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    • 5. 发明申请
    • APPROACH TO INTEGRATE SCHOTTKY IN MOSFET
    • 在MOSFET中整合肖特基的方法
    • US20140151790A1
    • 2014-06-05
    • US13873017
    • 2013-04-29
    • Sik LuiYi SuDaniel NgAnup Bhalla
    • Sik LuiYi SuDaniel NgAnup Bhalla
    • H01L29/78H01L29/66
    • H01L29/7806H01L27/0629H01L29/0619H01L29/0623H01L29/1095H01L29/41766H01L29/66734H01L29/7813H01L29/872H01L29/8725
    • An integrated structure combines field effect transistors and a Schottky diode. Trenches formed into a substrate composition extend along a depth of the substrate composition forming mesas therebetween. Each trench is filled with conductive material separated from the trench walls by dielectric material forming a gate region. Two first conductivity type body regions inside each mesa form wells partly into the depth of the substrate composition. An exposed portion of the substrate composition separates the body regions. Second conductivity type source regions inside each body region are adjacent to and on opposite sides of each well. Schottky barrier metal inside each well forms Schottky junctions at interfaces with exposed vertical sidewalls of the exposed portion of the substrate composition separating the body regions.
    • 集成结构结合了场效应晶体管和肖特基二极管。 形成衬底组合物的沟槽沿其中形成台面的衬底组合物的深度延伸。 每个沟槽填充有导电材料,该导电材料通过形成栅极区域的电介质材料与沟槽壁分离。 每个台面形状内部的两个第一导电类型体区部分地沉积到基底组合物的深度中。 衬底组合物的暴露部分分离身体区域。 每个身体区域内的第二导电类型源区域与每个孔的相邻侧和相邻侧相邻。 每个孔内的肖特基势垒金属在分离体区的基底组合物的暴露部分的暴露的垂直侧壁的界面处形成肖特基结。
    • 8. 发明授权
    • Approach to integrate Schottky in MOSFET
    • 将肖特基集成在MOSFET中的方法
    • US08431470B2
    • 2013-04-30
    • US13079675
    • 2011-04-04
    • Sik LuiYi SuDaniel NgAnup Bhalla
    • Sik LuiYi SuDaniel NgAnup Bhalla
    • H01L21/28H01L21/02
    • H01L29/7806H01L27/0629H01L29/0619H01L29/0623H01L29/1095H01L29/41766H01L29/66734H01L29/7813H01L29/872H01L29/8725
    • An integrated structure combines field effect transistors and a Schottky diode. Trenches formed into a substrate composition extend along a depth of the substrate composition forming mesas therebetween. Each trench is filled with conductive material separated from the trench walls by dielectric material forming a gate region. Two first conductivity type body regions inside each mesa form wells partly into the depth of the substrate composition. An exposed portion of the substrate composition separates the body regions. Second conductivity type source regions inside each body region are adjacent to and on opposite sides of each well. Schottky barrier metal inside each well forms Schottky junctions at interfaces with exposed vertical sidewalls of the exposed portion of the substrate composition separating the body regions.
    • 集成结构结合了场效应晶体管和肖特基二极管。 形成衬底组合物的沟槽沿其中形成台面的衬底组合物的深度延伸。 每个沟槽填充有导电材料,该导电材料通过形成栅极区域的电介质材料与沟槽壁分离。 每个台面形状内部的两个第一导电类型体区部分地沉积到基底组合物的深度中。 衬底组合物的暴露部分分离身体区域。 每个身体区域内的第二导电类型源区域与每个孔的相邻侧和相邻侧相邻。 每个孔内的肖特基势垒金属在分离体区的基底组合物的暴露部分的暴露的垂直侧壁的界面处形成肖特基结。