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1. 发明授权

US09508527B2 Sample base, charged particle beam device and sample observation method 有权
标题翻译：样品基质，带电粒子束装置和样品观察方法
公开(公告)号：US09508527B2
公开(公告)日：2016-11-29
申请号：US14646159
申请日：2013-11-26
申请人： Hitachi High-Technologies Corporation
发明人： Yusuke Ominami , Takashi Ohshima , Sukehiro Ito
IPC分类号： H01J37/26 , H01J37/16 , H01J37/28 , H01J37/20 , H01J37/244 , H01J37/22 , H01J37/18
CPC分类号： H01J37/16 , H01J37/18 , H01J37/20 , H01J37/228 , H01J37/244 , H01J37/28 , H01J2237/2003 , H01J2237/2004 , H01J2237/2006 , H01J2237/2007 , H01J2237/201 , H01J2237/20235 , H01J2237/2445 , H01J2237/24455 , H01J2237/24475 , H01J2237/2608 , H01J2237/2801
摘要： This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform.
摘要翻译：该带电粒子束装置将由带电粒子显微镜产生的初级带电粒子束照射到构成至少一部分试样基底的发光部件上的试样上，除了通过以下方式获得带电粒子显微镜图像检测通过或散射在样品内的带电粒子的发光部件在样品仍然配置在样品平台上的同时通过光学显微镜获得光学显微镜图像。

2. 发明授权

US10241062B2 Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member 有权
公开(公告)号：US10241062B2
公开(公告)日：2019-03-26
申请号：US14774367
申请日：2014-01-22
申请人： Hitachi High-Technologies Corporation
发明人： Yusuke Ominami , Mitsugu Sato , Kenko Uchida , Sadamitsu Aso , Taku Sakazume , Hideo Morishita , Sukehiro Ito , Takashi Ohshima
IPC分类号： H01J37/20 , H01J37/28 , H01J37/244 , G01N23/22 , G01N23/2251 , G01N23/2204
摘要： The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member.

3. 发明授权

US09812288B2 Sample holder with light emitting and transferring elements for a charged particle beam apparatus 有权
公开(公告)号：US09812288B2
公开(公告)日：2017-11-07
申请号：US15119950
申请日：2015-01-09
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Minami Shouji , Takashi Ohshima , Yuusuke Oominami , Hideo Morishita , Kunio Harada
IPC分类号： H01J37/20 , H01J37/16 , H01J37/244 , H01J37/26
CPC分类号： H01J37/244 , H01J37/20 , H01J37/26 , H01J2237/2445 , H01J2237/2808
摘要： The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.

4. 发明授权

US10586674B2 Field emission electron source, method for manufacturing same, and electron beam device 有权
公开(公告)号：US10586674B2
公开(公告)日：2020-03-10
申请号：US16081372
申请日：2016-11-24
申请人： Hitachi High-Technologies Corporation
发明人： Toshiaki Kusunoki , Tomihiro Hashizume , Keigo Kasuya , Takashi Ohshima , Yusuke Sakai , Yoichi Ose , Noriaki Arai
IPC分类号： H01J37/073 , H01J1/22 , H01J1/304 , H01J9/02 , H01J37/28
摘要： In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided with a metal filament, a metal tube joined thereto, a hexaboride tip that emits electrons, and graphite sheets that are independent of the metal tube and the hexaboride tip. The hexaboride tip is arranged so as not to be in structural contact with the metal tube due to the graphite sheets. The hexaboride tip, the graphite sheets, and the metal tube are configured so as to be mechanically and electrically in contact with one another.

5. 发明授权

US10522319B2 Electron beam apparatus 有权
公开(公告)号：US10522319B2
公开(公告)日：2019-12-31
申请号：US16338006
申请日：2016-10-13
申请人： Hitachi High-Technologies Corporation
发明人： Keigo Kasuya , Noriaki Arai , Toshiaki Kusunoki , Takashi Ohshima , Tomihiro Hashizume , Yusuke Sakai
IPC分类号： H01J37/073 , H01J9/02 , H01J37/28
摘要： An electron beam apparatus which can stably achieve high spatial resolution also during low acceleration observation using CeB6 for the CFE electron source is provided. In an electron beam apparatus having a CFE electron source, the emitter of the electron beam of the CFE electron source is Ce hexaboride or a hexaboride of a lanthanoid metal heavier than Ce, the hexaboride emits the electron beam from the {310} plane, and the number of the atoms of the lanthanoid metal on the {310} plane is larger than the number of boron molecules comprising six boron atoms on the {310} plane.

