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1. 发明申请

US20220392737A1 Scanning Electron Microscope and Image Generation Method Using Scanning Electron Microscope 有权
公开(公告)号：US20220392737A1
公开(公告)日：2022-12-08
申请号：US17830873
申请日：2022-06-02
申请人： JEOL Ltd.
发明人： Takeshi Otsuka
IPC分类号： H01J37/22 , H01J37/28 , H01J37/244
摘要： An electron beam is irradiated on a specimen in a state where a negative voltage is applied to the specimen. The specimen is rotated to establish an optimum orientation of a specimen surface shape relative to an orientation of a detector having two detection surfaces disposed at rotational symmetric positions with respect to an optical axis of the electron beam taken as an axis of rotation, and an image is generated based on a quantity of a signal from reflected electrons detected by the detector.

2. 发明申请

US20190362934A1 Charged Particle Beam Apparatus and Image Acquisition Method 审中-公开
公开(公告)号：US20190362934A1
公开(公告)日：2019-11-28
申请号：US16420466
申请日：2019-05-23
申请人： JEOL Ltd.
发明人： Takeshi Otsuka
IPC分类号： H01J37/28 , H01J37/22 , G06T7/90 , G01N23/2251
摘要： A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample; and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of calculating a tilt direction of a sample surface and a tilt angle of the sample surface based on the plurality of the detection signals for an irradiation position of the charged particle beam; and a process of determining a color of a pixel of the scanned image according to the calculated tilt direction and the calculated tilt angle.

3. 发明申请

US20190362930A1 Charged Particle Beam Apparatus and Image Acquisition Method 审中-公开
公开(公告)号：US20190362930A1
公开(公告)日：2019-11-28
申请号：US16420502
申请日：2019-05-23
申请人： JEOL Ltd.
发明人： Takeshi Otsuka
IPC分类号： H01J37/22 , H01J37/28 , H01J37/244
摘要： A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample, and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of acquiring the plurality of the detection signals at an irradiation position of the charged particle beam; a process of extracting a maximum value and a minimum value from among signal amounts of the plurality of the acquired detection signals, and calculating a difference between the maximum value and the minimum value; a process of calculating a sum total of the signal amounts of the plurality of the detection signals; and a process of determining a pixel value of a pixel of the scanned image corresponding to the irradiation position based on a sum of a first value that is obtained based on the sum total and a second value that is obtained based on the difference.

4. 发明授权

US10763077B2 Charged particle beam apparatus and image acquisition method 有权
公开(公告)号：US10763077B2
公开(公告)日：2020-09-01
申请号：US16420466
申请日：2019-05-23
申请人： JEOL Ltd.
发明人： Takeshi Otsuka
IPC分类号： H01J37/28 , G06T7/90 , G01N23/2251 , H01J37/22
摘要： A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample; and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of calculating a tilt direction of a sample surface and a tilt angle of the sample surface based on the plurality of the detection signals for an irradiation position of the charged particle beam; and a process of determining a color of a pixel of the scanned image according to the calculated tilt direction and the calculated tilt angle.

5. 发明授权

US10720304B2 Charged particle beam apparatus and image acquisition method 有权
公开(公告)号：US10720304B2
公开(公告)日：2020-07-21
申请号：US16420502
申请日：2019-05-23
申请人： JEOL Ltd.
发明人： Takeshi Otsuka
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28
摘要： A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample, and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of acquiring the plurality of the detection signals at an irradiation position of the charged particle beam; a process of extracting a maximum value and a minimum value from among signal amounts of the plurality of the acquired detection signals, and calculating a difference between the maximum value and the minimum value; a process of calculating a sum total of the signal amounts of the plurality of the detection signals; and a process of determining a pixel value of a pixel of the scanned image corresponding to the irradiation position based on a sum of a first value that is obtained based on the sum total and a second value that is obtained based on the difference.

6. 发明申请

US20220392738A1 Charged Particle Beam Apparatus and Image Acquiring Method 有权
公开(公告)号：US20220392738A1
公开(公告)日：2022-12-08
申请号：US17831144
申请日：2022-06-02
申请人： JEOL Ltd.
发明人： Takeshi Otsuka
IPC分类号： H01J37/22 , H01J37/28 , H01J37/244
摘要： A charged particle beam apparatus acquires a scanned image by scanning a specimen with a charged particle beam, and detecting charged particles emitted from the specimen. The apparatus includes a charged particle beam source that emits the charged particle beam; an irradiation optical system that scans the specimen with the charged particle beam; a plurality of detection units that detects the charged particles emitted from the specimen; and an image processing unit that reconstructs a profile of a specimen surface of the specimen, based on a plurality of detection signals outputted from the plurality of detection units. The image processing unit: determines an inclination angle of the specimen surface, based on the plurality of detection signals; processing to determine a height of the specimen surface, based on the scanned image; and reconstructs the profile of the specimen surface, based on the inclination angle and the height.

7. 发明授权

US10935505B2 Scanning electron microscope and method for determining crystal orientations 有权
公开(公告)号：US10935505B2
公开(公告)日：2021-03-02
申请号：US16234868
申请日：2018-12-28
申请人： JEOL Ltd.
发明人： Takeshi Otsuka , Kenichi Yamashita
IPC分类号： G01N23/20008 , H01J37/28 , H01J37/244 , G01N23/2055 , G01N23/203 , G01N23/207
摘要： A charged particle beam device includes: a plurality of detecting units which detect charged particles diffracted by a specimen; and an intensity pattern information generating unit which generates, based on intensities of a plurality of detection signals output from the plurality of detecting units, intensity pattern information that represents the intensities of the plurality of detection signals as a pattern.

