专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US10284173B2 Acoustic resonator device with at least one air-ring and frame 有权
公开(公告)号：US10284173B2
公开(公告)日：2019-05-07
申请号：US15196657
申请日：2016-06-29
申请人： Avago Technologies General IP (Singapore) Pte. Ltd.
发明人： Dariusz Burak , Phil Nikkel , David Martin , John Choy
IPC分类号： H01L41/08 , H03H9/17 , H03H9/13 , H03H9/02
摘要： An acoustic resonator device includes a bottom electrode disposed on a substrate over an air cavity, a piezoelectric layer disposed on the bottom electrode, and a top electrode disposed on the piezoelectric layer, where an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity defines a main membrane region. The acoustic resonator device further includes at least one metal frame disposed on a bottom surface of the bottom electrode having a thickness that ranges from about 10% to about 75% of a thickness of the bottom electrode in a central region of the bottom electrode. The thickness of the metal frame improves heat dissipation out of the acoustic resonator device while also improving structural stability of the acoustic resonator device without detrimentally affecting its performance.

2. 发明申请

US20180115302A1 BULK ACOUSTIC WAVE RESONATORS HAVING DOPED PIEZOELECTRIC MATERIAL AND A BUFFER LAYER 审中-公开
公开(公告)号：US20180115302A1
公开(公告)日：2018-04-26
申请号：US15335402
申请日：2016-10-26
申请人： Avago Technologies General IP (Singapore) Pte. Ltd.
发明人： Tangshiun Yeh , Ryan Pooran , David Martin
IPC分类号： H03H9/17
CPC分类号： H03H9/02047 , H03H9/173 , H03H9/175
摘要： BAW resonators comprise a first electrode; a second electrode; and a piezoelectric layer disposed between the first and second electrodes. The piezoelectric layer comprises a piezoelectric material doped to a minimum atomic percentage with at least one rare earth element. In a representative embodiment, the BAW resonators comprise a first buffer layer disposed over the first electrode; and a second buffer layer disposed over the first piezoelectric layer. In a representative embodiment, the first buffer layer, or the second buffer layer, or both, are doped with the at least one rare earth element to an atomic percentage that is less than the minimum percentage.

3. 发明申请

US20160308509A1 ACOUSTIC RESONATOR DEVICE WITH AT LEAST ONE AIR-RING AND FRAME 审中-公开
标题翻译：具有至少一个空气环和框架的声学谐振器装置
公开(公告)号：US20160308509A1
公开(公告)日：2016-10-20
申请号：US15196657
申请日：2016-06-29
申请人： Avago Technologies General IP (Singapore) Pte. Ltd.
发明人： Dariusz Burak , Phil Nikkel , David Martin , John Choy
IPC分类号： H03H9/17 , H03H9/54
CPC分类号： H03H9/173 , H03H9/02007 , H03H9/132
摘要： An acoustic resonator device includes a bottom electrode disposed on a substrate over an air cavity, a piezoelectric layer disposed on the bottom electrode, and a top electrode disposed on the piezoelectric layer, where an overlap between the top electrode, the piezoelectric layer and the bottom electrode over the air cavity defines a main membrane region. The acoustic resonator device further includes at least one metal frame disposed on a bottom surface of the bottom electrode having a thickness that ranges from about 10% to about 75% of a thickness of the bottom electrode in a central region of the bottom electrode. The thickness of the metal frame improves heat dissipation out of the acoustic resonator device while also improving structural stability of the acoustic resonator device without detrimentally affecting its performance.
摘要翻译：声谐振器装置包括设置在空气腔上的基板上的底部电极，设置在底部电极上的压电层和设置在压电层上的顶部电极，其中顶部电极，压电层和底部之间的重叠空气腔上的电极限定主膜区域。声谐振器装置还包括设置在底部电极的底表面上的至少一个金属框架，其厚度在底部电极的中心区域中的底部电极的厚度的约10％至约75％的范围内。金属框架的厚度改善了声共振器装置的热耗散，同时也改善了声谐振器装置的结构稳定性，而不会不利地影响其性能。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式