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    • 5. 发明授权
    • Secondary-electron detector and charged particle beam apparatus
    • 二次电子探测器和带电粒子束装置
    • US08766208B2
    • 2014-07-01
    • US13336946
    • 2011-12-23
    • Hiroshi Tateno
    • Hiroshi Tateno
    • H01J3/14G01N23/00
    • H01J37/28H01J37/244H01J2237/2443H01J2237/2448
    • A scintillator 21 is disposed on an incidence side 23a of a photomultiplier 23. A scintillator cap 22 for introducing electrons into the scintillator 21 is disposed around the scintillator 21. The photomultiplier 23 is disposed in a sample chamber 17 with a vacuum seal formed around the photomultiplier 23. An insulating member 25 made of an opaque material is disposed between the scintillator cap 22 and the photomultiplier 23. The insulating member 25 provides insulation between the scintillator cap 22 and the photomultiplier 23. The lateral circumference of the photomultiplier 23 is covered to prevent light from entering the photomultiplier 23. A band filter 27 for blocking the illumination light of an optical microscope 30 is disposed between the scintillator 21 and the incidence side 23a of the photomultiplier 23 to make it possible to conduct simultaneous observations by using the electrons and the optical microscope.
    • 闪烁体21设置在光电倍增器23的入射侧23a上。用于将电子引入闪烁体21的闪烁体帽22设置在闪烁体21的周围。光电倍增管23设置在样品室17中,真空密封件围绕 光电倍增器23.由闪烁体盖22和光电倍增管23之间设置由不透明材料构成的绝缘构件25.绝缘构件25提供闪烁体盖22和光电倍增管23之间的绝缘。光电倍增管23的横向周长被覆盖 防止光进入光电倍增管23.用于阻挡光学显微镜30的照明光的带状滤光器27设置在闪光体21和光电倍增器23的入射侧23a之间,以便可以通过使用电子进行同时观测, 光学显微镜。
    • 6. 发明授权
    • Negative resistance element composed of a semiconductor element
    • 负电阻元件由半导体元件组成
    • US4023196A
    • 1977-05-10
    • US852550
    • 1969-08-25
    • Shoei KataokaHiroshi Tateno
    • Shoei KataokaHiroshi Tateno
    • H01L45/00H01L47/02H01L27/24H01L27/26H01L29/66
    • H01L47/02
    • An improved negative resistance element is disclosed, the element being composed of a semiconductor element and having an effective negative electroconductivity in a high electric field, the element being constructed so that the sectional area of the region near the anode is made larger than the sectional area of the other regions of the element, whereby the distribution of the high electric field in the interior of the element is made uniform along the element, that is, from the region near the anode toward the region near the cathode to thereby broaden the region having an effective negative resistance. Furthermore, and in an alternative embodiment, there is disclosed a negative resistance element in whch the region near the cathode besides the region near the anode is also made to have a larger sectional area than the other regions of the element.
    • 公开了一种改进的负电阻元件,该元件由半导体元件组成并且在高电场中具有有效的负导电性,该元件构造成使得靠近阳极的区域的截面积大于截面积 的元件的其它区域的分布,从而使元件内部的高电场分布沿元件均匀,即从阳极附近的区域朝向阴极附近的区域均匀,从而拓宽具有 有效的负面阻力。 此外,在替代实施例中,公开了除阳极附近的区域之外的阴极附近的负电阻元件还具有比元件的其它区域更大的截面面积。