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1. 发明授权

US10381251B2 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 有权
公开(公告)号：US10381251B2
公开(公告)日：2019-08-13
申请号：US13492341
申请日：2012-06-08
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/677 , B65G1/04
摘要： An overhead hoist transport vehicle comprising: an overhead hoist; a translating stage; and a gripper coupled to the translating stage, the gripper being configured to grip a material unit; wherein the overhead hoist is configured to transport the material unit to one of a load port and a storage location by performing operations comprising: the overhead hoist being configured to vertically move the gripper to the load port and the storage location; and the translating stage being configured to horizontally move the overhead hoist to the load port and the storage location; and wherein the load port is beneath an overhead rail; and wherein at least a portion of the storage location is disposed lateral to the overhead rail.

2. 发明申请

US20120288348A1 Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists 审中-公开
标题翻译：基于垂直转盘和架空起重机组合的半导体制造自动化物料搬运系统
公开(公告)号：US20120288348A1
公开(公告)日：2012-11-15
申请号：US13492341
申请日：2012-06-08
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/677 , B25J11/00 , B66C19/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/67736 , H01L21/67769
摘要： An overhead hoist transport vehicle comprising: an overhead hoist; a translating stage; and a gripper coupled to the translating stage, the gripper being configured to grip a material unit; wherein the overhead hoist is configured to transport the material unit to one of a load port and a storage location by performing operations comprising: the overhead hoist being configured to vertically move the gripper to the load port and the storage location; and the translating stage being configured to horizontally move the overhead hoist to the load port and the storage location; and wherein the load port is beneath an overhead rail; and wherein at least a portion of the storage location is disposed lateral to the overhead rail.
摘要翻译：一种悬架式起重运输车辆，包括：顶升式起重机; 翻译阶段以及夹持器，其联接到所述平移台，所述夹持器构造成夹持材料单元; 其中所述架空升降机被构造成通过执行操作来将所述材料单元输送到装载端口和存储位置中的一个，所述操作包括：所述架空式起重机构造成将所述夹具垂直移动到所述装载端口和所述存储位置; 并且所述平移台被构造成将所述架空升降机水平地移动到所述负载端口和所述存储位置; 并且其中所述负载端口在架空导轨下方; 并且其中所述存储位置的至少一部分设置在所述架空导轨的侧面。

3. 发明授权

US08197172B2 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 有权
标题翻译：基于垂直转盘和天花板升降机的组合的半导体制造的自动材料处理系统
公开(公告)号：US08197172B2
公开(公告)日：2012-06-12
申请号：US12724194
申请日：2010-03-15
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/00 , G06F19/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle. The storage unit is at least partially open to allow the movable shelf to move to the second position, thereby allowing the overhead hoist to access a material unit directly from the movable shelf for subsequent transport along the track between various locations within a product manufacturing facility.
摘要翻译：一种高效率的自动物料搬运系统（AMHS），允许架空式起重运输车辆直接向系统中包含的一个或多个WIP存储单元加载和卸载在制品（WIP）零件。 AMHS包括架空式起重运输子系统和至少一个具有多个存储箱的垂直转盘储盘器。架空式起重运输子系统包括沿悬挂轨道行进的架空式起重运输车辆，该悬挂轨道限定了与转盘存放机相邻的预定路线，从而允许架空式起重运输车辆直接从其中一个存储箱进入WIP部分。存储箱中的至少一个包括可操作地沿着转盘路径从第一位置横向移动到靠近顶部起重运输车辆的第二位置的可移动搁架。存储单元至少部分地打开以允许可移动搁板移动到第二位置，从而允许架空起重机直接从可移动搁架接近材料单元，以便随后在产品制造设施内的各个位置之间沿轨道运输。

4. 发明授权

US07771153B2 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 有权
标题翻译：基于垂直转盘和天花板升降机的组合的半导体制造的自动材料处理系统
公开(公告)号：US07771153B2
公开(公告)日：2010-08-10
申请号：US11652707
申请日：2007-01-12
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/00 , G06F19/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route running adjacent to the stocker, allowing the vehicle to access a WIP part directly from a storage bin. At least one storage bin includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the vehicle. The storage unit is partially open to allow the movable shelf to move to the second position, allowing the hoist to access a material unit directly from the shelf for subsequent transport along the track.
摘要翻译：一种自动物料搬运系统（AMHS），允许架空式起重运输车辆直接向系统中包括的WIP存储单元加载和卸载在制品（WIP）零件。 AMHS包括架空式起重运输子系统和具有多个存储箱的垂直转盘储盘器。子系统包括沿悬挂轨道行进的架空式起重运输车辆，该悬挂轨道限定与储料器相邻的预定路线，允许车辆直接从存储箱接入WIP部件。至少一个存储箱包括可操作地沿着转盘路径从第一位置横向移动到靠近车辆的第二位置的可移动搁架。存储单元部分打开以允许可移动搁架移动到第二位置，允许提升机直接从搁板接近材料单元，以便随后沿着轨道运输。

