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    • 1. 发明授权
    • Fabricating method of nano structure for antireflection and fabricating method of photo device integrated with antireflection nano structure
    • 抗反射纳米结构的制造方法和抗反射纳米结构的光器件制造方法
    • US09123832B2
    • 2015-09-01
    • US13702172
    • 2010-11-30
    • Chan Il YeoYong Tak LeeYoung Min Song
    • Chan Il YeoYong Tak LeeYoung Min Song
    • H01L21/00H01L33/00B81C1/00H01L33/22
    • H01L33/005B81C1/00031H01L33/22
    • A method of fabricating nanostructure for antireflection and a method of fabricating a photo device integrated with the nanostructure for antireflection are provided. The fabrication of the nanostructure for antireflection includes coating a solution containing a combination of metal ions with organic or inorganic ions on a substrate, sintering the coated solution using an annealing process to grow nanoscale metal particles, and chemically etching the substrate using the metal particles as mask or accelerator to form a subwavelength nanostructure on the surface of the substrate, thereby manufacturing the nanostructure for antireflection without an apparatus requiring a vacuum state using a simple method for a short amount of time to minimize reflection of light at an interface between a semiconductor material and the air, and producing a photo device having good luminous efficiency and performance at low cost in large quantities by applying it to the photo device.
    • 提供一种制造用于抗反射的纳米结构的方法,以及制造与纳米结构集成的光反射装置的方法。 用于抗反射的纳米结构的制造包括将包含金属离子与有机或无机离子的组合的溶液涂布在基板上,使用退火工艺烧结涂覆的溶液以生长纳米级金属颗粒,以及使用金属颗粒化学蚀刻基板作为 掩模或加速剂以在衬底的表面上形成亚波长纳米结构,由此制造用于抗反射的纳米结构,而无需使用简单方法在短时间内需要真空状态的装置,以使半导体材料之间的界面处的光的反射最小化 和空气,并且通过将其应用于照相装置,以大量的方式生产具有良好的发光效率和性能的照相装置。
    • 2. 发明申请
    • FABRICATING METHOD OF NANO STRUCTURE FOR ANTIREFLECTION AND FABRICATING METHOD OF PHOTO DEVICE INTEGRATED WITH ANTIREFLECTION NANO STRUCTURE
    • 纳米结构抗逆选择和制造方法的制备方法与抗反射纳米结构集成的照相装置
    • US20130078750A1
    • 2013-03-28
    • US13702172
    • 2010-11-30
    • Chan Il YeoYong Tak LeeYoung Min Song
    • Chan Il YeoYong Tak LeeYoung Min Song
    • H01L33/00
    • H01L33/005B81C1/00031H01L33/22
    • A method of fabricating nanostructure for antireflection and a method of fabricating a photo device integrated with the nanostructure for antireflection are provided. The fabrication of the nanostructure for antireflection includes coating a solution containing a combination of metal ions with organic or inorganic ions on a substrate, sintering the coated solution using an annealing process to grow nanoscale metal particles, and chemically etching the substrate using the metal particles as mask or accelerator to form a subwavelength nanostructure on the surface of the substrate, thereby manufacturing the nanostructure for antireflection without an apparatus requiring a vacuum state using a simple method for a short amount of time to minimize reflection of light at an interface between a semiconductor material and the air, and producing a photo device having good luminous efficiency and performance at low cost in large quantities by applying it to the photo device.
    • 提供一种制造用于抗反射的纳米结构的方法,以及制造与纳米结构集成的光反射装置的方法。 用于抗反射的纳米结构的制造包括将包含金属离子与有机或无机离子的组合的溶液涂布在基板上,使用退火工艺烧结涂覆的溶液以生长纳米级金属颗粒,以及使用金属颗粒化学蚀刻基板作为 掩模或加速剂以在衬底的表面上形成亚波长纳米结构,由此制造用于抗反射的纳米结构,而无需使用简单方法在短时间内需要真空状态的装置,以使半导体材料之间的界面处的光的反射最小化 和空气,并且通过将其应用于照相装置,以大量的方式生产具有良好的发光效率和性能的照相装置。
    • 3. 发明申请
    • Method of Fabricating Antireflective Grating Pattern and Method of Fabricating Optical Device Integrated with Antireflective Grating Pattern
    • 制造防反射光栅图案的方法和与抗反射光栅图案集成的光学器件的制造方法
    • US20110092007A1
    • 2011-04-21
    • US12999148
    • 2009-12-22
    • Yong Tak LeeYoung Min Song
    • Yong Tak LeeYoung Min Song
    • H01L33/44G03F7/00
    • G02B5/1857G03F7/0005
    • A method of fabricating an antireflective grating pattern and a method of fabricating an optical device integrated with an antireflective grating pattern are provided. The method of fabricating the antireflective grating pattern includes forming a photoresist (PR) pattern on a substrate using a hologram lithography process, forming a PR lens pattern having a predetermined radius of curvature by reflowing the PR pattern, and etching the entire surface of the substrate including the PR lens pattern to form a wedge-type or parabola-type antireflective subwavelength grating (SWG) pattern having a pointed tip on a top surface of the substrate. In this method, a fabrication process is simplified, the reflection of light caused by a difference in refractive index between the air and a semiconductor material can be minimized, and the antireflective grating pattern can be easily applied to optical devices.
