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1. 发明授权

US11646173B2 Scanning electron microscope and a method for overlay monitoring 有权
公开(公告)号：US11646173B2
公开(公告)日：2023-05-09
申请号：US17369746
申请日：2021-07-07
申请人： Applied Materials Israel Ltd.
发明人： Itay Asulin , Emil Weisz , Eitam Yitzchak Vinegrad , Menachem Lapid , Boris Rozensvaig
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2443 , H01J2237/2445 , H01J2237/2448 , H01J2237/24475
摘要： A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.

2. 发明申请

US20190049396A1 X-Ray Analyzer and Spectrum Generation Method 审中-公开
公开(公告)号：US20190049396A1
公开(公告)日：2019-02-14
申请号：US16101633
申请日：2018-08-13
申请人： JEOL Ltd.
发明人： Takanori Murano
IPC分类号： G01N23/2252 , G01T1/36
CPC分类号： G01N23/2252 , G01T1/36 , H01J37/244 , H01J2237/002 , H01J2237/2445
摘要： An X-ray analyzer includes: a detector which detects X-rays generated from a specimen; a cooling element which cools the detector; and a spectrum generating unit which generates a spectrum based on a detection signal of the detector. The spectrum generating unit corrects an attenuation of intensity of a spectrum attributable to contamination of the detector, based on an elapsed time from a reference time until the X-rays are detected.

3. 发明申请

US20180221830A1 HIGH-PERFORMANCE, LOW-STRESS SUPPORT STRUCTURE WITH MEMBRANE 审中-公开
公开(公告)号：US20180221830A1
公开(公告)日：2018-08-09
申请号：US15738117
申请日：2016-06-19
申请人： Mark Larson , Erik Bard , Michael Lines
发明人： Mark Larson , Erik Bard , Michael Lines
IPC分类号： B01D69/10 , B01D63/08 , H01J35/18 , H01J5/18
CPC分类号： B01D69/10 , B01D63/087 , B01D2313/06 , G01T7/00 , G21K1/10 , H01J5/18 , H01J35/18 , H01J2237/2445
摘要： A support structure for a membrane comprises a plurality of support members and at least one flange, including: (a) a first set of spoke-like support members that extend generally from at least one flange toward a common hub and that have a distal end joined to at least one flange and a proximal end joined to the common hub; and (b) at least one subsequent set of spoke-like support members that are distributed between circumferentially adjacent pairs of spoke-like support members from the prior sets and that extend generally from at least one flange toward the hub, each having a distal end joined to at least one flange and a proximal end connected to the nearest circumferentially adjacent pair of spoke-like support members from the prior sets via a pair of approximately straight anchoring support members which join together and form an angular joint at or near said proximal end, with the vertex of said angular joint pointing generally away from the hub.

4. 发明授权

US10002741B2 Electron microscope with plural X-ray detectors for acquiring elemental spectrum 有权
公开(公告)号：US10002741B2
公开(公告)日：2018-06-19
申请号：US14583403
申请日：2014-12-26
申请人： Industrial Technology Research Institute
发明人： Fu-Rong Chen , Tsu-Wei Huang , Chin-Liang Hsu
IPC分类号： H01J37/28 , H01J37/244 , G01N23/225
CPC分类号： H01J37/244 , G01N23/2252 , H01J37/28 , H01J2237/226 , H01J2237/2445 , H01J2237/24495 , H01J2237/24585 , H01J2237/2555
摘要： An electron microscope includes a stage, a charged particle beam generator, a plurality of elemental spectrum detectors and a reader. The stage is configured for carrying a sample. The charged particle beam generator is configured for generating a charged particle beam to bombard the sample. The elemental spectrum detectors is configured for detecting X ray emitted from the sample being bombarded by the charged particle beam and outputting a plurality of corresponding spectrum detecting signals. The reader is configured for calibrating a plurality of counting signals generated by the spectrum detecting signals and summing the calibrated counting signals to obtain an elemental spectrum of the sample. The collection time of elemental spectrum of the above-mentioned electron microscope can be shortened. A reader and an acquiring elemental spectrum method applied to the above-mentioned electron microscope are also disclosed.

