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1. 发明授权

US08273257B2 Nanotube processing employing solid-condensed-gas-layers 有权
标题翻译：采用固体冷凝气层的纳米管加工
公开(公告)号：US08273257B2
公开(公告)日：2012-09-25
申请号：US12409580
申请日：2009-03-24
申请人： Jene A Golovchenko , Gavin M King , Gregor M Schurmann , Daniel Branton
发明人： Jene A Golovchenko , Gavin M King , Gregor M Schurmann , Daniel Branton
IPC分类号： C23C14/34 , B82B3/00
CPC分类号： C23C14/06 , B82Y10/00 , C23C14/5873 , H01J37/3005 , H01J2237/31732 , H01J2237/3174 , H01L21/02238 , H01L21/0332 , H01L21/0337 , H01L21/30604 , H01L21/3065 , H01L21/31662 , H01L21/3185 , Y10S977/856 , Y10S977/857 , Y10S977/888 , Y10S977/89 , Y10S977/891
摘要： In a method for processing a nanotube, a vapor is condensed to a solid condensate layer on a surface of the nanotube and then at least one selected region of the condensate layer is locally removed by directing a beam of energy at the selected region. The nanotube can be processed with at least a portion of the solid condensate layer maintained on the nanotube surface and thereafter the solid condensate layer removed. Nanotube processing can include, e.g., depositing a material layer on an exposed nanotube surface region where the condensate layer was removed. After forming a solid condensate layer, an electron beam can be directed at a selected region along a nanotube length corresponding to a location for cutting the nanotube, to locally remove the condensate layer at the region, and an ion beam can be directed at the selected region to cut the nanotube at the selected region.
摘要翻译：在用于处理纳米管的方法中，蒸汽被冷凝到纳米管表面上的固体冷凝物层，然后通过在所选择的区域引导能量束来局部去除冷凝物层的至少一个选定区域。纳米管可以用保持在纳米管表面上的固体冷凝物层的至少一部分进行处理，然后除去固体冷凝物层。纳米管加工可以包括例如在去除冷凝物层的暴露的纳米管表面区域上沉积材料层。在形成固体冷凝物层之后，电子束可以沿着与用于切割纳米管的位置相对应的纳米管长度的选定区域被引导，以在该区域局部移除冷凝物层，并且离子束可以被引导到所选择的区域以在所选择的区域切割纳米管。

2. 发明授权

US08092697B2 Molecular characterization with carbon nanotube control 有权
标题翻译：碳纳米管控制的分子表征
公开(公告)号：US08092697B2
公开(公告)日：2012-01-10
申请号：US12214046
申请日：2008-06-16
申请人： Daniel Branton , Jene A Golovchenko
发明人： Daniel Branton , Jene A Golovchenko
IPC分类号： H01B13/06
CPC分类号： G01N27/44791 , B82Y15/00 , C12Q1/6869 , G01N27/44743 , G01N33/48721 , Y10S977/762 , C12Q2565/631
摘要： In a method for fabricating a molecule characterization device, there is formed an aperture in a support structure, and electrical contact pads are formed on a selected surface of the support structure for connection to molecular analysis circuitry. Then at the aperture is provided at least one carbon nanotube. An electrically insulating layer is deposited on walls of the aperture to reduce an extent of the aperture and form a smaller aperture, while depositing substantially no insulating layer on a region of the nanotube that is at the aperture.
摘要翻译：在制造分子表征装置的方法中，在支撑结构中形成孔，并且电连接垫形成在支撑结构的选定表面上，用于连接到分子分析电路。然后在孔处提供至少一个碳纳米管。电绝缘层沉积在孔的壁上以减小孔的范围并形成较小的孔，同时在位于孔的纳米管的区域上基本上不沉积绝缘层。

3. 发明授权

US08221595B2 Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers 有权
标题翻译：采用能量激励局部去除固体冷凝气体层的剥离图案化工艺
公开(公告)号：US08221595B2
公开(公告)日：2012-07-17
申请号：US12381502
申请日：2009-03-12
申请人： Daniel Branton , Jene A Golovchenko , Gavin M King , Warren J MoberlyChan , Gregor M Schurmann
发明人： Daniel Branton , Jene A Golovchenko , Gavin M King , Warren J MoberlyChan , Gregor M Schurmann
IPC分类号： C23C14/34
CPC分类号： C23C14/5873 , B82Y10/00 , C23C14/541 , H01L21/0331 , Y10S977/856 , Y10S977/857 , Y10S977/888 , Y10S977/89 , Y10S977/891
摘要： The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing an ion beam at the selected regions, exposing the structure at the selected regions. A material layer is then deposited on top of the solid condensate layer and the exposed structure at the selected regions. Then the solid condensate layer and regions of the material layer that were deposited on the solid condensate layer are removed, leaving a patterned material layer on the structure.
摘要翻译：本发明提供了一种用于在结构上形成图案化材料层的方法，其通过将蒸气冷凝在结构表面上的固体冷凝物层，然后通过将离子束引导到选定区域而局部去除冷凝物层的选定区域，在所选择的区域暴露结构。然后将材料层沉积在固体冷凝物层的顶部和所选区域处的暴露结构。然后去除沉积在固体冷凝物层上的固体冷凝物层和材料层的区域，在结构上留下图案化的材料层。

4. 发明授权

US07803607B2 Molecular characterization with carbon nanotube control 有权
标题翻译：碳纳米管控制的分子表征
公开(公告)号：US07803607B2
公开(公告)日：2010-09-28
申请号：US12157570
申请日：2008-06-11
申请人： Daniel Branton , Jene A Golovchenko
发明人： Daniel Branton , Jene A Golovchenko
IPC分类号： C12M3/00
CPC分类号： G01N27/44791 , B82Y15/00 , C12Q1/6869 , G01N27/44743 , G01N33/48721 , Y10S977/762 , C12Q2565/631
摘要： There is provided a first reservoir containing a liquid solution including a molecule to be characterized and a second reservoir for containing a liquid solution including a molecule that has been characterized. A solid state support structure is provided including an aperture having a molecular entrance providing a fluidic connection to the first reservoir and a molecular exit providing a fluidic connection to the second reservoir. One carbon nanotube is provided having a longitudinal sidewall disposed as a molecular contacting surface at the aperture. A voltage source is connected in series with the carbon nanotube for electrically biasing the carbon nanotube, and an electrical current monitor is connected in series with the carbon nanotube for monitoring changes in electrical current through the nanotube corresponding to translocation of a molecule through the aperture.
摘要翻译：提供了一种包含液态溶液的第一储存器，该液体溶液包括要表征的分子和用于容纳包含已经表征的分子的液体溶液的第二储存器。提供了一种固态支撑结构，包括具有提供与第一储存器的流体连接的分子入口和提供与第二储存器的流体连接的分子出口的孔。提供了一个碳纳米管，其具有作为孔处的分子接触表面设置的纵向侧壁。电压源与碳纳米管串联连接，用于电子偏置碳纳米管，并且电流监测器与碳纳米管串联连接，用于监测对应于通过孔的分子易位的纳米管的电流的变化。

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