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    • 3. 发明授权
    • Surface acoustic wave resonator and surface acoustic wave oscillator
    • 表面声波谐振器和声表面波振荡器
    • US08305162B2
    • 2012-11-06
    • US12712275
    • 2010-02-25
    • Kunihito Yamanaka
    • Kunihito Yamanaka
    • H03H9/00H01L41/047
    • H03H9/02551H03H9/0274
    • A surface acoustic wave resonator includes: an IDT which is disposed on a quartz crystal substrate with an Euler angle of (−1.5°≦φ≦1.5°, 117°≦θ≦142°, 41.9°≦|ψ|≦49.57°) and which excites a surface acoustic wave in an upper mode of a stop band; and an inter-electrode-finger groove formed by recessing the quartz crystal substrate between electrode fingers of the IDT, wherein the following expression: 0.01λ≦G where λ represents a wavelength of the surface acoustic wave and G represents a depth of the inter-electrode-finger groove, is satisfied and when a line occupancy of the IDT is η, the depth of the inter-electrode-finger groove G and the line occupancy η are set to satisfy the following expression: −2.5×G/λ+0.675≦η≦−2.5×G/λ+0.775.
    • 表面声波谐振器包括:IDT,其设置在具有欧拉角(-1.5°& n1E; 1.5°,117°≦̸& Thetas; nlE; 142°,41.9°& nlE)的石英晶体基板上; |ψ|≦̸ 49.57°),并且激发停止带的上部模式中的表面声波; 以及通过使IDT的电极指之间的石英晶体基板凹陷而形成的电极间槽,其特征在于,具有以下表达式:0.01λ≦̸ G,其中,λ表示声表面波的波长,G表示相互之间的深度, 电极指槽,并且当IDT的线占有率为“e”时,电极间槽G的深度和线占有率eegr; 设定为满足以下表达式:-2.5×G /λ+ 0.675≦̸&eegr;≦̸ -2.5×G /λ+ 0.775。