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    • 7. 发明授权
    • Monolithic multi-wavelength vertical-cavity surface emitting laser array and method of manufacture therefor
    • 单片多波长垂直腔表面发射激光阵列及其制造方法
    • US06806110B2
    • 2004-10-19
    • US10151646
    • 2002-05-16
    • Steven D. LesterVirginia M. RobbinsJeffrey N. Miller
    • Steven D. LesterVirginia M. RobbinsJeffrey N. Miller
    • H01L2100
    • H01S5/423H01S5/18341H01S5/18358H01S5/18366H01S5/18369H01S5/4087
    • A monolithic array of vertical cavity lasers with different emission wavelengths on a single wafer, and method of manufacture therefor, is provided. A first reflector is over the semiconductor substrate with a photoactive semiconductor layer. A reflector support defines first and second air gaps with the photoactive semiconductor layer. The second and third air gaps are made to be different from each other by geometric differences in the reflector support structure. Second and third reflectors are formed over the reflector support whereby a first laser is formed by the first reflector, the photoactive semiconductor structure, the first air gap, and the second reflector and whereby a second laser is formed by the first reflector, the photoactive semiconductor structure, the second air gap, and the third reflector. The emission wavelengths of the first and second lasers are different because of the different sizes of the first and second air gaps.
    • 提供了在单个晶片上具有不同发射波长的垂直腔激光器的单片阵列及其制造方法。 第一反射器在具有光敏半导体层的半导体衬底上。 反射器支撑件用光敏半导体层限定第一和第二气隙。 通过反射器支撑结构中的几何差异使第二和第三气隙彼此不同。 第二和第三反射器形成在反射器支撑件上,由此由第一反射器,光活性半导体结构,第一气隙和第二反射器形成第一激光器,由此由第一反射器形成第二激光器,光活性半导体 结构,第二气隙和第三反射器。 由于第一和第二气隙的尺寸不同,第一和第二激光器的发射波长是不同的。