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1. 发明授权

US10381251B2 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 有权
公开(公告)号：US10381251B2
公开(公告)日：2019-08-13
申请号：US13492341
申请日：2012-06-08
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/677 , B65G1/04
摘要： An overhead hoist transport vehicle comprising: an overhead hoist; a translating stage; and a gripper coupled to the translating stage, the gripper being configured to grip a material unit; wherein the overhead hoist is configured to transport the material unit to one of a load port and a storage location by performing operations comprising: the overhead hoist being configured to vertically move the gripper to the load port and the storage location; and the translating stage being configured to horizontally move the overhead hoist to the load port and the storage location; and wherein the load port is beneath an overhead rail; and wherein at least a portion of the storage location is disposed lateral to the overhead rail.

2. 发明申请

US20120288348A1 Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists 审中-公开
标题翻译：基于垂直转盘和架空起重机组合的半导体制造自动化物料搬运系统
公开(公告)号：US20120288348A1
公开(公告)日：2012-11-15
申请号：US13492341
申请日：2012-06-08
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/677 , B25J11/00 , B66C19/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/67736 , H01L21/67769
摘要： An overhead hoist transport vehicle comprising: an overhead hoist; a translating stage; and a gripper coupled to the translating stage, the gripper being configured to grip a material unit; wherein the overhead hoist is configured to transport the material unit to one of a load port and a storage location by performing operations comprising: the overhead hoist being configured to vertically move the gripper to the load port and the storage location; and the translating stage being configured to horizontally move the overhead hoist to the load port and the storage location; and wherein the load port is beneath an overhead rail; and wherein at least a portion of the storage location is disposed lateral to the overhead rail.
摘要翻译：一种悬架式起重运输车辆，包括：顶升式起重机; 翻译阶段以及夹持器，其联接到所述平移台，所述夹持器构造成夹持材料单元; 其中所述架空升降机被构造成通过执行操作来将所述材料单元输送到装载端口和存储位置中的一个，所述操作包括：所述架空式起重机构造成将所述夹具垂直移动到所述装载端口和所述存储位置; 并且所述平移台被构造成将所述架空升降机水平地移动到所述负载端口和所述存储位置; 并且其中所述负载端口在架空导轨下方; 并且其中所述存储位置的至少一部分设置在所述架空导轨的侧面。

3. 发明授权

US08197172B2 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 有权
标题翻译：基于垂直转盘和天花板升降机的组合的半导体制造的自动材料处理系统
公开(公告)号：US08197172B2
公开(公告)日：2012-06-12
申请号：US12724194
申请日：2010-03-15
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/00 , G06F19/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle. The storage unit is at least partially open to allow the movable shelf to move to the second position, thereby allowing the overhead hoist to access a material unit directly from the movable shelf for subsequent transport along the track between various locations within a product manufacturing facility.
摘要翻译：一种高效率的自动物料搬运系统（AMHS），允许架空式起重运输车辆直接向系统中包含的一个或多个WIP存储单元加载和卸载在制品（WIP）零件。 AMHS包括架空式起重运输子系统和至少一个具有多个存储箱的垂直转盘储盘器。架空式起重运输子系统包括沿悬挂轨道行进的架空式起重运输车辆，该悬挂轨道限定了与转盘存放机相邻的预定路线，从而允许架空式起重运输车辆直接从其中一个存储箱进入WIP部分。存储箱中的至少一个包括可操作地沿着转盘路径从第一位置横向移动到靠近顶部起重运输车辆的第二位置的可移动搁架。存储单元至少部分地打开以允许可移动搁板移动到第二位置，从而允许架空起重机直接从可移动搁架接近材料单元，以便随后在产品制造设施内的各个位置之间沿轨道运输。

4. 发明授权

US07771153B2 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 有权
标题翻译：基于垂直转盘和天花板升降机的组合的半导体制造的自动材料处理系统
公开(公告)号：US07771153B2
公开(公告)日：2010-08-10
申请号：US11652707
申请日：2007-01-12
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/00 , G06F19/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route running adjacent to the stocker, allowing the vehicle to access a WIP part directly from a storage bin. At least one storage bin includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the vehicle. The storage unit is partially open to allow the movable shelf to move to the second position, allowing the hoist to access a material unit directly from the shelf for subsequent transport along the track.
摘要翻译：一种自动物料搬运系统（AMHS），允许架空式起重运输车辆直接向系统中包括的WIP存储单元加载和卸载在制品（WIP）零件。 AMHS包括架空式起重运输子系统和具有多个存储箱的垂直转盘储盘器。子系统包括沿悬挂轨道行进的架空式起重运输车辆，该悬挂轨道限定与储料器相邻的预定路线，允许车辆直接从存储箱接入WIP部件。至少一个存储箱包括可操作地沿着转盘路径从第一位置横向移动到靠近车辆的第二位置的可移动搁架。存储单元部分打开以允许可移动搁架移动到第二位置，允许提升机直接从搁板接近材料单元，以便随后沿着轨道运输。

5. 发明申请

US20100174405A1 Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists 有权
标题翻译：基于垂直转盘和架空起重机组合的半导体制造自动化物料搬运系统
公开(公告)号：US20100174405A1
公开(公告)日：2010-07-08
申请号：US12724194
申请日：2010-03-15
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/677 , G06F17/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle. The storage unit is at least partially open to allow the movable shelf to move to the second position, thereby allowing the overhead hoist to access a material unit directly from the movable shelf for subsequent transport along the track between various locations within a product manufacturing facility.
摘要翻译：一种高效率的自动物料搬运系统（AMHS），允许架空式起重运输车辆直接向系统中包含的一个或多个WIP存储单元加载和卸载在制品（WIP）零件。 AMHS包括架空式起重运输子系统和至少一个具有多个存储箱的垂直转盘储盘器。架空式起重运输子系统包括沿悬挂轨道行进的架空式起重运输车辆，该悬挂轨道限定了与转盘存放机相邻的预定路线，从而允许架空式起重运输车辆直接从其中一个存储箱进入WIP部分。存储箱中的至少一个包括可操作地沿着转盘路径从第一位置横向移动到靠近顶部起重运输车辆的第二位置的可移动搁架。存储单元至少部分地打开以允许可移动搁板移动到第二位置，从而允许架空起重机直接从可移动搁架接近材料单元，以便随后在产品制造设施内的各个位置之间沿轨道运输。