6. 发明授权

US09355815B2 Electron microscope and electron beam detector 有权
标题翻译：电子显微镜和电子束检测器
公开(公告)号：US09355815B2
公开(公告)日：2016-05-31
申请号：US14423081
申请日：2013-08-09
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Shin Imamura , Takashi Ohshima , Yoichi Ose , Kenichi Hirane
IPC分类号： H01J37/00 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/063 , H01J2237/2443 , H01J2237/2445 , H01J2237/28 , H01J2237/2801
摘要： An electron microscope is provided with a scintillator (7) and a light guide (8). The scintillator (7) has an index of refraction greater than the index of refraction of the light guide (8), and an end surface (72) joined to the light guide (8) is formed from a curved surface with a convex shape on the outside. The scintillator (7) is formed by a Y—Al—O based ceramic sintered body represented by the compositional formula (Ln1-xCex)3M5O12 (wherein Ln represents at least one element selected from the group consisting of Y, Gd, La, and Lu, and M represents either or both of Al and Ga).
摘要翻译：电子显微镜设有闪烁体（7）和光导（8）。闪烁体（7）的折射率大于导光体（8）的折射率，与导光体（8）接合的端面（72）由凸形的曲面形成外。闪烁体（7）由组成式（Ln1-xCex）3M5O12表示的Y-Al-O系陶瓷烧结体形成（其中Ln表示选自Y，Gd，La和 Lu和M表示Al和Ga中的任一个或两者）。

7. 发明授权

US09208995B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US09208995B2
公开(公告)日：2015-12-08
申请号：US14379291
申请日：2013-02-15
申请人： Hitachi High-Technologies Corporation
发明人： Yusuke Ominami , Takashi Ohshima , Hiroyuki Ito , Mitsugu Sato , Sukehiro Ito
IPC分类号： G21K5/00 , H01J37/28 , H01J37/16 , H01J37/18 , H01J37/09
CPC分类号： H01J37/28 , H01J37/09 , H01J37/16 , H01J37/18 , H01J2237/0451 , H01J2237/06341 , H01J2237/10 , H01J2237/1405 , H01J2237/164 , H01J2237/2608 , H01J2237/2801
摘要： Provided is a charged particle beam apparatus (111) to and from which a diaphragm (101) can be easily attached and detached, and in which a sample (6) can be arranged under vacuum and under high pressure. The charged particle beam apparatus includes: a lens barrel (3) holding a charged particle source (110) and an electron optical system (1,2,7); a first housing (4) connected to the lens barrel (3); a second housing (100) recessed to inside the first housing (4); a first diaphragm (10) separating the space inside the lens barrel (3) and the space inside the first housing (4), and through which the charged particle beam passes; a second diaphragm (101) separating the spaces inside and outside the recessed section (100a) in the second housing (100), and through which the charged particle beam passes; and a pipe (23) connected to a third housing (22) accommodating the charged particle source (110). The first diaphragm (10) is attached to the pipe (23), and the pipe (23) and the third housing (22) can be attached to and detached from the lens barrel (3) in the direction of the optical axis (30). A space (105) surrounded by the first housing (4) and the second housing (100) is depressurized, and the sample (6) arranged inside the recessed section (100a) is irradiated with a charged particle beam.
摘要翻译：提供了一种带电粒子束装置（111），隔膜（101）可以从其中容易地附接和拆卸，并且其中样品（6）可以在真空和高压下布置。带电粒子束装置包括：保持带电粒子源（110）和电子光学系统（1,2,7）的镜筒（3）; 连接到镜筒（3）的第一壳体（4）; 第二壳体（100），其凹入到所述第一壳体（4）的内部; 分离透镜筒（3）内的空间与第一壳体（4）内的空间的第一隔膜（10），带电粒子束通过该第一隔膜第二隔膜（101），其分离所述第二壳体（100）中的所述凹部（100a）的内部和外部的空间，并且所述带电粒子束穿过所述第二隔膜; 以及连接到容纳所述带电粒子源（110）的第三壳体（22）的管道（23）。第一隔膜（10）附接到管道（23），并且管道（23）和第三壳体（22）可以沿着光轴（30）的方向附接到镜筒（3）并从镜筒）。由第一壳体（4）和第二壳体（100）围绕的空间（105）被减压，并且将配置在凹部（100a）内部的样品（6）照射带电粒子束。

8. 发明申请

US20150214002A1 ELECTRON MICROSCOPE AND ELECTRON BEAM DETECTOR 有权
标题翻译：电子显微镜和电子束检测器
公开(公告)号：US20150214002A1
公开(公告)日：2015-07-30
申请号：US14423081
申请日：2013-08-09
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Shin Imamura , Takashi Ohshima , Yoichi Ose , Kenichi Hirane
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/063 , H01J2237/2443 , H01J2237/2445 , H01J2237/28 , H01J2237/2801
摘要： An electron microscope is provided with a scintillator (7) and a light guide (8). The scintillator (7) has an index of refraction greater than the index of refraction of the light guide (8), and an end surface (72) joined to the light guide (8) is formed from a curved surface with a convex shape on the outside. The scintillator (7) is formed by a Y—Al—O based ceramic sintered body represented by the compositional formula (Ln1-xCex)3M5O12 (wherein Ln represents at least one element selected from the group consisting of Y, Gd, La, and Lu, and M represents either or both of Al and Ga).
摘要翻译：电子显微镜设有闪烁体（7）和光导（8）。闪烁体（7）具有大于导光体（8）的折射率的折射率，与导光体（8）接合的端面（72）由凸形的曲面形成外。闪烁体（7）由组成式（Ln1-xCex）3M5O12表示的Y-Al-O系陶瓷烧结体形成（其中Ln表示选自Y，Gd，La和 Lu和M表示Al和Ga中的任一个或两者）。

