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    • 1. 发明授权
    • Semiconductor memory device
    • 半导体存储器件
    • US09379165B2
    • 2016-06-28
    • US14263215
    • 2014-04-28
    • KABUSHIKI KAISHA TOSHIBA
    • Atsushi YoshidaHiroshi KannoTakayuki TsukamotoTakamasa OkawaHideyuki Tabata
    • H01L27/10H01L27/105H01L27/24H01L45/00H01L23/532
    • H01L27/249H01L23/53295H01L45/146H01L45/1683H01L2924/0002H01L2924/00
    • A semiconductor memory device according to an embodiment described below comprises: first lines arranged in a first direction perpendicular to a main surface of a substrate and extending in a second direction crossing the first direction; second lines arranged in the second direction, extending in the first direction, and intersecting the first lines; memory cells disposed at intersections of the first lines and the second lines; and an interlayer insulating film provided between the second lines. The interlayer insulating film has an air gap extending continuously in the first direction so as to intersect at least some of the first lines aligned along the first direction. The interlayer insulating film also includes an insulating film positioned above the air gap and having a curved surface that protrudes toward a direction of the substrate.
    • 根据下述实施例的半导体存储器件包括:沿垂直于衬底的主表面的第一方向布置并沿与第一方向交叉的第二方向延伸的第一线; 沿第二方向布置的第二线,沿第一方向延伸并且与第一线相交; 设置在第一线和第二线的交点处的存储单元; 以及设置在第二线之间的层间绝缘膜。 层间绝缘膜具有沿着第一方向连续延伸的气隙,以使沿着第一方向排列的至少一些第一线交叉。 层间绝缘膜还包括位于气隙上方的绝缘膜,并且具有朝向衬底的方向突出的弯曲表面。
    • 3. 发明申请
    • SEMICONDUCTOR MEMORY DEVICE AND CONTROL METHOD THEREOF
    • 半导体存储器件及其控制方法
    • US20150228337A1
    • 2015-08-13
    • US14306843
    • 2014-06-17
    • KABUSHIKI KAISHA TOSHIBA
    • Takamasa OKAWATakayuki TsukamotoYoichi MinemuraHiroshi KannoAtsushi YoshidaHideyuki Tabata
    • G11C13/00G11C5/02
    • G11C13/0035G11C5/02G11C7/18G11C13/0002G11C13/0026G11C29/024G11C2029/5006G11C2213/71H01L27/101
    • A semiconductor memory device comprises: first lines disposed in a first direction perpendicular to a substrate and extending in a second direction parallel to the substrate; second lines disposed in the second direction and configured to extend in the first direction, the second lines intersecting the first lines; and memory cells disposed at intersections of the first lines and the second lines and each including a variable resistance element. Furthermore, a third line extends in a third direction orthogonal to the first and second directions. A select transistor is connected between the second and third lines. A control circuit controls a voltage applied to the first and third lines, and the select transistor. The control circuit renders conductive at least one of the select transistors and thereby detect a current flowing in the third line, and determines a deterioration state of the select transistor according to a detection result.
    • 一种半导体存储器件,包括:沿垂直于衬底的第一方向设置的第一线,并沿与衬底平行的第二方向延伸; 第二线沿第二方向设置并且被配置为在第一方向上延伸,第二线与第一线相交; 以及设置在第一线和第二线的交叉点处并且每个包括可变电阻元件的存储单元。 此外,第三线在与第一和第二方向正交的第三方向上延伸。 选择晶体管连接在第二和第三线之间。 控制电路控制施加到第一和第三线和选择晶体管的电压。 控制电路使至少一个选择晶体管导通,从而检测在第三线中流动的电流,并根据检测结果确定选择晶体管的劣化状态。