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    • 6. 发明授权
    • Wafer carrying fork
    • 晶圆携带叉
    • US06276731B1
    • 2001-08-21
    • US09462820
    • 2000-03-20
    • Kazunori Hino
    • Kazunori Hino
    • B65G4907
    • H01L21/68707Y10S414/141
    • A wafer carrying fork on which a wafer rests and carried and which comprises a wafer resting surface (2) provided on the top surface of a wafer carrying fork (1), and two steps (3, 4) provided on the outer sides of the wafer resting surface (2) in a stepwise manner and having a height to width ratio of 1:0.5 to 1:2. Accordingly, it is possible to have a wafer (6) surely rest on the wafer carrying fork (1), even when the wafer (6) gets out of position in a wafer cassette, to convey it without failing.
    • 一种晶片承载叉,其上放置有晶片并承载并包括设置在晶片承载叉(1)的顶表面上的晶片搁置表面(2)和设置在晶片承载叉的外侧上的两个台阶(3,4) 晶片搁置面(2),并具有1:0.5〜1:2的高宽比。 因此,即使当晶片(6)离开晶片盒中的位置时,也可以将晶片(6)确实地放置在晶片承载叉(1)上,以便不会发生故障。
    • 10. 发明授权
    • Horizontal articulated robot and substrate transfer system provided with the same
    • 水平铰接式机器人和底盘传送系统提供
    • US08668428B2
    • 2014-03-11
    • US13064171
    • 2011-03-09
    • Kazunori Hino
    • Kazunori Hino
    • B25J18/04H01L21/683
    • B25J9/042B25J9/104B25J19/0029H01L21/67742H01L21/68707Y10T74/20305Y10T74/20317Y10T74/20323
    • A horizontal articulated robot includes a first arm and a second arm respectively supported at their base end portions by a body and the tip end portion of the second arm to be rotatable about a first joint and a second joint; and a fork including its base end portion supported by the tip end portion of the second arm to be rotatable about a third joint. The first arm includes a first enlarged portion, formed in its tip end portion, with an upper surface positioned higher than an upper surface of the base end portion of the first arm. The second arm includes a second enlarged portion, formed in its tip end portion, with a lower surface positioned lower than a lower surface of the base end portion of the second arm. The first and the second enlarged portion are at least partially overlapped with each other horizontally.
    • 水平铰接式机器人包括:第一臂和第二臂,其分别由主体和第二臂的末端部分分别支撑在其基端部,以便绕第一接头和第二接头旋转; 以及包括由第二臂的前端部支撑的基端部能够绕第三关节旋转的叉子。 第一臂包括形成在其顶端部分中的第一扩大部分,其上表面定位成高于第一臂的基端部分的上表面。 第二臂包括形成在其末端部分中的第二扩大部分,下表面位于比第二臂的基端部的下表面低的位置。 第一和第二扩大部分至少部分地水平地彼此重叠。