9. 发明申请

US20150014530A1 CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：充电颗粒光束装置
公开(公告)号：US20150014530A1
公开(公告)日：2015-01-15
申请号：US14379291
申请日：2013-02-15
申请人： Hitachi High-Technologies Corporation
发明人： Yusuke Ominami , Takashi Ohshima , Hiroyuki Ito , Mitsugu Sato , Sukehiro Ito
IPC分类号： H01J37/28 , H01J37/09 , H01J37/18
CPC分类号： H01J37/28 , H01J37/09 , H01J37/16 , H01J37/18 , H01J2237/0451 , H01J2237/06341 , H01J2237/10 , H01J2237/1405 , H01J2237/164 , H01J2237/2608 , H01J2237/2801
摘要： Provided is a charged particle beam apparatus (111) to and from which a diaphragm (101) can be easily attached and detached, and in which a sample (6) can be arranged under vacuum and under high pressure. The charged particle beam apparatus includes: a lens barrel (3) holding a charged particle source (110) and an electron optical system (1,2,7); a first housing (4) connected to the lens barrel (3); a second housing (100) recessed to inside the first housing (4); a first diaphragm (10) separating the space inside the lens barrel (3) and the space inside the first housing (4), and through which the charged particle beam passes; a second diaphragm (101) separating the spaces inside and outside the recessed section (100a) in the second housing (100), and through which the charged particle beam passes; and a pipe (23) connected to a third housing (22) accommodating the charged particle source (110). The first diaphragm (10) is attached to the pipe (23), and the pipe (23) and the third housing (22) can be attached to and detached from the lens barrel (3) in the direction of the optical axis (30). A space (105) surrounded by the first housing (4) and the second housing (100) is depressurized, and the sample (6) arranged inside the recessed section (100a) is irradiated with a charged particle beam.
摘要翻译：提供了一种带电粒子束装置（111），隔膜（101）可以从其中容易地附接和拆卸，并且其中样品（6）可以在真空和高压下布置。带电粒子束装置包括：保持带电粒子源（110）和电子光学系统（1,2,7）的镜筒（3）; 连接到镜筒（3）的第一壳体（4）; 第二壳体（100），其凹入到所述第一壳体（4）的内部; 分离透镜筒（3）内的空间与第一壳体（4）内的空间的第一隔膜（10），带电粒子束通过该第一隔膜第二隔膜（101），其分离所述第二壳体（100）中的所述凹部（100a）的内部和外部的空间，并且所述带电粒子束通过所述第二隔膜; 以及连接到容纳所述带电粒子源（110）的第三壳体（22）的管道（23）。第一隔膜（10）附接到管道（23），并且管道（23）和第三壳体（22）可以沿着光轴（30）的方向附接到镜筒（3）并从镜筒）。由第一壳体（4）和第二壳体（100）围绕的空间（105）被减压，并且将配置在凹部（100a）内部的样品（6）照射带电粒子束。

10. 发明授权

US08866371B2 Electric field discharge-type electron source 有权
标题翻译：电场放电型电子源
公开(公告)号：US08866371B2
公开(公告)日：2014-10-21
申请号：US14239144
申请日：2012-09-24
申请人： Hitachi High-Technologies Corporation
发明人： Souichi Katagiri , Takashi Ohshima , Sukehiro Ito
IPC分类号： H01J1/14 , H01J19/06 , H01K1/04
CPC分类号： H01J37/073 , H01J1/16 , H01J1/3044 , H01J9/025 , H01J9/04 , H01J37/06 , H01J2237/06316 , H01J2237/06341
摘要： Increasing the volume or weight of zirconia which is a diffusion and supply source, to extend the life of a field-emission type electron source causes a problem that the diffusion and supply source itself or a tungsten needle is easily subjected to damage. As another problem, although it is considered to form the diffusion and supply source using a thin film to avoid the above-described problem, it is difficult to stably obtain practical life exceeding 8,000 hours. It has been found that practical life exceeding 8,000 hours is stably obtained by providing a field-emission type electron source that has no chips or cracks in a diffusion and supply source and that can extend life with a little bit of an increase in the amount of the diffusion and supply source.
摘要翻译：增加作为扩散源和供应源的氧化锆的体积或重量，延长场致发射型电子源的寿命引起扩散和供给源本身或钨针容易受到损伤的问题。作为另一个问题，虽然考虑使用薄膜形成扩散和供应源以避免上述问题，但是难以稳定地获得超过8000小时的实际寿命。已经发现，通过提供在扩散和供给源中不产生切屑或裂纹的场发射型电子源，可以稳定地获得超过8000小时的实际寿命，并且可以延长使用寿命，同时增加使用量扩散和供应源。

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