5. 发明申请

US20170213697A1 MULTI MODE SYSTEM WITH A DISPERSION X-RAY DETECTOR 有权
公开(公告)号：US20170213697A1
公开(公告)日：2017-07-27
申请号：US15005949
申请日：2016-01-25
申请人： APPLIED MATERIALS ISRAEL LTD.
发明人： Alon Litman , Efim Vinnitsky
IPC分类号： H01J37/285 , H01J37/20 , H01J37/28 , H01J37/244
CPC分类号： H01J37/244 , H01J37/20 , H01J37/28 , H01J37/285 , H01J2237/024 , H01J2237/2445 , H01J2237/2807
摘要： A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

6. 发明申请

US20170199131A1 Inverse Photoelectron Spectroscopy Device 审中-公开
公开(公告)号：US20170199131A1
公开(公告)日：2017-07-13
申请号：US15314346
申请日：2015-05-27
申请人： Japan Science and Technology Agency
发明人： Hiroyuki Yoshida
IPC分类号： G01N21/71 , G01J3/02 , H01J37/244 , G01J3/443
CPC分类号： G01N21/71 , G01J3/0208 , G01J3/443 , G01N21/62 , G01N23/2254 , G01N2201/0638 , G01N2201/068 , G01N2223/6116 , H01J3/02 , H01J3/18 , H01J37/244 , H01J37/252 , H01J2237/06308 , H01J2237/06375 , H01J2237/2445
摘要： An inverse photoemission spectroscopy apparatus is configured to detect a light generated by the relaxation of electrons to an unoccupied state of a sample. The apparatus includes an electron source for generating electrons with which a sample is irradiated, a wavelength selector for extracting a light having a certain wavelength from the light generated in the sample, a photodetector for detecting the light extracted by the wavelength selector; and a focusing optics disposed between the sample and the photodetector. The electron source contains yttrium oxide as a thermionic emission material.

7. 发明授权

US09704688B2 X-ray analysis in air 有权
公开(公告)号：US09704688B2
公开(公告)日：2017-07-11
申请号：US15024773
申请日：2014-09-25
申请人： Oxford Instruments Nanotechnology Tools Limited
发明人： Peter Statham
IPC分类号： H01J37/00 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/164 , H01J2237/182 , H01J2237/188 , H01J2237/24415 , H01J2237/2445 , H01J2237/2608
摘要： An x-ray analysis apparatus comprises an electron beam assembly for generating a focused electron beam within a first gas pressure environment. A sample assembly is used for retaining a sample within a second gas pressure environment such that the sample receives the electron beam from the electron beam assembly and such that the gas pressure in the second gas pressure environment is greater than the gas pressure within the first gas pressure environment. An x-ray detector is positioned so as to have at least one x-ray sensor element within the first gas pressure environment. The sensor element is mounted to a part of the electron beam assembly which is proximal to the sample assembly and further arranged in use to receive x-rays generated by the interaction between the electron beam and the sample.

8. 发明申请

US20170162364A1 DETECTING CHARGED PARTICLES 审中-公开
公开(公告)号：US20170162364A1
公开(公告)日：2017-06-08
申请号：US15364396
申请日：2016-11-30
申请人： Carl Zeiss Microscopy Ltd.
发明人： Diego Guerra
IPC分类号： H01J37/244 , H01J37/21
CPC分类号： H01J37/244 , H01J37/21 , H01J37/28 , H01J37/3005 , H01J2237/2443 , H01J2237/2445 , H01J2237/2448 , H01J2237/2806 , H01J2237/2807 , H01J2237/2808
摘要： The system described herein detects charged particles which, for example, are generated by interaction of a charged particle beam with an object to be analyzed using, for example, a particle beam device. Detection is carried out for imaging of the object. The system described herein allows detection of charged particles with the same detection principle when the ambient pressures in an object chamber are in a first pressure range being lower than or equal to 10−3 hPa or in a second pressure range being equal to or above 10−3 hPa. When operating with the object chamber in the second pressure range, the system described herein generates photons in a scintillator using cascade particles generated by using the charged particles and a gas, and detects the photons using a light detector.