5. 发明申请

US20100174405A1 Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists 有权
标题翻译：基于垂直转盘和架空起重机组合的半导体制造自动化物料搬运系统
公开(公告)号：US20100174405A1
公开(公告)日：2010-07-08
申请号：US12724194
申请日：2010-03-15
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/677 , G06F17/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle. The storage unit is at least partially open to allow the movable shelf to move to the second position, thereby allowing the overhead hoist to access a material unit directly from the movable shelf for subsequent transport along the track between various locations within a product manufacturing facility.
摘要翻译：一种高效率的自动物料搬运系统（AMHS），允许架空式起重运输车辆直接向系统中包含的一个或多个WIP存储单元加载和卸载在制品（WIP）零件。 AMHS包括架空式起重运输子系统和至少一个具有多个存储箱的垂直转盘储盘器。架空式起重运输子系统包括沿悬挂轨道行进的架空式起重运输车辆，该悬挂轨道限定了与转盘存放机相邻的预定路线，从而允许架空式起重运输车辆直接从其中一个存储箱进入WIP部分。存储箱中的至少一个包括可操作地沿着转盘路径从第一位置横向移动到靠近顶部起重运输车辆的第二位置的可移动搁架。存储单元至少部分地打开以允许可移动搁板移动到第二位置，从而允许架空起重机直接从可移动搁架接近材料单元，以便随后在产品制造设施内的各个位置之间沿轨道运输。

6. 发明授权

US07165927B2 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 有权
标题翻译：基于垂直转盘和天花板升降机的组合的半导体制造的自动材料处理系统
公开(公告)号：US07165927B2
公开(公告)日：2007-01-23
申请号：US10393526
申请日：2003-03-20
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/00 , G06F19/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load/ unload parts directly to/from storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route. The route passes over the stocker, which allows the vehicle to access parts directly from one of the storage bins. The selected bin is positioned at the top of the stocker underneath the track. Next, the vehicle is moved along the track to a position above the selected bin. The hoist is then lowered parallel to the longitudinal axis of the stocker toward the selected bin. Finally, the hoist is operated to pick parts directly from the bin, or to place parts in the bin.
摘要翻译：自动物料搬运系统（AMHS），允许架空式起重运输车辆直接将零件加载/卸载到系统中包含的存储单元。 AMHS包括架空式起重运输子系统和具有多个存储箱的垂直转盘储盘器。子系统包括沿着限定预定路线的悬挂轨道行进的架空式起重运输车辆。该路线通过储料器，这允许车辆直接从一个存储箱中接入零件。所选的仓位于轨道下方的储料架的顶部。接下来，车辆沿着轨道移动到所选仓箱上方的位置。然后将起重机平行于储料架的纵向轴线朝向所选择的箱体下降。最后，起重机操作直接从货盘上取下零件，或将零件放在料仓中。

7. 发明申请

US20110241845A1 Automated Material Handling System with Identification Features 审中-公开
标题翻译：具有识别功能的自动化物料搬运系统
公开(公告)号：US20110241845A1
公开(公告)日：2011-10-06
申请号：US12754922
申请日：2010-04-06
申请人： Robert P. Sullivan , Thomas R. Mariano , Clinton M. Haris , Richard J. Pickreign
发明人： Robert P. Sullivan , Thomas R. Mariano , Clinton M. Haris , Richard J. Pickreign
IPC分类号： H04Q5/22
CPC分类号： H01L21/67294
摘要： Amongst other things, a material handling system comprises a controller; a transport system, the transport system comprising transport track sections and at least one transport vehicle, the at least one transport vehicle configured to move along the transport track sections and configured to transport a carrier; and at least one identification tag reader located along a particular transport track section, the at least one identification tag reader being configured to read an identification tag of the carrier being transported by the at least one transport vehicle and being further configured to send a information signal to the controller; wherein the controller is configured to verify at least a location of the carrier based on the information signal.
摘要翻译：其中，材料处理系统包括控制器; 运输系统，所述运输系统包括运输轨道部分和至少一个运输车辆，所述至少一个运输车辆被配置成沿着所述运输轨道部分移动并且被配置成运输运输工具; 以及沿着特定传输轨道部分定位的至少一个识别标签读取器，所述至少一个识别标签读取器被配置为读取由所述至少一个传输车辆传送的所述载体的识别标签，并且还被配置为发送信息信号给控制器其中所述控制器被配置为基于所述信息信号来验证所述载波的至少一个位置。

