto, and thereby causing the ions included in the oxide layer to shift to a surface of the oxide layer; wherein, the voltage between the movable electrode and the fixed electrode is changed, so that the operation of each of the comb-teeth of the movable electrode being alternatingly pulled in against two opposed comb-teeth of the fixed electrode is repeated, and the pulling in voltage and the pulled-in state release voltage are gradually increased.
    • 具有正离子的三维形状的梳齿驻极体电极的制造方法包括:从Si基板形成三维可动梳齿电极和三维固定梳齿电极; 使含有离子的蒸气接触,并在其上施加热量,在梳齿电极的表面上形成包含离子的氧化物层; 以及在施加到其上的热量在可动电极和固定电极之间施加电压,从而使包含在氧化物层中的离子移动到氧化物层的表面; 其中,可动电极和固定电极之间的电压发生变化,从而重复将可动电极的每个梳齿的操作交替地拉到固定电极的两个相对的梳齿上,并且拉动 电压和拉入状态释放电压逐渐增加。