9. 发明申请

US20170032925A1 CHARGED PARTICLE DETECTING DEVICE AND CHARGED PARTICLE BEAM SYSTEM WITH SAME 审中-公开
标题翻译：带有粒子的粒子检测装置和带有粒子的粒子束系统
公开(公告)号：US20170032925A1
公开(公告)日：2017-02-02
申请号：US15163401
申请日：2016-05-24
申请人： Carl Zeiss Microscopy, LLC
发明人： Sybren J. Sijbrandij , John A. Notte, IV , Raymond Hill
IPC分类号： H01J37/05 , H01J37/244 , G01T1/20
CPC分类号： H01J37/05 , H01J37/244 , H01J2237/2443 , H01J2237/24435 , H01J2237/2445 , H01J2237/2448 , H01J2237/24495 , H01J2237/24564
摘要： A charged particle detecting device is disclosed which includes: a holding structure; a first charged particle detector at the terminal portion of the holding structure, the first charged particle detector being configured to generate a first electrical signal when a first species of charged particles impinges on the first charged particle detector; a second charged particle detector at the terminal portion of the holding structure, the second charged particle detector is configured to generate a second electrical signal when a second species of charged particles impinges on the second charged particle detector; a detector head at the terminal portion of the holding structure, the detector head defining a hollow volume within which a particle entrance surface of the first charged particle detector and a particle entrance surface of the second charged particle detector are arranged; and a first electrode which is transmissive for the first and second species of charged particles covering an entrance opening of the detector head.
摘要翻译：公开了一种带电粒子检测装置，包括：保持结构; 所述第一带电粒子检测器被配置为当第一种类的带电粒子撞击在所述第一带电粒子检测器上时产生第一电信号; 第二带电粒子检测器，被配置为当第二种类的带电粒子撞击在第二带电粒子检测器上时产生第二电信号; 所述检测器头限定所述第一带电粒子检测器的颗粒入射表面和所述第二带电粒子检测器的粒子入射表面的中空体积; 以及第一电极，其对于覆盖检测器头的入口的第一和第二种类的带电粒子是透射的。

10. 发明授权

US09543116B2 Method for verifying characteristics of an electron beam 有权
标题翻译：验证电子束特性的方法
公开(公告)号：US09543116B2
公开(公告)日：2017-01-10
申请号：US15190899
申请日：2016-06-23
申请人： Arcam AB
发明人： Tomas Lock
IPC分类号： A61N5/00 , H01J37/304 , B33Y10/00 , B33Y40/00 , B33Y50/02 , B28B1/00 , B28B17/00 , B29C67/00 , B22F3/105 , B23K15/00 , B23K15/02 , H01J37/30 , H01J37/317 , H01J37/305 , G01T1/29 , B33Y30/00
CPC分类号： H01J37/3045 , B22F3/1055 , B22F2003/1056 , B22F2003/1057 , B23K15/0013 , B23K15/002 , B23K15/0026 , B23K15/0086 , B23K15/02 , B28B1/001 , B28B17/00 , B28B17/0081 , B29C64/153 , B29C64/20 , B29C64/386 , B29C67/0077 , B29C67/0088 , B33Y10/00 , B33Y30/00 , B33Y40/00 , B33Y50/02 , G01T1/295 , H01J37/09 , H01J37/244 , H01J37/30 , H01J37/3005 , H01J37/304 , H01J37/305 , H01J37/317 , H01J2237/0453 , H01J2237/2445 , H01J2237/2448 , H01J2237/24514 , H01J2237/2826 , H01J2237/30433 , H01J2237/3045 , H01J2237/30472 , H01J2237/3128 , Y02P10/295
摘要： A method is provided for forming a three-dimensional article through successive fusion of parts of a powder bed. The method includes the steps of: applying a first powder layer on a work table; directing an electron beam from an electron beam source over the work table, the directing of the electron beam causing the first powder layer to fuse in first selected locations according to a pre-determined model, so as to form a first part of a cross section of the three dimensional article, and intensity modulating X-rays from the powder layer or from a clean work table with a patterned aperture modulator and a patterned aperture resolver, wherein a verification of at least one of a size, position, scan speed, or shape of the electron beam is achieved by comparing detected intensity modulated X-ray signals with saved reference values.
摘要翻译：提供了一种用于通过粉末床的部分的连续熔融来形成三维制品的方法。该方法包括以下步骤：将第一粉末层施加在工作台上; 将来自电子束源的电子束引导到工作台上，根据预定模型引导使第一粉末层在第一选定位置熔化的电子束，以便形成横截面的第一部分以及强度调制来自粉末层的X射线或来自具有图案化孔径调制器和图案化孔径分解器的清洁工作台的X射线，其中验证尺寸，位置，扫描速度或通过将检测到的强度调制的X射线信号与保存的参考值进行比较来实现电子束的形状。

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