6. 发明授权

US07165927B2 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 有权
标题翻译：基于垂直转盘和天花板升降机的组合的半导体制造的自动材料处理系统
公开(公告)号：US07165927B2
公开(公告)日：2007-01-23
申请号：US10393526
申请日：2003-03-20
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/00 , G06F19/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load/ unload parts directly to/from storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route. The route passes over the stocker, which allows the vehicle to access parts directly from one of the storage bins. The selected bin is positioned at the top of the stocker underneath the track. Next, the vehicle is moved along the track to a position above the selected bin. The hoist is then lowered parallel to the longitudinal axis of the stocker toward the selected bin. Finally, the hoist is operated to pick parts directly from the bin, or to place parts in the bin.
摘要翻译：自动物料搬运系统（AMHS），允许架空式起重运输车辆直接将零件加载/卸载到系统中包含的存储单元。 AMHS包括架空式起重运输子系统和具有多个存储箱的垂直转盘储盘器。子系统包括沿着限定预定路线的悬挂轨道行进的架空式起重运输车辆。该路线通过储料器，这允许车辆直接从一个存储箱中接入零件。所选的仓位于轨道下方的储料架的顶部。接下来，车辆沿着轨道移动到所选仓箱上方的位置。然后将起重机平行于储料架的纵向轴线朝向所选择的箱体下降。最后，起重机操作直接从货盘上取下零件，或将零件放在料仓中。

7. 发明申请

US20110241845A1 Automated Material Handling System with Identification Features 审中-公开
标题翻译：具有识别功能的自动化物料搬运系统
公开(公告)号：US20110241845A1
公开(公告)日：2011-10-06
申请号：US12754922
申请日：2010-04-06
申请人： Robert P. Sullivan , Thomas R. Mariano , Clinton M. Haris , Richard J. Pickreign
发明人： Robert P. Sullivan , Thomas R. Mariano , Clinton M. Haris , Richard J. Pickreign
IPC分类号： H04Q5/22
CPC分类号： H01L21/67294
摘要： Amongst other things, a material handling system comprises a controller; a transport system, the transport system comprising transport track sections and at least one transport vehicle, the at least one transport vehicle configured to move along the transport track sections and configured to transport a carrier; and at least one identification tag reader located along a particular transport track section, the at least one identification tag reader being configured to read an identification tag of the carrier being transported by the at least one transport vehicle and being further configured to send a information signal to the controller; wherein the controller is configured to verify at least a location of the carrier based on the information signal.
摘要翻译：其中，材料处理系统包括控制器; 运输系统，所述运输系统包括运输轨道部分和至少一个运输车辆，所述至少一个运输车辆被配置成沿着所述运输轨道部分移动并且被配置成运输运输工具; 以及沿着特定传输轨道部分定位的至少一个识别标签读取器，所述至少一个识别标签读取器被配置为读取由所述至少一个传输车辆传送的所述载体的识别标签，并且还被配置为发送信息信号给控制器其中所述控制器被配置为基于所述信息信号来验证所述载波的至少一个位置。

8. 发明授权

US06990721B2 Growth model automated material handling system 有权
标题翻译：生长模型自动化材料处理系统
公开(公告)号：US06990721B2
公开(公告)日：2006-01-31
申请号：US10393728
申请日：2003-03-21
申请人： Thomas R. Mariano , Timothy A. McCabe , Carl Johnson
发明人： Thomas R. Mariano , Timothy A. McCabe , Carl Johnson
IPC分类号： B23P21/00 , B65G49/07
CPC分类号： H01L21/67727 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/68707 , Y10S414/135 , Y10S414/14 , Y10T29/49904 , Y10T29/5124 , Y10T29/53548
摘要： A method for installing an automated material handling system in a semiconductor fabrication facility capable of accommodating a predetermined number of fabrication bays. The handling system has a set of elements including material storage, interbay transport, and intrabay transport elements corresponding to the predetermined number of fabrication bays. The method comprises arranging at least some of the material storage, interbay transport and intrabay transport elements into handling system subsets, and installing one or more of the subsets into the fabrication facility. Each subset has at least one or more corresponding ones of the material storage, interbay transport and intrabay transport elements so that when installed each subset forms a transport circuit allowing substantially unrestricted bi-directional travel of semiconductor device holders between the material storage and at least one of the fabrication bays. The installation of one or more of the subsets into the fabrication facility is accomplished before installation of any element other of the handling system subsets.
摘要翻译：一种在能够容纳预定数量的制造槽的半导体制造设备中安装自动化材料处理系统的方法。处理系统具有一组元件，包括与预定数量的制造槽相对应的材料储存，间隔运输和内部运输元件。所述方法包括将所述材料储存，间隔运输和内部运输元件中的至少一些布置到处理系统子集中，以及将所述子集中的一个或多个安装到所述制造设施中。每个子集具有至少一个或多个对应的材料存储，间隔间传输和内部传输元件中的一个，使得当安装时每个子集形成传输电路，允许半导体器件保持器在材料存储器与至少一个的制造海湾。将一个或多个子集安装到制造设备中之前，在安装任何其他处理系统子集的任何元素之前完成。

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