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    • 5. 发明授权
    • Method of manufacturing thin film transistor substrate and method of manufacturing organic light emitting display apparatus
    • 制造薄膜晶体管基板的方法和制造有机发光显示装置的方法
    • US08119467B2
    • 2012-02-21
    • US12699196
    • 2010-02-03
    • Ae-Kyung KwonWon-Kyu Kwak
    • Ae-Kyung KwonWon-Kyu Kwak
    • H01L21/84
    • H01L27/1288H01L27/1255H01L27/3262H01L27/3265
    • Provided are a method of manufacturing a thin film transistor (TFT) substrate and a method of manufacturing an organic light emitting display apparatus, which increase the capacitance of a capacitor without increasing the probability of short circuits between wires. The method of manufacturing a TFT substrate includes (a) forming a capacitor electrode and a gate electrode on a substrate having a first region and a second region, so that the capacitor electrode is formed to correspond to the first region and the gate electrode is formed in a portion of the second region; (b) forming an interlayer insulating layer to cover the gate electrode and the capacitor electrode; and (c) etching a portion of the interlayer insulating layer in the first region by using a halftone mask to a thickness that is less than a thickness of a portion of the interlayer insulating layer in the second region.
    • 提供制造薄膜晶体管(TFT)基板的方法和制造有机发光显示装置的方法,其增加电容器的电容而不增加导线之间短路的可能性。 制造TFT基板的方法包括:(a)在具有第一区域和第二区域的基板上形成电容器电极和栅电极,使得电容器电极形成为对应于第一区域,形成栅极电极 在第二区域的一部分中; (b)形成覆盖栅电极和电容电极的层间绝缘层; 以及(c)通过使用半色调掩模将第一区域中的层间绝缘层的一部分蚀刻到厚度小于第二区域中的层间绝缘层的一部分的厚度。
    • 6. 发明申请
    • METHOD OF MANUFACTURING THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS
    • 制造薄膜晶体管基板的方法和制造有机发光显示装置的方法
    • US20100255619A1
    • 2010-10-07
    • US12699196
    • 2010-02-03
    • Ae-Kyung KwonWon-Kyu Kwak
    • Ae-Kyung KwonWon-Kyu Kwak
    • H01L33/00H01L21/782
    • H01L27/1288H01L27/1255H01L27/3262H01L27/3265
    • Provided are a method of manufacturing a thin film transistor (TFT) substrate and a method of manufacturing an organic light emitting display apparatus, which increase the capacitance of a capacitor without increasing the probability of short circuits between wires. The method of manufacturing a TFT substrate includes (a) forming a capacitor electrode and a gate electrode on a substrate having a first region and a second region, so that the capacitor electrode is formed to correspond to the first region and the gate electrode is formed in a portion of the second region; (b) forming an interlayer insulating layer to cover the gate electrode and the capacitor electrode; and (c) etching a portion of the interlayer insulating layer in the first region by using a halftone mask to a thickness that is less than a thickness of a portion of the interlayer insulating layer in the second region.
    • 提供制造薄膜晶体管(TFT)基板的方法和制造有机发光显示装置的方法,其增加电容器的电容而不增加导线之间短路的可能性。 制造TFT基板的方法包括:(a)在具有第一区域和第二区域的基板上形成电容器电极和栅电极,使得电容器电极形成为对应于第一区域,形成栅极电极 在第二区域的一部分中; (b)形成覆盖栅电极和电容电极的层间绝缘层; 以及(c)通过使用半色调掩模将第一区域中的层间绝缘层的一部分蚀刻到厚度小于第二区域中的层间绝缘层的一部分的厚度。