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1. 发明授权

US10969442B2 Test system 有权
公开(公告)号：US10969442B2
公开(公告)日：2021-04-06
申请号：US16054587
申请日：2018-08-03
申请人： Kabushiki Kaisha Nihon Micronics
发明人： Osamu Arai
IPC分类号： G01R31/00 , G01R31/44 , G01R31/28 , G01R31/26 , H05B47/20
摘要： A test system is characterized by a holding unit that holds a light-receiving unit receiving light emitted from a test object and an optical path forming unit that is formed with an optical transmission path as a path of the light received by the light-receiving unit, in which the optical transmission path is formed of a different member from the light-receiving unit. Since the test system has such a configuration, replacement of the light-receiving unit that receives the light emitted from the test object can be facilitated.

2. 发明授权

US10249187B2 Control server and control system for controlling traffic signals based on information from pressure sensors placed on a roadway 有权
公开(公告)号：US10249187B2
公开(公告)日：2019-04-02
申请号：US15788592
申请日：2017-10-19
申请人： Kabushiki Kaisha Nihon Micronics
发明人： Hiroshi Kamiya , Kenji Sasaki , Osamu Arai
IPC分类号： G08G1/01 , G08G1/02 , G08G1/08 , G08G1/081
摘要： Provided are a control server and a control system both capable of preventing traffic accidents more effectively. The control server is configured to control multiple traffic signals installed on a road, and includes: a pressure information obtainer configured to obtain pressure information which is outputted from a pressure sensor installed at a stop position on the road corresponding to each of the multiple traffic signals, and which includes a value representing pressure received from a vehicle running on the road; an abrupt braking information obtainer configured to, based on the pressure information, obtain abrupt braking information on an abrupt braking operation performed by the vehicle running on the road; and a traffic signal controller configured to, based on the abrupt braking information, generate a control signal for controlling the multiple traffic signals.

3. 发明授权

US09535090B2 Electric connecting apparatus 有权
标题翻译：电连接装置
公开(公告)号：US09535090B2
公开(公告)日：2017-01-03
申请号：US14302102
申请日：2014-06-11
申请人： Kabushiki Kaisha Nihon Micronics
发明人： Tatsuo Inoue , Hidehiro Kiyofuji , Osamu Arai
IPC分类号： G01R31/00 , G01R1/04 , G01R1/073 , G01R31/26 , G01R31/28
CPC分类号： G01R1/0416 , G01R1/07307 , G01R1/07342 , G01R31/26 , G01R31/2887
摘要： An apparatus includes a wiring base plate arranged on an upper side of a chuck top and having a wiring path connected to a tester, a probe card having a probe board spaced from the wiring base plate with a first surface thereof opposed to the wiring base plate and having a wiring path corresponding to the wiring path and probes provided on a second surface of the probe board to be connected to the wiring path and enabling to respectively contact connection pads of a semiconductor wafer on the chuck top, and an electric connector connecting the wiring base plate to the probe board by low heat conduction supporting members and decreasing heat conduction therebetween and electrically connecting the wiring paths.
摘要翻译：一种装置，包括布置在卡盘顶部的上侧并具有连接到测试器的布线路径的布线基板，探针板具有与布线基板间隔开的探针板，第一表面与布线基板相对并且具有对应于布线路径的布线路径和设置在要连接到布线路径的探针板的第二表面上的探针，并且能够分别接触卡盘顶部上的半导体晶片的连接焊盘，以及电连接器，通过低导热支撑构件将接线基板连接到探针板，并降低其间的热传导并电连接布线路径。

4. 发明授权

US11435392B2 Inspection method and inspection system 有权
公开(公告)号：US11435392B2
公开(公告)日：2022-09-06
申请号：US17275626
申请日：2019-08-27
申请人： Kabushiki Kaisha Nihon Micronics
发明人： Osamu Arai , Hiroshi Kamiya
IPC分类号： G01R31/28 , G01R31/265 , G01R1/073
摘要： An inspection method includes a step S20 of electrically connecting electrical signal terminals of a semiconductor device to electric connectors, and optically connecting optical signal terminals of the semiconductor device to optical connectors, a step S30 of measuring a test light output signal output from a monitoring element provided in an inspection object in response to a test input signal having been input to the monitoring element while adjusting conditions of a position and an inclination of the inspection object, and extracting conditions in which an optical intensity of the test light output signal is a predetermined determination value or greater as inspection conditions, and a step S40 of inspecting the semiconductor device under the inspection conditions.

