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1. 发明授权

US09768043B2 Quartz upper and lower domes 有权
公开(公告)号：US09768043B2
公开(公告)日：2017-09-19
申请号：US14132215
申请日：2013-12-18
申请人： Applied Materials, Inc.
发明人： Anzhong Chang , Paul Brillhart , Surajit Kumar , Satheesh Kuppurao , Mehmet Tugrul Samir , David K. Carlson , Steve Aboagye , Anh N. Nguyen , Kailash Kiran Patalay , Joseph M. Ranish , Oleg Serebryanov , Dongming Iu , Shu-Kwan Lau , Zuoming Zhu , Herman Diniz
IPC分类号： A21B2/00 , H01L21/67 , C23C16/455
CPC分类号： H01L21/67115 , C23C16/45504
摘要： Embodiments of the present disclosure relate to a dome assembly. The dome assembly includes an upper dome including a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.

2. 发明授权

US09345118B2 Lamp failure detector 有权
标题翻译：灯泡故障检测器
公开(公告)号：US09345118B2
公开(公告)日：2016-05-17
申请号：US14532895
申请日：2014-11-04
申请人： APPLIED MATERIALS, INC.
发明人： Oleg Serebryanov , Alexander Goldin
IPC分类号： H05B37/03
CPC分类号： H05B37/036 , H05B37/038
摘要： Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.
摘要翻译：提供了一种用于在快速热处理（RTP）工具中检测灯泡故障的装置和方法。提供可以适应直流和/或交流电压的灯故障检测系统。所述系统沿着由至少两个串联连接的灯形成的电路路径采样电压信号，基于所采样的电压信号计算出至少两个串联灯的第一灯两端的电压降，并确定是否已经发生灯故障关于第一灯上的电压降与施加到电路路径的总电压之间的关系。

3. 发明授权

US09929027B2 Easy access lamphead 有权
公开(公告)号：US09929027B2
公开(公告)日：2018-03-27
申请号：US14507304
申请日：2014-10-06
申请人： Applied Materials, Inc.
发明人： Joseph M. Ranish , Oleg Serebryanov
IPC分类号： F26B3/30 , F26B19/00 , A21B2/00 , H01L21/67 , H05B3/00
CPC分类号： H01L21/67115 , H05B3/0047
摘要： Embodiments described herein generally relate to an improved power distribution assembly for a lamphead assembly used in a thermal processing chamber. In one embodiment, the lamphead assembly includes a plurality of lamps for thermal processing of semiconductor substrates, and a power distribution assembly having a plurality of openings, the power distribution assembly provides power to the plurality of lamps, and each opening is sized to allow passage of the lamp therethough.

4. 发明授权

US09240341B2 Top wafer rotation and support 有权
标题翻译：顶级晶圆旋转和支撑
公开(公告)号：US09240341B2
公开(公告)日：2016-01-19
申请号：US14674049
申请日：2015-03-31
申请人： Applied Materials, Inc.
发明人： Oleg Serebryanov , Joseph M. Ranish , Aaron Muir Hunter
IPC分类号： F27D11/00 , H01L21/687 , F27B17/00 , H01L21/67 , H01L21/324 , H05B3/00
CPC分类号： H01L21/68764 , F27B17/0025 , F27D11/00 , H01L21/324 , H01L21/67115 , H01L21/68785 , H05B3/0047
摘要： Embodiments of the present disclosure provide thermal processing chambers including a drive mechanism and a heating assembly disposed on opposite sides of a substrate support assembly. Particularly, the heating assembly is disposed below the substrate support assembly to process a substrate with a device side facing up and the drive mechanism is disposed above the substrate assembly.
摘要翻译：本公开的实施例提供了热处理室，其包括设置在基板支撑组件的相对侧上的驱动机构和加热组件。特别地，加热组件设置在基板支撑组件下方，以处理基板，其中装置侧朝上并且驱动机构设置在基板组件上方。