    • 提供了制造抗反射光栅图案的方法和制造与抗反射光栅图案集成的光学器件的方法。 制造抗反射光栅图案的方法包括使用全息光刻工艺在基板上形成光致抗蚀剂(PR)图案,通过回流PR图案形成具有预定曲率半径的PR​​透镜图案,并蚀刻基板的整个表面 包括PR透镜图案以形成在基板的顶表面上具有尖尖的楔形或抛物线型抗反射亚波长光栅(SWG)图案。 在该方法中,简化了制造工艺,可以将由空气和半导体材料之间的折射率差引起的光的反射最小化,并且可以将抗反射光栅图案容易地应用于光学器件。
    • 5. 发明授权
    • Method of fabricating antireflective grating pattern and method of fabricating optical device integrated with antireflective grating pattern
    • 制造抗反射光栅图案的方法和制造与抗反射光栅图案集成的光学装置的方法
    • US08647903B2
    • 2014-02-11
    • US12999148
    • 2009-12-22
    • Yong Tak LeeYoung Min Song
    • Yong Tak LeeYoung Min Song
    • H01L21/00
    • G02B5/1857G03F7/0005
    • A method of fabricating an antireflective grating pattern and a method of fabricating an optical device integrated with an antireflective grating pattern are provided. The method of fabricating the antireflective grating pattern includes forming a photoresist (PR) pattern on a substrate using a hologram lithography process, forming a PR lens pattern having a predetermined radius of curvature by reflowing the PR pattern, and etching the entire surface of the substrate including the PR lens pattern to form a wedge-type or parabola-type antireflective subwavelength grating (SWG) pattern having a pointed tip on a top surface of the substrate. In this method, a fabrication process is simplified, the reflection of light caused by a difference in refractive index between the air and a semiconductor material can be minimized, and the antireflective grating pattern can be easily applied to optical devices.
    • 提供了制造抗反射光栅图案的方法和制造与抗反射光栅图案集成的光学器件的方法。 制造抗反射光栅图案的方法包括使用全息光刻工艺在基板上形成光致抗蚀剂(PR)图案,通过回流PR图案形成具有预定曲率半径的PR​​透镜图案,并蚀刻基板的整个表面 包括PR透镜图案以形成在基板的顶表面上具有尖尖的楔形或抛物线型抗反射亚波长光栅(SWG)图案。 在该方法中,简化了制造工艺,可以将由空气和半导体材料之间的折射率差引起的光的反射最小化,并且可以将抗反射光栅图案容易地应用于光学器件。
    • 7. 发明申请
    • OPTICAL INTERCONNECTION APPARATUS AND METHOD
    • 光学互连装置和方法
    • US20110176765A1
    • 2011-07-21
    • US13121409
    • 2009-09-29
    • Yong Tak Lee
    • Yong Tak Lee
    • G02B6/12G02B6/36
    • G02B6/4249G02B6/4202G02B6/423G02B6/4239Y10T29/49117
    • The present invention relates to the apparatus and method for optical interconnection. The present invention provides an optical interconnection structure comprising: a substrate on which double side perforated multi-hole through a predetermined region is formed; bottom hole which is etched and tapered for optical fiber array is bigger than upper hole which is etched for the optical devices. The present invention provides the optical interconnection structure that can facilitate the optical interconnection between the active optoelectronic devices that transmit/receive the optical signals and the optical fiber array, making it possible to align easily and acutely between the optical devices and optical fiber array.
    • 本发明涉及光互连的装置和方法。 本发明提供一种光学互连结构,包括:基板,其上形成有穿过预定区域的双面穿孔多孔; 针对光纤阵列蚀刻和锥形的底孔大于蚀刻用于光学器件的上孔。 本发明提供了可以促进发送/接收光信号的有源光电子器件与光纤阵列之间的光学互连的光学互连结构,使得可以在光学器件和光纤阵列之间容易且锐利地对准。
    • 9. 发明申请
    • AN OPTICAL CONNECTION SYSTEM
    • 光学连接系统
    • US20120082413A1
    • 2012-04-05
    • US13147560
    • 2010-02-04
    • Kamal AlamehYong Tak Lee
    • Kamal AlamehYong Tak Lee
    • G02B6/43G02B6/42
    • G02B6/43G02B6/4204G02B6/4249H01S5/02288H01S5/0262H01S5/18341H04B10/801
    • The present disclosure provides an optical connection system which comprises optical components that include a plurality of vertical cavity surface emitting lasers (VCSELs) for emitting modulated light in response to applied electrical signals and a plurality of receivers for receiving the emitted light. The optical components are arranged in at least two monolithically integrated modules each comprising at least two of the optical components. The optical connection system further comprises at least one light guiding component for guiding the light between the VCSELs and the receivers. The optical connection system also comprises coupling elements for coupling the at least one light guiding component to the monolithically integrated modules such that in use light is transmitted between modules via the at least one light guiding component.
    • 本公开提供了一种光学连接系统,其包括光学部件,其包括用于响应于所施加的电信号发射调制光的多个垂直腔表面发射激光器(VCSEL)和用于接收发射光的多个接收器。 光学部件布置在至少两个单片集成模块中,每个模块包括至少两个光学部件。 光学连接系统还包括用于在VCSEL和接收器之间引导光的至少一个导光部件。 光学连接系统还包括用于将至少一个导光部件耦合到单片集成模块的耦合元件,使得在使用中,光通过至少一个导光部件在模块之间传输。