8. 发明授权

US08874274B2 Cryopump network 有权
标题翻译：冷冻网络
公开(公告)号：US08874274B2
公开(公告)日：2014-10-28
申请号：US12864142
申请日：2009-01-22
申请人： Randall J. McDonald , Oliver J. Dumas , Robert P. Sullivan , John J. Varone , Joseph Chopy, Jr. , Daniel R. Jankins
发明人： Randall J. McDonald , Oliver J. Dumas , Robert P. Sullivan , John J. Varone , Joseph Chopy, Jr. , Daniel R. Jankins
IPC分类号： G05D7/00 , G05B19/18 , H04L12/403 , G05B9/02
CPC分类号： H04L12/403 , G05B9/02
摘要： A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.
摘要翻译：真空网络控制系统包括被配置为控制系统的操作过程的多个节点。多个节点在网络环或其他拓扑中被配置为用于控制操作过程的可选主节点。控制可以分布在每个节点之间，并在每个节点之间传递。网络上的每个节点监视相邻的网络连接器，以检测网络中的故障。响应于检测到的故障，断开连接被映射到故障，并且重新配置网络拓扑以在节点之间和外部设备之间继续通信。

9. 发明授权

US4474497A Furnace maintenance platform 失效
标题翻译：炉维修平台
公开(公告)号：US4474497A
公开(公告)日：1984-10-02
申请号：US485100
申请日：1983-04-14
申请人： Robert P. Sullivan
发明人： Robert P. Sullivan
IPC分类号： F22B37/00 , F27D1/16 , F27D21/00 , F27D99/00 , F27D23/00
CPC分类号： F27D99/00 , F27D1/16 , F27D2021/0057 , Y10S122/14
摘要： A maintenance platform for reaching the upper area of the furnace (10) of a steam generator that can be quickly and easily assembled during a maintenance shutdown. The grid or frame of the platform is made up of a plurality of beams (22) extending into the furnace from opposite furnace walls (19). Cables (50) from the roof (60) support one end of the beams. Planking (66, 68) that interlocks (62, 64, 70) with the beams (22) completes the platform.
摘要翻译：一种用于到达蒸汽发生器的炉子（10）的上部区域的维护平台，其可以在维护停机期间快速且容易地组装。平台的格栅或框架由从相对的炉壁（19）延伸到炉中的多个梁（22）构成。来自屋顶（60）的电缆（50）支撑梁的一端。与梁（22）互锁（62,64,70）的平板（66,68）完成平台。

10. 发明申请

US20110245964A1 Self Aligning Automated Material Handling System 审中-公开
标题翻译：自对准自动化物料搬运系统
公开(公告)号：US20110245964A1
公开(公告)日：2011-10-06
申请号：US12754699
申请日：2010-04-06
申请人： Robert P. Sullivan , Michael L. Bufano
发明人： Robert P. Sullivan , Michael L. Bufano
IPC分类号： H01L21/677 , H01L21/683
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/68 , H01L21/68707
摘要： A semiconductor workpiece processing system comprises at least one processing tool; a transport section configured to transport carriers to and from the processing tool; and a transport vehicle movably mounted on the transport section; wherein the transport vehicle is configured to: sense a location of a transport carrier alignment feature; adjust a location of a transport vehicle gripper based on the location of the transport carrier alignment feature; sense an attitude of the gripper at a point of engagement with the transport carrier; and adjust the location of the gripper based on the attitude of the gripper.
摘要翻译：半导体工件处理系统包括至少一个处理工具; 运送部，其构造成将运送工具运送到加工工具和从处理工具运送; 以及可移动地安装在所述运输部分上的运输车辆; 其中所述运输车辆被配置为：感测运输工具对准特征的位置; 基于运输工具对准特征的位置来调整运输车辆夹具的位置; 在与运输工具的接合点处感觉到夹具的姿态; 并且基于夹具的姿态来调整夹持器的位置。

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