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    • 2. 发明授权
    • Linear actuator and vacuum control device
    • 线性致动器和真空控制装置
    • US09234586B2
    • 2016-01-12
    • US14519426
    • 2014-10-21
    • CKD CORPORATION
    • Masayuki KouketsuHiroshi Itafuji
    • F16K31/00F16K31/02F16J1/01F16K51/02G05D16/10F16K31/122F16K41/04F15B15/14G05D16/20
    • F16J1/01F15B15/1461F16K31/1221F16K41/04F16K51/02G05D16/10G05D16/2013
    • A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.
    • 线性致动器与其中产生等离子体的真空室一起使用。 线性致动器包括通过设置在真空室中的开口在真空室的外部和内部之间延伸以便直线往复运动的移动构件,构造成使移动构件往复移动的驱动部分,覆盖移动构件的盖 以及滑动密封部分,其在允许盖在其上滑动的同时在真空室的内部和外部之间提供密封。 盖子覆盖移动部件的范围,移动部件移动到真空室的内部和外部,同时移动部件通过驱动部分往复运动,并且盖子的外表面的气体吸附量较小 每单位面积比移动构件的外表面。
    • 5. 发明授权
    • Liquid control apparatus
    • 液体控制装置
    • US09266130B2
    • 2016-02-23
    • US13752232
    • 2013-01-28
    • CKD CORPORATION
    • Masayuki KouketsuHiroshi Itafuji
    • B05B9/03B01B1/00B01D1/14
    • B05B9/03B01B1/005B01D1/14
    • A liquid control apparatus 30 controls a spread mode of a liquid. The liquid control apparatus 30 includes a main body 31 having an upper surface 31c to which the liquid is supplied, and a mesh 47 woven in a net-like shape and provided to be in contact with the upper surface 31c. An inhibiting groove 41 is provided in the upper surface 31c in a portion that is in contact with the mesh 47. An introducing port 33b for introducing a gas from the inside of the main body 31 into the inhibiting groove 41 is provided in the main body 31. The introducing port 33b is formed such that the gas is introduced into the inhibiting groove 41 substantially parallel to the upper surface 31c.
    • 液体控制装置30控制液体的扩散模式。 液体控制装置30包括具有供给液体的上表面31c的主体31和网状47,网47形成为与上表面31c接触。 在上表面31c中设置有与网47接触的部分的抑制槽41.用于将主体31内部的气体引入抑制槽41的引入口33b设置在主体 引入口33b形成为使得气体基本上平行于上表面31c引入到抑制槽41中。
    • 9. 发明授权
    • Vacuum control valve and vacuum control apparatus
    • 真空控制阀和真空控制装置
    • US09234595B2
    • 2016-01-12
    • US13957299
    • 2013-08-01
    • CKD CORPORATION
    • Masayuki KouketsuHiroshi Itafuji
    • F16K31/00F16K31/02F16K3/06F16K31/126F16K51/02F16J1/01H01L21/67
    • F16K3/06F16J1/01F16K31/1262F16K51/02H01L21/67017
    • A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.
    • 连接在真空室和真空泵之间的真空控制阀包括具有形成在真空流路中的阀座的控制阀主体,通过执行线性运动来调节升程来操纵阀开口的阀体,杆 其从产生驱动力的线性驱动单元传递驱动力,在允许杆滑动的同时密封真空流路的滑动/密封构件以及覆盖杆的滑动范围的圆筒构件。 滑动范围包括从阀体流路侧向外侧移动的范围。 圆柱形构件具有外周面,外周面的每单位面积的工作流体吸收量小于杆的外表面的工作流体吸收量。