8. 发明申请

US20190204245A1 Charged Particle Beam Device and Analysis Method 审中-公开
公开(公告)号：US20190204245A1
公开(公告)日：2019-07-04
申请号：US16234868
申请日：2018-12-28
申请人： JEOL Ltd.
发明人： Takeshi Otsuka , Kenichi Yamashita
IPC分类号： G01N23/20008 , G01N23/207 , G01N23/203
CPC分类号： H01J37/244 , H01J37/222 , H01J37/28 , H01J2237/24415 , H01J2237/24465 , H01J2237/24475 , H01J2237/24495 , H01J2237/2805
摘要： A charged particle beam device includes: a plurality of detecting units which detect charged particles diffracted by a specimen; and an intensity pattern information generating unit which generates, based on intensities of a plurality of detection signals output from the plurality of detecting units, intensity pattern information that represents the intensities of the plurality of detection signals as a pattern.

9. 发明授权

US09275830B2 Scanning charged particle microscope, image acquisition method, and electron detection method 有权
标题翻译：扫描带电粒子显微镜，图像采集方法和电子检测方法
公开(公告)号：US09275830B2
公开(公告)日：2016-03-01
申请号：US14277948
申请日：2014-05-15
申请人： JEOL Ltd.
发明人： Takeshi Otsuka
IPC分类号： H01J37/22 , H01J37/28 , H01J37/244
CPC分类号： H01J37/28 , H01J37/22 , H01J37/244 , H01J2237/063 , H01J2237/15 , H01J2237/2441 , H01J2237/2446 , H01J2237/24465 , H01J2237/2448 , H01J2237/24485 , H01J2237/2806
摘要： A scanning charged particle microscope is offered which can selectively detect and image electrons. The scanning charged particle microscope (100) has: a source (1) of a charged particle beam (E1); an objective lens (6) for bringing the charged particle beam (E1) emitted from the source (1) into focus at a sample (S); a scanning deflector (4) for scanning the focused charged particle beam (E1) over the sample (S); a sorting portion (10) for sorting out electrons emitted at given emission angles from electrons released from the sample (S) in response to irradiation of the sample (S) by the charged particle beam (E1); an electron deflector (20) for producing a deflecting field to deflect the electrons (E2) sorted out according to their energy; a detection portion (30) for detecting the electrons (E2) deflected by the electron deflector (20); and an image creating portion (44) for creating an image, based on the results of the detection performed by the detection portion (30).
摘要翻译：提供扫描带电粒子显微镜，可以选择性地检测和成像电子。扫描带电粒子显微镜（100）具有：带电粒子束（E1）的源（1）; 用于将从源（1）发射的带电粒子束（E1）聚焦在样品（S）的物镜（6）; 扫描偏转器（4），用于扫描样品（S）上的聚焦带电粒子束（E1）; 分选部分（10），用于响应于通过带电粒子束（E1）照射样品（S），以从给定的发射角度发射的电子分选出电子; 用于产生偏转场的电子偏转器（20），以使根据其能量分选出的电子（E2）偏转; 用于检测由电子偏转器（20）偏转的电子的检测部分（30）; 以及基于由检测部分（30）执行的检测结果的用于创建图像的图像创建部分（44）。

10. 发明申请

US20150014527A1 Scanning Charged Particle Microscope, Image Acquisition Method, and Electron Detection Method 有权
标题翻译：扫描带电粒子显微镜，图像采集方法和电子检测方法
公开(公告)号：US20150014527A1
公开(公告)日：2015-01-15
申请号：US14277948
申请日：2014-05-15
申请人： JEOL Ltd.
发明人： Takeshi Otsuka
IPC分类号： H01J37/28 , H01J37/22
CPC分类号： H01J37/28 , H01J37/22 , H01J37/244 , H01J2237/063 , H01J2237/15 , H01J2237/2441 , H01J2237/2446 , H01J2237/24465 , H01J2237/2448 , H01J2237/24485 , H01J2237/2806
摘要： A scanning charged particle microscope is offered which can selectively detect and image electrons. The scanning charged particle microscope (100) has: a source (1) of a charged particle beam (E1); an objective lens (6) for bringing the charged particle beam (E1) emitted from the source (1) into focus at a sample (S); a scanning deflector (4) for scanning the focused charged particle beam (E1) over the sample (S); a sorting portion (10) for sorting out electrons emitted at given emission angles from electrons released from the sample (S) in response to irradiation of the sample (S) by the charged particle beam (E1); an electron deflector (20) for producing a deflecting field to deflect the electrons (E2) sorted out according to their energy; a detection portion (30) for detecting the electrons (E2) deflected by the electron deflector (20); and an image creating portion (44) for creating an image, based on the results of the detection performed by the detection portion (30).
摘要翻译：提供扫描带电粒子显微镜，可以选择性地检测和成像电子。扫描带电粒子显微镜（100）具有：带电粒子束（E1）的源（1）; 用于将从源（1）发射的带电粒子束（E1）聚焦在样品（S）的物镜（6）; 扫描偏转器（4），用于扫描样品（S）上的聚焦带电粒子束（E1）; 分选部分（10），用于响应于通过带电粒子束（E1）照射样品（S），以从给定的发射角度发射的电子分选出电子; 用于产生偏转场的电子偏转器（20），以使根据其能量分选出的电子（E2）偏转; 用于检测由电子偏转器（20）偏转的电子的检测部分（30）; 以及基于由检测部分（30）执行的检测结果的用于创建图像的图像创建部分（44）。

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