5. 发明授权

US09400309B2 Electric connecting apparatus 有权
标题翻译：电连接装置
公开(公告)号：US09400309B2
公开(公告)日：2016-07-26
申请号：US14302022
申请日：2014-06-11
申请人： Kabushiki Kaisha Nihon Micronics
发明人： Hidehiro Kiyofuji , Tatsuo Inoue , Osamu Arai , Kenji Sasaki
IPC分类号： G01R31/00 , G01R31/28 , G01R1/073
CPC分类号： G01R31/2891 , G01R1/07307 , G01R31/2887
摘要： An apparatus includes a probe card having a probe board with a conductive path electrically connected to a tester and probes enabling to respectively contact connection pads of a semiconductor wafer on a chuck top and moving relatively to the chuck top, and an elastic heat conducting member arranged between a working surface of the chuck top or the semiconductor wafer on the working surface and the probe board. The elastic heat conducting member can abut on the working surface of the chuck top or the semiconductor wafer on the working surface and the probe board when the probes do not abut on the respective corresponding connection pads and is elastically deformable not to prevent abutment between the probes and the respective corresponding connection pads.
摘要翻译：一种装置，包括具有探针板的探针板，导电路径电连接到测试器和能够分别接触卡盘顶部的半导体晶片的连接焊盘并相对于卡盘顶部移动的探针，以及弹性导热部件，在卡盘顶部的工作表面或工作表面上的半导体晶片与探针板之间。当探针不与相应的连接焊盘相接触时，弹性导热部件可以抵靠在工作表面上的卡盘顶部或半导体晶片的工作表面上，并可弹性变形，以防止探头之间的邻接和各自对应的连接焊盘。

6. 发明授权

US09341651B2 Probe card and method for manufacturing the same 有权
标题翻译：探针卡及其制造方法
公开(公告)号：US09341651B2
公开(公告)日：2016-05-17
申请号：US14285161
申请日：2014-05-22
申请人： Kabushiki Kaisha Nihon Micronics
发明人： Osamu Arai , Yuki Saito , Tatsuo Inoue , Hidehiro Kiyofuji
IPC分类号： G01R31/00 , G01R1/073 , G01B21/08 , G01R3/00 , G01R31/28
CPC分类号： G01R1/07314 , G01B21/08 , G01R1/07307 , G01R3/00 , G01R31/2863 , G01R31/2874
摘要： A probe card for an electric test of a device under test on a working table incorporating a heat source includes a circuit base plate including conductive paths connected to a tester, a probe base plate including conductive paths corresponding to the conductive paths and provided with probes connected to the conductive paths, and a heat expansion adjusting member bonded to the probe base plate, having a different linear expansion coefficient from that of the probe base plate to restrain heat expansion of the probe base plate, and constituting a composite body with the probe base plate. In a case where, when the device under test is at two measuring temperatures, the composite body is at corresponding achieving temperatures, expansion changing amounts of the device under test and the composite body under temperature differences between the respective measuring temperatures and the corresponding achieving temperatures are set to be approximately equal.
摘要翻译：一种用于在包含热源的工作台上的被测设备的电测试的探针卡包括：电路基板，包括连接到测试器的导电路径;探针基板，包括对应于导电路径的导电路径，并且设置有连接的探针与导电路径接合的热膨胀调节构件和与探针基板的线膨胀系数不同的热膨胀调节构件，以抑制探针基板的热膨胀，并且与探针基体构成复合体盘子。在被测设备处于两个测量温度的情况下，复合体处于相应的实现温度，被测设备的膨胀变化量和复合体在相应的测量温度和相应的实现温度之间的温度差下被设置为大致相等。

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