5. 发明授权

US10734257B2 Direct current lamp driver for substrate processing 有权
公开(公告)号：US10734257B2
公开(公告)日：2020-08-04
申请号：US13866505
申请日：2013-04-19
申请人： APPLIED MATERIALS, INC.
发明人： Oleg Serebryanov , Joseph M. Ranish , Alexander Goldin
IPC分类号： H01L21/67
摘要： Methods and apparatus for heating a substrate in a process chamber are provided herein. In some embodiments, an apparatus for heating a substrate in a process chamber includes a lamp group comprising one or more sets of lamps to provide radiant energy to heat a substrate when disposed in the process chamber, wherein each set of lamps comprises a plurality of lamps wired in series, and wherein each set of lamps is wired in parallel with respect to other sets of the one or more sets of lamps; an alternating current (AC) power source to produce an AC input waveform; and a lamp driver to power the lamp group, the lamp driver including a rectifier coupled to the AC power source to convert the AC input waveform to DC voltage; and a direct current to direct current (DC/DC) converter to reduce voltage of the DC power.

6. 发明授权

US10405375B2 Lamphead PCB with flexible standoffs 有权
公开(公告)号：US10405375B2
公开(公告)日：2019-09-03
申请号：US14175821
申请日：2014-02-07
申请人： Applied Materials, Inc.
发明人： Joseph M. Ranish , Oleg Serebryanov , Dongming Iu
IPC分类号： H05B3/00 , H01L21/67
摘要： The embodiments described herein generally relate to a flexible standoff for use with a lamphead assembly in a thermal processing chamber. In one embodiment, the lamphead assembly can include a lamphead with one or more fixed lamphead positions, a lamp bulb, a lamp base with a standoff contact adaptor and a flexible standoff capable of attaching and positioning the lamp assembly. The flexible standoff can include a socket configured to receive a lamp base of a lamp assembly, a housing configured to position a lamp bulb of a lamp assembly in thermal connection with a processing chamber, a contact adaptor configured to electrically connect to a power supply and a conductive material to electrically connect the socket and the contact adaptor.

7. 发明授权

US09766275B2 Methods and apparatus for increasing accuracy of RMS measurements of signals with a high crest factor 有权
公开(公告)号：US09766275B2
公开(公告)日：2017-09-19
申请号：US14278621
申请日：2014-05-15
申请人： APPLIED MATERIALS, INC.
发明人： Oleg Serebryanov
IPC分类号： H05B1/02 , H01L21/67 , G01R19/02
CPC分类号： G01R19/02 , H01L21/67115 , H05B1/0233
摘要： Methods and apparatus for determining the root-mean-square (RMS) voltage of an input voltage are provided herein. In some embodiments, an apparatus for determining the root-mean-square (RMS) voltage of an input voltage includes an amplifier to modify an amplitude of the input voltage signal; an amplitude detector, coupled to the amplifier, to transform the spectrum of the modified input voltage signal so that an increased portion of the signal is disposed within a desired frequency region; and a root-mean-square (RMS) converter, coupled to the amplitude detector, to determine the RMS voltage of the transformed input voltage signal, wherein a bandwidth of the RMS converter includes the desired frequency region.

8. 发明授权

US08993933B2 Top wafer rotation and support 有权
标题翻译：顶级晶圆旋转和支撑
公开(公告)号：US08993933B2
公开(公告)日：2015-03-31
申请号：US13749550
申请日：2013-01-24
申请人： Applied Materials, Inc.
发明人： Oleg Serebryanov , Joseph M. Ranish , Aaron Muir Hunter
IPC分类号： F27B5/14 , F27D11/00 , F27B17/00 , H01L21/67 , H01L21/687 , F26B19/00
CPC分类号： H01L21/68764 , F27B17/0025 , F27D11/00 , H01L21/324 , H01L21/67115 , H01L21/68785 , H05B3/0047
摘要： Embodiments of the present invention provide thermal processing chambers including a drive mechanism and a heating assembly disposed on opposite sides of a substrate support assembly. Particularly, the heating assembly is disposed below the substrate support assembly to process a substrate with a device side facing up and the drive mechanism is disposed above the substrate assembly.
摘要翻译：本发明的实施例提供热处理室，其包括设置在基板支撑组件的相对侧上的驱动机构和加热组件。特别地，加热组件设置在基板支撑组件下方，以处理基板，其中装置侧朝上并且驱动机构设置在基板组件上方。

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